Study of magnetic field enhanced plasma immersion ion implantation in Silicon
Autor(a) principal: | |
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Data de Publicação: | 2014 |
Outros Autores: | , , |
Tipo de documento: | Artigo de conferência |
Idioma: | eng |
Título da fonte: | Repositório Institucional da UNESP |
Texto Completo: | http://dx.doi.org/10.1088/1742-6596/511/1/012084 http://hdl.handle.net/11449/113568 |
Resumo: | A comparison between experimental measurements and numerical calculations of the ion current distribution in plasma immersion ion implantation (PIII) with external magnetic field is presented. Later, Silicon samples were implanted with nitrogen ion to analyze the effect on them. The magnetic field considered is essentially non-uniform and is generated by two magnetic coils installed on vacuum chamber. The presence of both, electric and magnetic field in PIII create a crossed ExB field system, promoting drift velocity of the plasma around the target. The results found shows that magnetized electrons drifting in ExB field provide electron-neutral collision. The efficient ionization increases the plasma density around the target where a magnetic confinement is formed. As result, the ion current density increases, promoting significant changes in the samples surface properties, especially in the surface wettability. |
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Repositório Institucional da UNESP |
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Study of magnetic field enhanced plasma immersion ion implantation in SiliconA comparison between experimental measurements and numerical calculations of the ion current distribution in plasma immersion ion implantation (PIII) with external magnetic field is presented. Later, Silicon samples were implanted with nitrogen ion to analyze the effect on them. The magnetic field considered is essentially non-uniform and is generated by two magnetic coils installed on vacuum chamber. The presence of both, electric and magnetic field in PIII create a crossed ExB field system, promoting drift velocity of the plasma around the target. The results found shows that magnetized electrons drifting in ExB field provide electron-neutral collision. The efficient ionization increases the plasma density around the target where a magnetic confinement is formed. As result, the ion current density increases, promoting significant changes in the samples surface properties, especially in the surface wettability.State Univ Sao Paulo UNESP, Fac Engn FEG, Dept Phys & Chem, Guartingueta, SP, BrazilState Univ Sao Paulo UNESP, Fac Engn FEG, Dept Phys & Chem, Guartingueta, SP, BrazilIop Publishing LtdUniversidade Estadual Paulista (Unesp)Pillaca, E. J. D. M. [UNESP]Kostov, K. G. [UNESP]Ueda, M.IOP2014-12-03T13:11:48Z2014-12-03T13:11:48Z2014-01-01info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/conferenceObject6application/pdfhttp://dx.doi.org/10.1088/1742-6596/511/1/01208415th International Congress On Plasma Physics (icpp2010) & 13th Latin American Workshop On Plasma Physics (lawpp2010). Bristol: Iop Publishing Ltd, v. 511, 6 p., 2014.1742-6588http://hdl.handle.net/11449/11356810.1088/1742-6596/511/1/012084WOS:000337223400084WOS000337223400084.pdf1946509801000450Web of Sciencereponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPeng15th International Congress On Plasma Physics (icpp2010) & 13th Latin American Workshop On Plasma Physics (lawpp2010)0,241info:eu-repo/semantics/openAccess2024-07-01T20:52:56Zoai:repositorio.unesp.br:11449/113568Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462024-08-05T16:02:38.421859Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false |
dc.title.none.fl_str_mv |
Study of magnetic field enhanced plasma immersion ion implantation in Silicon |
title |
Study of magnetic field enhanced plasma immersion ion implantation in Silicon |
spellingShingle |
Study of magnetic field enhanced plasma immersion ion implantation in Silicon Pillaca, E. J. D. M. [UNESP] |
title_short |
Study of magnetic field enhanced plasma immersion ion implantation in Silicon |
title_full |
Study of magnetic field enhanced plasma immersion ion implantation in Silicon |
title_fullStr |
Study of magnetic field enhanced plasma immersion ion implantation in Silicon |
title_full_unstemmed |
Study of magnetic field enhanced plasma immersion ion implantation in Silicon |
title_sort |
Study of magnetic field enhanced plasma immersion ion implantation in Silicon |
author |
Pillaca, E. J. D. M. [UNESP] |
author_facet |
Pillaca, E. J. D. M. [UNESP] Kostov, K. G. [UNESP] Ueda, M. IOP |
author_role |
author |
author2 |
Kostov, K. G. [UNESP] Ueda, M. IOP |
author2_role |
author author author |
dc.contributor.none.fl_str_mv |
Universidade Estadual Paulista (Unesp) |
dc.contributor.author.fl_str_mv |
Pillaca, E. J. D. M. [UNESP] Kostov, K. G. [UNESP] Ueda, M. IOP |
description |
A comparison between experimental measurements and numerical calculations of the ion current distribution in plasma immersion ion implantation (PIII) with external magnetic field is presented. Later, Silicon samples were implanted with nitrogen ion to analyze the effect on them. The magnetic field considered is essentially non-uniform and is generated by two magnetic coils installed on vacuum chamber. The presence of both, electric and magnetic field in PIII create a crossed ExB field system, promoting drift velocity of the plasma around the target. The results found shows that magnetized electrons drifting in ExB field provide electron-neutral collision. The efficient ionization increases the plasma density around the target where a magnetic confinement is formed. As result, the ion current density increases, promoting significant changes in the samples surface properties, especially in the surface wettability. |
publishDate |
2014 |
dc.date.none.fl_str_mv |
2014-12-03T13:11:48Z 2014-12-03T13:11:48Z 2014-01-01 |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/conferenceObject |
format |
conferenceObject |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://dx.doi.org/10.1088/1742-6596/511/1/012084 15th International Congress On Plasma Physics (icpp2010) & 13th Latin American Workshop On Plasma Physics (lawpp2010). Bristol: Iop Publishing Ltd, v. 511, 6 p., 2014. 1742-6588 http://hdl.handle.net/11449/113568 10.1088/1742-6596/511/1/012084 WOS:000337223400084 WOS000337223400084.pdf 1946509801000450 |
url |
http://dx.doi.org/10.1088/1742-6596/511/1/012084 http://hdl.handle.net/11449/113568 |
identifier_str_mv |
15th International Congress On Plasma Physics (icpp2010) & 13th Latin American Workshop On Plasma Physics (lawpp2010). Bristol: Iop Publishing Ltd, v. 511, 6 p., 2014. 1742-6588 10.1088/1742-6596/511/1/012084 WOS:000337223400084 WOS000337223400084.pdf 1946509801000450 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
15th International Congress On Plasma Physics (icpp2010) & 13th Latin American Workshop On Plasma Physics (lawpp2010) 0,241 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
6 application/pdf |
dc.publisher.none.fl_str_mv |
Iop Publishing Ltd |
publisher.none.fl_str_mv |
Iop Publishing Ltd |
dc.source.none.fl_str_mv |
Web of Science reponame:Repositório Institucional da UNESP instname:Universidade Estadual Paulista (UNESP) instacron:UNESP |
instname_str |
Universidade Estadual Paulista (UNESP) |
instacron_str |
UNESP |
institution |
UNESP |
reponame_str |
Repositório Institucional da UNESP |
collection |
Repositório Institucional da UNESP |
repository.name.fl_str_mv |
Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP) |
repository.mail.fl_str_mv |
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1808128597522644992 |