Automated reactive thermal evaporation system for transparent conductive coatings
Autor(a) principal: | |
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Data de Publicação: | 2017 |
Outros Autores: | , , , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | https://doi.org/10.34629/ipl.isel.i-ETC.36 |
Resumo: | This work presents fully automated plasma-enhanced reactive thermal evaporation system (rf-PERTE) that can be used for the deposition of transparent metal oxide films with high reproducibility of their electrical and optical properties. The developed hardware/software platform enables the full control over the critical deposition conditions such as mass flow of oxygen, process pressure, current flowing through crucible and rf-power. For indium oxide films on glass substrates a resistivity of 9×10-4 Ω-cm and a transmittance of 90% in the visible spectral range were achieved without substrate heating. The system is also suitable for the deposition of transparent conducting coatings in a wide range of plastic substrates, for applications in the field of flexible sensors or solar cells. In particular, we have successfully deposited indium oxide on PEN (polyethylene naphthalate) sheets with electrical and optical properties approaching the ones of the films deposited on glass substrates. |
id |
RCAP_a2b7e504bdadbb3b0d7ba9c58049600d |
---|---|
oai_identifier_str |
oai:i-ETC.journals.isel.pt:article/36 |
network_acronym_str |
RCAP |
network_name_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository_id_str |
7160 |
spelling |
Automated reactive thermal evaporation system for transparent conductive coatingsSemiconductor Devices; Microelectronics; OptoelectronicsTCO, Solar cell, PLastic substrateThis work presents fully automated plasma-enhanced reactive thermal evaporation system (rf-PERTE) that can be used for the deposition of transparent metal oxide films with high reproducibility of their electrical and optical properties. The developed hardware/software platform enables the full control over the critical deposition conditions such as mass flow of oxygen, process pressure, current flowing through crucible and rf-power. For indium oxide films on glass substrates a resistivity of 9×10-4 Ω-cm and a transmittance of 90% in the visible spectral range were achieved without substrate heating. The system is also suitable for the deposition of transparent conducting coatings in a wide range of plastic substrates, for applications in the field of flexible sensors or solar cells. In particular, we have successfully deposited indium oxide on PEN (polyethylene naphthalate) sheets with electrical and optical properties approaching the ones of the films deposited on glass substrates.ISEL - High Institute of Engineering of Lisbon2017-10-26T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttps://doi.org/10.34629/ipl.isel.i-ETC.36oai:i-ETC.journals.isel.pt:article/36i-ETC : ISEL Academic Journal of Electronics Telecommunications and Computers; Vol 3, No 1 (2017): The CETC2016 Issue (A); ID-3i-ETC : ISEL Academic Journal of Electronics Telecommunications and Computers; Vol 3, No 1 (2017): The CETC2016 Issue (A); ID-32182-4010reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAPenghttp://journals.isel.pt/index.php/i-ETC/article/view/36https://doi.org/10.34629/ipl.isel.i-ETC.36http://journals.isel.pt/index.php/i-ETC/article/view/36/31Copyright (c) 2017 Miguel Fernandeshttp://creativecommons.org/licenses/by-nc/4.0info:eu-repo/semantics/openAccessFernandes, MiguelY. Vygranenko, YuriVieira, ManuelaLavareda, Guilhermede Carvalho, Carlos NunesAmaral, Ana2022-09-20T15:26:06Zoai:i-ETC.journals.isel.pt:article/36Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T15:51:12.301647Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse |
dc.title.none.fl_str_mv |
Automated reactive thermal evaporation system for transparent conductive coatings |
title |
Automated reactive thermal evaporation system for transparent conductive coatings |
spellingShingle |
Automated reactive thermal evaporation system for transparent conductive coatings Fernandes, Miguel Semiconductor Devices; Microelectronics; Optoelectronics TCO, Solar cell, PLastic substrate |
title_short |
Automated reactive thermal evaporation system for transparent conductive coatings |
title_full |
Automated reactive thermal evaporation system for transparent conductive coatings |
title_fullStr |
Automated reactive thermal evaporation system for transparent conductive coatings |
title_full_unstemmed |
Automated reactive thermal evaporation system for transparent conductive coatings |
title_sort |
Automated reactive thermal evaporation system for transparent conductive coatings |
author |
Fernandes, Miguel |
author_facet |
Fernandes, Miguel Y. Vygranenko, Yuri Vieira, Manuela Lavareda, Guilherme de Carvalho, Carlos Nunes Amaral, Ana |
author_role |
author |
author2 |
Y. Vygranenko, Yuri Vieira, Manuela Lavareda, Guilherme de Carvalho, Carlos Nunes Amaral, Ana |
author2_role |
author author author author author |
dc.contributor.author.fl_str_mv |
Fernandes, Miguel Y. Vygranenko, Yuri Vieira, Manuela Lavareda, Guilherme de Carvalho, Carlos Nunes Amaral, Ana |
dc.subject.por.fl_str_mv |
Semiconductor Devices; Microelectronics; Optoelectronics TCO, Solar cell, PLastic substrate |
topic |
Semiconductor Devices; Microelectronics; Optoelectronics TCO, Solar cell, PLastic substrate |
description |
This work presents fully automated plasma-enhanced reactive thermal evaporation system (rf-PERTE) that can be used for the deposition of transparent metal oxide films with high reproducibility of their electrical and optical properties. The developed hardware/software platform enables the full control over the critical deposition conditions such as mass flow of oxygen, process pressure, current flowing through crucible and rf-power. For indium oxide films on glass substrates a resistivity of 9×10-4 Ω-cm and a transmittance of 90% in the visible spectral range were achieved without substrate heating. The system is also suitable for the deposition of transparent conducting coatings in a wide range of plastic substrates, for applications in the field of flexible sensors or solar cells. In particular, we have successfully deposited indium oxide on PEN (polyethylene naphthalate) sheets with electrical and optical properties approaching the ones of the films deposited on glass substrates. |
publishDate |
2017 |
dc.date.none.fl_str_mv |
2017-10-26T00:00:00Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
https://doi.org/10.34629/ipl.isel.i-ETC.36 oai:i-ETC.journals.isel.pt:article/36 |
url |
https://doi.org/10.34629/ipl.isel.i-ETC.36 |
identifier_str_mv |
oai:i-ETC.journals.isel.pt:article/36 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
http://journals.isel.pt/index.php/i-ETC/article/view/36 https://doi.org/10.34629/ipl.isel.i-ETC.36 http://journals.isel.pt/index.php/i-ETC/article/view/36/31 |
dc.rights.driver.fl_str_mv |
Copyright (c) 2017 Miguel Fernandes http://creativecommons.org/licenses/by-nc/4.0 info:eu-repo/semantics/openAccess |
rights_invalid_str_mv |
Copyright (c) 2017 Miguel Fernandes http://creativecommons.org/licenses/by-nc/4.0 |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.publisher.none.fl_str_mv |
ISEL - High Institute of Engineering of Lisbon |
publisher.none.fl_str_mv |
ISEL - High Institute of Engineering of Lisbon |
dc.source.none.fl_str_mv |
i-ETC : ISEL Academic Journal of Electronics Telecommunications and Computers; Vol 3, No 1 (2017): The CETC2016 Issue (A); ID-3 i-ETC : ISEL Academic Journal of Electronics Telecommunications and Computers; Vol 3, No 1 (2017): The CETC2016 Issue (A); ID-3 2182-4010 reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
instname_str |
Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
instacron_str |
RCAAP |
institution |
RCAAP |
reponame_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
collection |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository.name.fl_str_mv |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
repository.mail.fl_str_mv |
|
_version_ |
1799130375503478784 |