Annealing and Extended Etching Improve a Torsional Resonator for Thin Film Internal Friction Measurements

Detalhes bibliográficos
Autor(a) principal: Metcalf,Thomas
Data de Publicação: 2018
Outros Autores: Liu,Xiao, Abernathy,Matthew Robert
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Materials research (São Carlos. Online)
Texto Completo: http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392018000800213
Resumo: We evaluate two methods to improve the background internal friction of the Double Paddle Oscillator (DPO), which has a nominal low temperature value of Q-1 ≈ 2×10-8. We find that annealing the DPO in vacuum at 300°C for 3 hours systematically reduced Q-1 at all temperatures and revealed a 100K internal friction peak by permanently removing it. We also find a striking decrease of low temperature Q-1 as the DPO geometry is altered through extended etching. This decrease is evaluated via Finite Element Method modeling in terms of mode mixing and attachment loss.
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spelling Annealing and Extended Etching Improve a Torsional Resonator for Thin Film Internal Friction MeasurementsThin film internal frictionsilicon internal frictionWe evaluate two methods to improve the background internal friction of the Double Paddle Oscillator (DPO), which has a nominal low temperature value of Q-1 ≈ 2×10-8. We find that annealing the DPO in vacuum at 300°C for 3 hours systematically reduced Q-1 at all temperatures and revealed a 100K internal friction peak by permanently removing it. We also find a striking decrease of low temperature Q-1 as the DPO geometry is altered through extended etching. This decrease is evaluated via Finite Element Method modeling in terms of mode mixing and attachment loss.ABM, ABC, ABPol2018-01-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersiontext/htmlhttp://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392018000800213Materials Research v.21 suppl.2 2018reponame:Materials research (São Carlos. Online)instname:Universidade Federal de São Carlos (UFSCAR)instacron:ABM ABC ABPOL10.1590/1980-5373-mr-2017-0875info:eu-repo/semantics/openAccessMetcalf,ThomasLiu,XiaoAbernathy,Matthew Roberteng2018-06-13T00:00:00Zoai:scielo:S1516-14392018000800213Revistahttp://www.scielo.br/mrPUBhttps://old.scielo.br/oai/scielo-oai.phpdedz@power.ufscar.br1980-53731516-1439opendoar:2018-06-13T00:00Materials research (São Carlos. Online) - Universidade Federal de São Carlos (UFSCAR)false
dc.title.none.fl_str_mv Annealing and Extended Etching Improve a Torsional Resonator for Thin Film Internal Friction Measurements
title Annealing and Extended Etching Improve a Torsional Resonator for Thin Film Internal Friction Measurements
spellingShingle Annealing and Extended Etching Improve a Torsional Resonator for Thin Film Internal Friction Measurements
Metcalf,Thomas
Thin film internal friction
silicon internal friction
title_short Annealing and Extended Etching Improve a Torsional Resonator for Thin Film Internal Friction Measurements
title_full Annealing and Extended Etching Improve a Torsional Resonator for Thin Film Internal Friction Measurements
title_fullStr Annealing and Extended Etching Improve a Torsional Resonator for Thin Film Internal Friction Measurements
title_full_unstemmed Annealing and Extended Etching Improve a Torsional Resonator for Thin Film Internal Friction Measurements
title_sort Annealing and Extended Etching Improve a Torsional Resonator for Thin Film Internal Friction Measurements
author Metcalf,Thomas
author_facet Metcalf,Thomas
Liu,Xiao
Abernathy,Matthew Robert
author_role author
author2 Liu,Xiao
Abernathy,Matthew Robert
author2_role author
author
dc.contributor.author.fl_str_mv Metcalf,Thomas
Liu,Xiao
Abernathy,Matthew Robert
dc.subject.por.fl_str_mv Thin film internal friction
silicon internal friction
topic Thin film internal friction
silicon internal friction
description We evaluate two methods to improve the background internal friction of the Double Paddle Oscillator (DPO), which has a nominal low temperature value of Q-1 ≈ 2×10-8. We find that annealing the DPO in vacuum at 300°C for 3 hours systematically reduced Q-1 at all temperatures and revealed a 100K internal friction peak by permanently removing it. We also find a striking decrease of low temperature Q-1 as the DPO geometry is altered through extended etching. This decrease is evaluated via Finite Element Method modeling in terms of mode mixing and attachment loss.
publishDate 2018
dc.date.none.fl_str_mv 2018-01-01
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392018000800213
url http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392018000800213
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 10.1590/1980-5373-mr-2017-0875
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv text/html
dc.publisher.none.fl_str_mv ABM, ABC, ABPol
publisher.none.fl_str_mv ABM, ABC, ABPol
dc.source.none.fl_str_mv Materials Research v.21 suppl.2 2018
reponame:Materials research (São Carlos. Online)
instname:Universidade Federal de São Carlos (UFSCAR)
instacron:ABM ABC ABPOL
instname_str Universidade Federal de São Carlos (UFSCAR)
instacron_str ABM ABC ABPOL
institution ABM ABC ABPOL
reponame_str Materials research (São Carlos. Online)
collection Materials research (São Carlos. Online)
repository.name.fl_str_mv Materials research (São Carlos. Online) - Universidade Federal de São Carlos (UFSCAR)
repository.mail.fl_str_mv dedz@power.ufscar.br
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