Platinum micromachining using femtosecond laser pulses
Autor(a) principal: | |
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Data de Publicação: | 2023 |
Tipo de documento: | Dissertação |
Idioma: | eng |
Título da fonte: | Biblioteca Digital de Teses e Dissertações da USP |
Texto Completo: | https://www.teses.usp.br/teses/disponiveis/76/76134/tde-13112023-104708/ |
Resumo: | Among the many techniques for micromachining, the Direct Laser Writing (DLW) introduces some advantages to the process, such as high resolution, size, and thickness control, while maintaining the materials proprieties after the procedure. The Laser Induced Forward Transfer (LIFT) is a DLW technique, whose principle is to transfer energy from the laser pulse to the sample, ejecting material droplets from the region where the laser beam is focalized. The technique can be performed using ultrashort laser pulses, which leads to nonlinear light-matter interaction, enabling high-resolution depositions and avoiding degradation of the transferred material. A variety of materials can be studied with LIFT, including metals, which draw attention due to its applications. Platinum micromachined structures are used to produce sensors, because of the material stability in different conditions and other applications. In this work, thin films of platinum (Pt) have been used as donor material for fs-LIFT. To characterize the deposition of Pt on glass, optical microscopy and scanning-electron microscope were used. Besides, the influence of the pulse repetition rate, pulse energy, and scanning speed on the produced features was investigated to determine the optimum irradiation parameters, as well as the threshold fluence. The incubation effect, the thickness control by the repetition rate and the production of different structures were studied. The depositions were made using two laser systems, one centered at 800 nm (5 MHz and pulse energy of nJ), and another one centered at 1030 nm (1 to 1000 kHz and pulse energy of μJ). It was observed that the optimum parameters are achieved with energies from 3 to 6 μJ and repetition rate around 1 kHz, as the depositions get homogeneous and well-defined, as well as the possibilities of micromachining tri-dimensional structures and different kind of depositions varying the micromachining conditions. |
id |
USP_fca749d0c54ac71bfddc90a314128b72 |
---|---|
oai_identifier_str |
oai:teses.usp.br:tde-13112023-104708 |
network_acronym_str |
USP |
network_name_str |
Biblioteca Digital de Teses e Dissertações da USP |
repository_id_str |
2721 |
spelling |
Platinum micromachining using femtosecond laser pulsesMicrofabricação de platina usando laser de pulses de femtosegundosEfeito de incubaçãoFemtosecond micromachiningIncubation effectLaser induced forward transferMicrofabricação com laser de femtossegundosMicrofabricação de platinaNon linear opticsÓptica não linearPlatinum micromachiningTransferência induzida a LaserAmong the many techniques for micromachining, the Direct Laser Writing (DLW) introduces some advantages to the process, such as high resolution, size, and thickness control, while maintaining the materials proprieties after the procedure. The Laser Induced Forward Transfer (LIFT) is a DLW technique, whose principle is to transfer energy from the laser pulse to the sample, ejecting material droplets from the region where the laser beam is focalized. The technique can be performed using ultrashort laser pulses, which leads to nonlinear light-matter interaction, enabling high-resolution depositions and avoiding degradation of the transferred material. A variety of materials can be studied with LIFT, including metals, which draw attention due to its applications. Platinum micromachined structures are used to produce sensors, because of the material stability in different conditions and other applications. In this work, thin films of platinum (Pt) have been used as donor material for fs-LIFT. To characterize the deposition of Pt on glass, optical microscopy and scanning-electron microscope were used. Besides, the influence of the pulse repetition rate, pulse energy, and scanning speed on the produced features was investigated to determine the optimum irradiation parameters, as well as the threshold fluence. The incubation effect, the thickness control by the repetition rate and the production