Study of indium tin oxide thin films deposited on acrylics substrates by Ion beam assisted deposition technique

Detalhes bibliográficos
Autor(a) principal: Meng Lijian
Data de Publicação: 2009
Outros Autores: Liang Erjun, Gao Jinsong, Teixeira, Vasco M. P., Santos, M. P. dos
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/1822/13626
Resumo: Indium tin oxide (ITO) thin films have been deposited onto acrylics (PMMA) substrates by ion beam assisted deposition technique at different oxygen flows. The structural, optical and electrical properties of the deposited films have been characterized by X-ray diffraction, transmittance, FTIR, ellipometry and Hall effect measurements. The optical constants of the deposited films have been calculated by fitting the ellipsometric spectra. The effects of the oxygen flow on the properties of the deposited films have been studied. It has been found that 40 sccm oxygen flow is an optimum value for getting the films with good transmittance and low electrical resistivity.
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spelling Study of indium tin oxide thin films deposited on acrylics substrates by Ion beam assisted deposition techniqueITOOptical propertiesThin filmPMMAIon beam assisted depositionIndium tin oxideScience & TechnologyIndium tin oxide (ITO) thin films have been deposited onto acrylics (PMMA) substrates by ion beam assisted deposition technique at different oxygen flows. The structural, optical and electrical properties of the deposited films have been characterized by X-ray diffraction, transmittance, FTIR, ellipometry and Hall effect measurements. The optical constants of the deposited films have been calculated by fitting the ellipsometric spectra. The effects of the oxygen flow on the properties of the deposited films have been studied. It has been found that 40 sccm oxygen flow is an optimum value for getting the films with good transmittance and low electrical resistivity.American Scientific PublishersUniversidade do MinhoMeng LijianLiang ErjunGao JinsongTeixeira, Vasco M. P.Santos, M. P. dos2009-072009-07-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/13626eng1533-488010.1166/jnn.2009.M24http://www.ingentaconnect.com/content/asp/jnn/2009/00000009/00000007/art00024?token=004619196b767e57a7e41225f40386f2c4b46527d763b24442a576b64276abc986af9finfo:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:19:41Zoai:repositorium.sdum.uminho.pt:1822/13626Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T19:12:39.298339Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv Study of indium tin oxide thin films deposited on acrylics substrates by Ion beam assisted deposition technique
title Study of indium tin oxide thin films deposited on acrylics substrates by Ion beam assisted deposition technique
spellingShingle Study of indium tin oxide thin films deposited on acrylics substrates by Ion beam assisted deposition technique
Meng Lijian
ITO
Optical properties
Thin film
PMMA
Ion beam assisted deposition
Indium tin oxide
Science & Technology
title_short Study of indium tin oxide thin films deposited on acrylics substrates by Ion beam assisted deposition technique
title_full Study of indium tin oxide thin films deposited on acrylics substrates by Ion beam assisted deposition technique
title_fullStr Study of indium tin oxide thin films deposited on acrylics substrates by Ion beam assisted deposition technique
title_full_unstemmed Study of indium tin oxide thin films deposited on acrylics substrates by Ion beam assisted deposition technique
title_sort Study of indium tin oxide thin films deposited on acrylics substrates by Ion beam assisted deposition technique
author Meng Lijian
author_facet Meng Lijian
Liang Erjun
Gao Jinsong
Teixeira, Vasco M. P.
Santos, M. P. dos
author_role author
author2 Liang Erjun
Gao Jinsong
Teixeira, Vasco M. P.
Santos, M. P. dos
author2_role author
author
author
author
dc.contributor.none.fl_str_mv Universidade do Minho
dc.contributor.author.fl_str_mv Meng Lijian
Liang Erjun
Gao Jinsong
Teixeira, Vasco M. P.
Santos, M. P. dos
dc.subject.por.fl_str_mv ITO
Optical properties
Thin film
PMMA
Ion beam assisted deposition
Indium tin oxide
Science & Technology
topic ITO
Optical properties
Thin film
PMMA
Ion beam assisted deposition
Indium tin oxide
Science & Technology
description Indium tin oxide (ITO) thin films have been deposited onto acrylics (PMMA) substrates by ion beam assisted deposition technique at different oxygen flows. The structural, optical and electrical properties of the deposited films have been characterized by X-ray diffraction, transmittance, FTIR, ellipometry and Hall effect measurements. The optical constants of the deposited films have been calculated by fitting the ellipsometric spectra. The effects of the oxygen flow on the properties of the deposited films have been studied. It has been found that 40 sccm oxygen flow is an optimum value for getting the films with good transmittance and low electrical resistivity.
publishDate 2009
dc.date.none.fl_str_mv 2009-07
2009-07-01T00:00:00Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/1822/13626
url http://hdl.handle.net/1822/13626
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 1533-4880
10.1166/jnn.2009.M24
http://www.ingentaconnect.com/content/asp/jnn/2009/00000009/00000007/art00024?token=004619196b767e57a7e41225f40386f2c4b46527d763b24442a576b64276abc986af9f
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv American Scientific Publishers
publisher.none.fl_str_mv American Scientific Publishers
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
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