In-situ raman spectroscopy analysis of re-crystallization annealing of diamond turned silicon crystal

Detalhes bibliográficos
Autor(a) principal: Jasinevicius,Renato G.
Data de Publicação: 2007
Outros Autores: Duduch,Jaime Gilberto, Pizani,Paulo Sérgio
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Journal of the Brazilian Society of Mechanical Sciences and Engineering (Online)
Texto Completo: http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1678-58782007000100008
Resumo: Mechanical material removal during ultraprecision machining of semiconductors crystals normally induces surface damage. In this article, Raman micro-spectroscopy has been used to probe structural alteration as well as residual stresses in the machined surface generated by single point diamond turning. The damage found is characterized by an amorphous phase in the outmost surface layer. In addition, it is reported, for the first time, the results of in-situ re-crystallization annealing of micromachined silicon monitored by micro-Raman spectroscopy. It is also shown that the annealing heat treatment influenced surface roughness: results were Rmax equal to 24.2 nm and 47.3 nm for the non treated and for the annealed surfaces, respectively.
id ABCM-2_fda39d1c22b61d018538d92d3fcec9af
oai_identifier_str oai:scielo:S1678-58782007000100008
network_acronym_str ABCM-2
network_name_str Journal of the Brazilian Society of Mechanical Sciences and Engineering (Online)
repository_id_str
spelling In-situ raman spectroscopy analysis of re-crystallization annealing of diamond turned silicon crystalsilicondiamond turningannealingRaman spectroscopyAFMMechanical material removal during ultraprecision machining of semiconductors crystals normally induces surface damage. In this article, Raman micro-spectroscopy has been used to probe structural alteration as well as residual stresses in the machined surface generated by single point diamond turning. The damage found is characterized by an amorphous phase in the outmost surface layer. In addition, it is reported, for the first time, the results of in-situ re-crystallization annealing of micromachined silicon monitored by micro-Raman spectroscopy. It is also shown that the annealing heat treatment influenced surface roughness: results were Rmax equal to 24.2 nm and 47.3 nm for the non treated and for the annealed surfaces, respectively.Associação Brasileira de Engenharia e Ciências Mecânicas - ABCM2007-03-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersiontext/htmlhttp://old.scielo.br/scielo.php?script=sci_arttext&pid=S1678-58782007000100008Journal of the Brazilian Society of Mechanical Sciences and Engineering v.29 n.1 2007reponame:Journal of the Brazilian Society of Mechanical Sciences and Engineering (Online)instname:Associação Brasileira de Engenharia e Ciências Mecânicas (ABCM)instacron:ABCM10.1590/S1678-58782007000100008info:eu-repo/semantics/openAccessJasinevicius,Renato G.Duduch,Jaime GilbertoPizani,Paulo Sérgioeng2007-09-04T00:00:00Zoai:scielo:S1678-58782007000100008Revistahttps://www.scielo.br/j/jbsmse/https://old.scielo.br/oai/scielo-oai.php||abcm@abcm.org.br1806-36911678-5878opendoar:2007-09-04T00:00Journal of the Brazilian Society of Mechanical Sciences and Engineering (Online) - Associação Brasileira de Engenharia e Ciências Mecânicas (ABCM)false
dc.title.none.fl_str_mv In-situ raman spectroscopy analysis of re-crystallization annealing of diamond turned silicon crystal
title In-situ raman spectroscopy analysis of re-crystallization annealing of diamond turned silicon crystal
spellingShingle In-situ raman spectroscopy analysis of re-crystallization annealing of diamond turned silicon crystal
Jasinevicius,Renato G.
silicon
diamond turning
annealing
Raman spectroscopy
AFM
title_short In-situ raman spectroscopy analysis of re-crystallization annealing of diamond turned silicon crystal
title_full In-situ raman spectroscopy analysis of re-crystallization annealing of diamond turned silicon crystal
title_fullStr In-situ raman spectroscopy analysis of re-crystallization annealing of diamond turned silicon crystal
title_full_unstemmed In-situ raman spectroscopy analysis of re-crystallization annealing of diamond turned silicon crystal
title_sort In-situ raman spectroscopy analysis of re-crystallization annealing of diamond turned silicon crystal
author Jasinevicius,Renato G.
author_facet Jasinevicius,Renato G.
Duduch,Jaime Gilberto
Pizani,Paulo Sérgio
author_role author
author2 Duduch,Jaime Gilberto
Pizani,Paulo Sérgio
author2_role author
author
dc.contributor.author.fl_str_mv Jasinevicius,Renato G.
Duduch,Jaime Gilberto
Pizani,Paulo Sérgio
dc.subject.por.fl_str_mv silicon
diamond turning
annealing
Raman spectroscopy
AFM
topic silicon
diamond turning
annealing
Raman spectroscopy
AFM
description Mechanical material removal during ultraprecision machining of semiconductors crystals normally induces surface damage. In this article, Raman micro-spectroscopy has been used to probe structural alteration as well as residual stresses in the machined surface generated by single point diamond turning. The damage found is characterized by an amorphous phase in the outmost surface layer. In addition, it is reported, for the first time, the results of in-situ re-crystallization annealing of micromachined silicon monitored by micro-Raman spectroscopy. It is also shown that the annealing heat treatment influenced surface roughness: results were Rmax equal to 24.2 nm and 47.3 nm for the non treated and for the annealed surfaces, respectively.
publishDate 2007
dc.date.none.fl_str_mv 2007-03-01
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1678-58782007000100008
url http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1678-58782007000100008
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 10.1590/S1678-58782007000100008
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv text/html
dc.publisher.none.fl_str_mv Associação Brasileira de Engenharia e Ciências Mecânicas - ABCM
publisher.none.fl_str_mv Associação Brasileira de Engenharia e Ciências Mecânicas - ABCM
dc.source.none.fl_str_mv Journal of the Brazilian Society of Mechanical Sciences and Engineering v.29 n.1 2007
reponame:Journal of the Brazilian Society of Mechanical Sciences and Engineering (Online)
instname:Associação Brasileira de Engenharia e Ciências Mecânicas (ABCM)
instacron:ABCM
instname_str Associação Brasileira de Engenharia e Ciências Mecânicas (ABCM)
instacron_str ABCM
institution ABCM
reponame_str Journal of the Brazilian Society of Mechanical Sciences and Engineering (Online)
collection Journal of the Brazilian Society of Mechanical Sciences and Engineering (Online)
repository.name.fl_str_mv Journal of the Brazilian Society of Mechanical Sciences and Engineering (Online) - Associação Brasileira de Engenharia e Ciências Mecânicas (ABCM)
repository.mail.fl_str_mv ||abcm@abcm.org.br
_version_ 1754734680926584832

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