Study of indium tin oxide thin films deposited on acrylics substrates by Ion beam assisted deposition technique
Autor(a) principal: | |
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Data de Publicação: | 2009 |
Outros Autores: | , , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | http://hdl.handle.net/1822/13626 |
Resumo: | Indium tin oxide (ITO) thin films have been deposited onto acrylics (PMMA) substrates by ion beam assisted deposition technique at different oxygen flows. The structural, optical and electrical properties of the deposited films have been characterized by X-ray diffraction, transmittance, FTIR, ellipometry and Hall effect measurements. The optical constants of the deposited films have been calculated by fitting the ellipsometric spectra. The effects of the oxygen flow on the properties of the deposited films have been studied. It has been found that 40 sccm oxygen flow is an optimum value for getting the films with good transmittance and low electrical resistivity. |
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Study of indium tin oxide thin films deposited on acrylics substrates by Ion beam assisted deposition techniqueITOOptical propertiesThin filmPMMAIon beam assisted depositionIndium tin oxideScience & TechnologyIndium tin oxide (ITO) thin films have been deposited onto acrylics (PMMA) substrates by ion beam assisted deposition technique at different oxygen flows. The structural, optical and electrical properties of the deposited films have been characterized by X-ray diffraction, transmittance, FTIR, ellipometry and Hall effect measurements. The optical constants of the deposited films have been calculated by fitting the ellipsometric spectra. The effects of the oxygen flow on the properties of the deposited films have been studied. It has been found that 40 sccm oxygen flow is an optimum value for getting the films with good transmittance and low electrical resistivity.American Scientific PublishersUniversidade do MinhoMeng LijianLiang ErjunGao JinsongTeixeira, Vasco M. P.Santos, M. P. dos2009-072009-07-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/13626eng1533-488010.1166/jnn.2009.M24http://www.ingentaconnect.com/content/asp/jnn/2009/00000009/00000007/art00024?token=004619196b767e57a7e41225f40386f2c4b46527d763b24442a576b64276abc986af9finfo:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:19:41Zoai:repositorium.sdum.uminho.pt:1822/13626Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T19:12:39.298339Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse |
dc.title.none.fl_str_mv |
Study of indium tin oxide thin films deposited on acrylics substrates by Ion beam assisted deposition technique |
title |
Study of indium tin oxide thin films deposited on acrylics substrates by Ion beam assisted deposition technique |
spellingShingle |
Study of indium tin oxide thin films deposited on acrylics substrates by Ion beam assisted deposition technique Meng Lijian ITO Optical properties Thin film PMMA Ion beam assisted deposition Indium tin oxide Science & Technology |
title_short |
Study of indium tin oxide thin films deposited on acrylics substrates by Ion beam assisted deposition technique |
title_full |
Study of indium tin oxide thin films deposited on acrylics substrates by Ion beam assisted deposition technique |
title_fullStr |
Study of indium tin oxide thin films deposited on acrylics substrates by Ion beam assisted deposition technique |
title_full_unstemmed |
Study of indium tin oxide thin films deposited on acrylics substrates by Ion beam assisted deposition technique |
title_sort |
Study of indium tin oxide thin films deposited on acrylics substrates by Ion beam assisted deposition technique |
author |
Meng Lijian |
author_facet |
Meng Lijian Liang Erjun Gao Jinsong Teixeira, Vasco M. P. Santos, M. P. dos |
author_role |
author |
author2 |
Liang Erjun Gao Jinsong Teixeira, Vasco M. P. Santos, M. P. dos |
author2_role |
author author author author |
dc.contributor.none.fl_str_mv |
Universidade do Minho |
dc.contributor.author.fl_str_mv |
Meng Lijian Liang Erjun Gao Jinsong Teixeira, Vasco M. P. Santos, M. P. dos |
dc.subject.por.fl_str_mv |
ITO Optical properties Thin film PMMA Ion beam assisted deposition Indium tin oxide Science & Technology |
topic |
ITO Optical properties Thin film PMMA Ion beam assisted deposition Indium tin oxide Science & Technology |
description |
Indium tin oxide (ITO) thin films have been deposited onto acrylics (PMMA) substrates by ion beam assisted deposition technique at different oxygen flows. The structural, optical and electrical properties of the deposited films have been characterized by X-ray diffraction, transmittance, FTIR, ellipometry and Hall effect measurements. The optical constants of the deposited films have been calculated by fitting the ellipsometric spectra. The effects of the oxygen flow on the properties of the deposited films have been studied. It has been found that 40 sccm oxygen flow is an optimum value for getting the films with good transmittance and low electrical resistivity. |
publishDate |
2009 |
dc.date.none.fl_str_mv |
2009-07 2009-07-01T00:00:00Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/1822/13626 |
url |
http://hdl.handle.net/1822/13626 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
1533-4880 10.1166/jnn.2009.M24 http://www.ingentaconnect.com/content/asp/jnn/2009/00000009/00000007/art00024?token=004619196b767e57a7e41225f40386f2c4b46527d763b24442a576b64276abc986af9f |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.publisher.none.fl_str_mv |
American Scientific Publishers |
publisher.none.fl_str_mv |
American Scientific Publishers |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
instname_str |
Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
instacron_str |
RCAAP |
institution |
RCAAP |
reponame_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
collection |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository.name.fl_str_mv |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
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1799132562186043392 |