of different structures were studied. The depositions were made using two laser systems, one centered at 800 nm (5 MHz and pulse energy of nJ), and another one centered at 1030 nm (1 to 1000 kHz and pulse energy of μJ). It was observed that the optimum parameters are achieved with energies from 3 to 6 μJ and repetition rate around 1 kHz, as the depositions get homogeneous and well-defined, as well as the possibilities of micromachining tri-dimensional structures and different kind of depositions varying the micromachining conditions.Dentre as muitos técnicas de microfabricação, as técnicas de Escrita Direta a Laser, ou Direct Laser Writing (DLW), trazem grandes vantagens ao processo, como a alta resolução, o controle do tamanho e da espessura na microfabricação e mantendo as propriedades do material após o procedimento. A técnica de Transferência Induzida a Laser, ou Laser Induced Forward Transfer (LIFT), é uma técnica de Escrita Direta a Laser em que seu princípio é transferir a energia de um pulso do laser para uma amostra, fazendo com que o material que absorve a energia na região em que se focalize o feixe seja transferido em gotas para um substrato. A técnica pode ser usada associada a um laser de pulsos ultracurtos, o que gera uma interação não linear da luz com a matéria, e com isso, a técnica resulta em deposições de alta resolução e qualidade e evitando a degradação do material transferido. Uma grande variedade de materiais podem ser estudados via LIFT, incluindo metais, que chamam atenção dos pesquisadores por suas aplicações tecnológicas. Estruturas microfabricadas de platina são usadas para produção de sensores, principalmente, por sua alta estabilidade em diferentes condições, além de outras aplicações. Neste trabalho, filmes finos de platina (Pt) foram usadas como doadoras de material para a técnica de LIFT com femtossegundo. Para caracterizar as microfabricações de platina em lâminas de vidro, microscopia óptica e microscopia eletrônica de varredura foram usadas. Além disso, foi estudada a influência da taxa de repetição do laser, a energia do pulso e da velocidade de varredura na microfabricação, e determinadas as melhores condições de microfabricação da platina nos setups usados, além de determinar a fluência de threshold e estudar o efeito de incubação. Dois sistemas foram usados, um centrado em 800 nm (5 MHz e energias em nJ) e outro centrado em 1030 nm (1 kHz à 1 MHz e energias em μJ). Foi observado que as melhores condições de microfabricação são no segundo sistema, com energias de 3 à 6 μJ, taxa de repetição próxima a 1 kHz, além de que as deposições são homogêneas e bem definidas. Além disso, foram estudadas diversas estruturas e mostrada a possibilidade de fazer microfabricação de estruturas tri-dimensionais.Biblioteca Digitais de Teses e Dissertações da USPMendonça, Cleber RenatoRocha, Luiz Eduardo Raphael da2023-08-29info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/masterThesisapplication/pdfhttps://www.teses.usp.br/teses/disponiveis/76/76134/tde-13112023-104708/reponame:Biblioteca Digital de Teses e Dissertações da USPinstname:Universidade de São Paulo (USP)instacron:USPLiberar o conteúdo para acesso público.info:eu-repo/semantics/openAccesseng2024-08-22T23:40:03Zoai:teses.usp.br:tde-13112023-104708Biblioteca Digital de Teses e Dissertaçõeshttp://www.teses.usp.br/PUBhttp://www.teses.usp.br/cgi-bin/mtd2br.plvirginia@if.usp.br|| atendimento@aguia.usp.br||virginia@if.usp.bropendoar:27212024-08-22T23:40:03Biblioteca Digital de Teses e Dissertações da USP - Universidade de São Paulo (USP)false |
dc.title.none.fl_str_mv |
Platinum micromachining using femtosecond laser pulses Microfabricação de platina usando laser de pulses de femtosegundos |
title |
Platinum micromachining using femtosecond laser pulses |
spellingShingle |
Platinum micromachining using femtosecond laser pulses Rocha, Luiz Eduardo Raphael da Efeito de incubação Femtosecond micromachining Incubation effect Laser induced forward transfer Microfabricação com laser de femtossegundos Microfabricação de platina Non linear optics Óptica não linear Platinum micromachining Transferência induzida a Laser |
title_short |
Platinum micromachining using femtosecond laser pulses |
title_full |
Platinum micromachining using femtosecond laser pulses |
title_fullStr |
Platinum micromachining using femtosecond laser pulses |
