High-resistivity polycrystalline silicon as RF substrate in wafer-level packaging

Detalhes bibliográficos
Autor(a) principal: Polyakov, A.
Data de Publicação: 2005
Outros Autores: Sinaga, S. M., Mendes, P. M., Correia, J. H., Bartek, M., Burghartz, J. N.
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/1822/1521
Resumo: High-resistivity polycrystalline silicon (HRPS) is presented as a novel low-cost and low-loss substrate for radio-frequency (RF) passive components in wafer-level packaging and integrated passive networks. A record quality factor (Q¼11; 1 GHz; 34 nH) and very low loss (0.65 dB=cm; 17 GHz) are demonstrated for inductors and coplanar waveguides, respectively, on HRPS.
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spelling High-resistivity polycrystalline silicon as RF substrate in wafer-level packagingWafer level packagingIntegrated antennaScience & TechnologyHigh-resistivity polycrystalline silicon (HRPS) is presented as a novel low-cost and low-loss substrate for radio-frequency (RF) passive components in wafer-level packaging and integrated passive networks. A record quality factor (Q¼11; 1 GHz; 34 nH) and very low loss (0.65 dB=cm; 17 GHz) are demonstrated for inductors and coplanar waveguides, respectively, on HRPS.EC project Bluewhale (IST-2000-10036), and of the Portugese Foundation for Science and Technology (SFRH=BD=4717=2001, POCTI=ESE=38468=2001, FEDER).Institution of Electrical Engineers (IEE)Universidade do MinhoPolyakov, A.Sinaga, S. M.Mendes, P. M.Correia, J. H.Bartek, M.Burghartz, J. N.2005-01-202005-01-20T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/1521eng"Electronic letters". ISSN 0013-5194. 41:2 (Jan. 2005) 100-101.0013-519410.1049/el:20056872info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:03:15Zoai:repositorium.sdum.uminho.pt:1822/1521Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T18:53:20.695883Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv High-resistivity polycrystalline silicon as RF substrate in wafer-level packaging
title High-resistivity polycrystalline silicon as RF substrate in wafer-level packaging
spellingShingle High-resistivity polycrystalline silicon as RF substrate in wafer-level packaging
Polyakov, A.
Wafer level packaging
Integrated antenna
Science & Technology
title_short High-resistivity polycrystalline silicon as RF substrate in wafer-level packaging
title_full High-resistivity polycrystalline silicon as RF substrate in wafer-level packaging
title_fullStr High-resistivity polycrystalline silicon as RF substrate in wafer-level packaging
title_full_unstemmed High-resistivity polycrystalline silicon as RF substrate in wafer-level packaging
title_sort High-resistivity polycrystalline silicon as RF substrate in wafer-level packaging
author Polyakov, A.
author_facet Polyakov, A.
Sinaga, S. M.
Mendes, P. M.
Correia, J. H.
Bartek, M.
Burghartz, J. N.
author_role author
author2 Sinaga, S. M.
Mendes, P. M.
Correia, J. H.
Bartek, M.
Burghartz, J. N.
author2_role author
author
author
author
author
dc.contributor.none.fl_str_mv Universidade do Minho
dc.contributor.author.fl_str_mv Polyakov, A.
Sinaga, S. M.
Mendes, P. M.
Correia, J. H.
Bartek, M.
Burghartz, J. N.
dc.subject.por.fl_str_mv Wafer level packaging
Integrated antenna
Science & Technology
topic Wafer level packaging
Integrated antenna
Science & Technology
description High-resistivity polycrystalline silicon (HRPS) is presented as a novel low-cost and low-loss substrate for radio-frequency (RF) passive components in wafer-level packaging and integrated passive networks. A record quality factor (Q¼11; 1 GHz; 34 nH) and very low loss (0.65 dB=cm; 17 GHz) are demonstrated for inductors and coplanar waveguides, respectively, on HRPS.
publishDate 2005
dc.date.none.fl_str_mv 2005-01-20
2005-01-20T00:00:00Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/1822/1521
url http://hdl.handle.net/1822/1521
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv "Electronic letters". ISSN 0013-5194. 41:2 (Jan. 2005) 100-101.
0013-5194
10.1049/el:20056872
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Institution of Electrical Engineers (IEE)
publisher.none.fl_str_mv Institution of Electrical Engineers (IEE)
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
repository.mail.fl_str_mv
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