Optical properties of titanium oxycarbide thin films
Autor(a) principal: | |
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Data de Publicação: | 2009 |
Outros Autores: | , , , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | http://hdl.handle.net/1822/13506 |
Resumo: | The optical properties of TiC x O y thin films, deposited by reactive dc magnetron sputtering at different oxygen flow, were investigated by spectroscopic ellipsometry in the energy range of 0.75–4.5 eV. The dielectric functions measured in the energy range of intraband transitions were analyzed using the classical Drude theory. These results show that free plasma energy and the damping constant of the films depend strongly on film stoichiometry and on their oxygen content. The interband contribution to the optical conductivity of these films is in good agreement with the optical conductivity obtained from first principles calculations based on density functional theory. Both the experimental and the calculated results show that it is possible to significantly modify the optical properties of titanium oxycarbide by adjusting the oxygen content. |
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Optical properties of titanium oxycarbide thin filmsTitanium oxycarbideOptical propertiesEllipsometryMagnetron sputteringDensity functional theoryScience & TechnologyThe optical properties of TiC x O y thin films, deposited by reactive dc magnetron sputtering at different oxygen flow, were investigated by spectroscopic ellipsometry in the energy range of 0.75–4.5 eV. The dielectric functions measured in the energy range of intraband transitions were analyzed using the classical Drude theory. These results show that free plasma energy and the damping constant of the films depend strongly on film stoichiometry and on their oxygen content. The interband contribution to the optical conductivity of these films is in good agreement with the optical conductivity obtained from first principles calculations based on density functional theory. Both the experimental and the calculated results show that it is possible to significantly modify the optical properties of titanium oxycarbide by adjusting the oxygen content.Fundação para a Ciência e a Tecnologia (FCT) – Programa Operacional “Ciência , Tecnologia, Inovação” – CONC-REEQ/443/EEI/2005, PTDC/CTM/69362 e SFRH/BD/27569/2006ElsevierUniversidade do MinhoMarques, L.Pinto, H.Fernandes, Ana C.Banakh, O.Vaz, F.Ramos, Marta M. D.2009-032009-03-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/13506eng0169-433210.1016/j.apsusc.2008.08.022http://dx.doi.org/10.1016/j.apsusc.2008.08.022info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:52:28Zoai:repositorium.sdum.uminho.pt:1822/13506Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T19:51:36.879645Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse |
dc.title.none.fl_str_mv |
Optical properties of titanium oxycarbide thin films |
title |
Optical properties of titanium oxycarbide thin films |
spellingShingle |
Optical properties of titanium oxycarbide thin films Marques, L. Titanium oxycarbide Optical properties Ellipsometry Magnetron sputtering Density functional theory Science & Technology |
title_short |
Optical properties of titanium oxycarbide thin films |
title_full |
Optical properties of titanium oxycarbide thin films |
title_fullStr |
Optical properties of titanium oxycarbide thin films |
title_full_unstemmed |
Optical properties of titanium oxycarbide thin films |
title_sort |
Optical properties of titanium oxycarbide thin films |
author |
Marques, L. |
author_facet |
Marques, L. Pinto, H. Fernandes, Ana C. Banakh, O. Vaz, F. Ramos, Marta M. D. |
author_role |
author |
author2 |
Pinto, H. Fernandes, Ana C. Banakh, O. Vaz, F. Ramos, Marta M. D. |
author2_role |
author author author author author |
dc.contributor.none.fl_str_mv |
Universidade do Minho |
dc.contributor.author.fl_str_mv |
Marques, L. Pinto, H. Fernandes, Ana C. Banakh, O. Vaz, F. Ramos, Marta M. D. |
dc.subject.por.fl_str_mv |
Titanium oxycarbide Optical properties Ellipsometry Magnetron sputtering Density functional theory Science & Technology |
topic |
Titanium oxycarbide Optical properties Ellipsometry Magnetron sputtering Density functional theory Science & Technology |
description |
The optical properties of TiC x O y thin films, deposited by reactive dc magnetron sputtering at different oxygen flow, were investigated by spectroscopic ellipsometry in the energy range of 0.75–4.5 eV. The dielectric functions measured in the energy range of intraband transitions were analyzed using the classical Drude theory. These results show that free plasma energy and the damping constant of the films depend strongly on film stoichiometry and on their oxygen content. The interband contribution to the optical conductivity of these films is in good agreement with the optical conductivity obtained from first principles calculations based on density functional theory. Both the experimental and the calculated results show that it is possible to significantly modify the optical properties of titanium oxycarbide by adjusting the oxygen content. |
publishDate |
2009 |
dc.date.none.fl_str_mv |
2009-03 2009-03-01T00:00:00Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/1822/13506 |
url |
http://hdl.handle.net/1822/13506 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
0169-4332 10.1016/j.apsusc.2008.08.022 http://dx.doi.org/10.1016/j.apsusc.2008.08.022 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.publisher.none.fl_str_mv |
Elsevier |
publisher.none.fl_str_mv |
Elsevier |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
instname_str |
Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
instacron_str |
RCAAP |
institution |
RCAAP |
reponame_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
collection |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository.name.fl_str_mv |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
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1799133105446977536 |