title_full_unstemmed |
Platinum micromachining using femtosecond laser pulses |
title_sort |
Platinum micromachining using femtosecond laser pulses |
author |
Rocha, Luiz Eduardo Raphael da |
author_facet |
Rocha, Luiz Eduardo Raphael da |
author_role |
author |
dc.contributor.none.fl_str_mv |
Mendonça, Cleber Renato |
dc.contributor.author.fl_str_mv |
Rocha, Luiz Eduardo Raphael da |
dc.subject.por.fl_str_mv |
Efeito de incubação Femtosecond micromachining Incubation effect Laser induced forward transfer Microfabricação com laser de femtossegundos Microfabricação de platina Non linear optics Óptica não linear Platinum micromachining Transferência induzida a Laser |
topic |
Efeito de incubação Femtosecond micromachining Incubation effect Laser induced forward transfer Microfabricação com laser de femtossegundos Microfabricação de platina Non linear optics Óptica não linear Platinum micromachining Transferência induzida a Laser |
description |
Among the many techniques for micromachining, the Direct Laser Writing (DLW) introduces some advantages to the process, such as high resolution, size, and thickness control, while maintaining the materials proprieties after the procedure. The Laser Induced Forward Transfer (LIFT) is a DLW technique, whose principle is to transfer energy from the laser pulse to the sample, ejecting material droplets from the region where the laser beam is focalized. The technique can be performed using ultrashort laser pulses, which leads to nonlinear light-matter interaction, enabling high-resolution depositions and avoiding degradation of the transferred material. A variety of materials can be studied with LIFT, including metals, which draw attention due to its applications. Platinum micromachined structures are used to produce sensors, because of the material stability in different conditions and other applications. In this work, thin films of platinum (Pt) have been used as donor material for fs-LIFT. To characterize the deposition of Pt on glass, optical microscopy and scanning-electron microscope were used. Besides, the influence of the pulse repetition rate, pulse energy, and scanning speed on the produced features was investigated to determine the optimum irradiation parameters, as well as the threshold fluence. The incubation effect, the thickness control by the repetition rate and the production of different structures were studied. The depositions were made using two laser systems, one centered at 800 nm (5 MHz and pulse energy of nJ), and another one centered at 1030 nm (1 to 1000 kHz and pulse energy of μJ). It was observed that the optimum parameters are achieved with energies from 3 to 6 μJ and repetition rate around 1 kHz, as the depositions get homogeneous and well-defined, as well as the possibilities of micromachining tri-dimensional structures and different kind of depositions varying the micromachining conditions. |
publishDate |
2023 |
dc.date.none.fl_str_mv |
2023-08-29 |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/masterThesis |
format |
masterThesis |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
https://www.teses.usp.br/teses/disponiveis/76/76134/tde-13112023-104708/ |
url |
https://www.teses.usp.br/teses/disponiveis/76/76134/tde-13112023-104708/ |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
|
dc.rights.driver.fl_str_mv |
Liberar o conteúdo para acesso público. info:eu-repo/semantics/openAccess |
rights_invalid_str_mv |
Liberar o conteúdo para acesso público. |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.coverage.none.fl_str_mv |
|
dc.publisher.none.fl_str_mv |
Biblioteca Digitais de Teses e Dissertações da USP |
publisher.none.fl_str_mv |
Biblioteca Digitais de Teses e Dissertações da USP |
dc.source.none.fl_str_mv |
reponame:Biblioteca Digital de Teses e Dissertações da USP instname:Universidade de São Paulo (USP) instacron:USP |
instname_str |
Universidade de São Paulo (USP) |
instacron_str |
USP |
institution |
USP |
reponame_str |
Biblioteca Digital de Teses e Dissertações da USP |
collection |
Biblioteca Digital de Teses e Dissertações da USP |
repository.name.fl_str_mv |
Biblioteca Digital de Teses e Dissertações da USP - Universidade de São Paulo (USP) |
repository.mail.fl_str_mv |
virginia@if.usp.br|| atendimento@aguia.usp.br||virginia@if.usp.br |
_version_ |
1809090694508183552 |