New experimental setup for metallic clusters production based on hollow cylindrical magnetron sputtering

Detalhes bibliográficos
Autor(a) principal: Sá, Artur Domingues Tavares de, 1985-
Data de Publicação: 2014
Outros Autores: Oiko, Vitor Toshiyuki Abrão, 1986-, Di Domenicantonio, Giulia, 1979-, Rodrigues, Varlei, 1973-
Tipo de documento: Artigo
Título da fonte: Repositório da Produção Científica e Intelectual da Unicamp
Texto Completo: https://hdl.handle.net/20.500.12733/1665521
Resumo: Agradecimentos: This work was supported by FAPESP (Proc. 2007/01722-9, 2008/11293-0, 2008/11588-0), CNPq (Proc. 555647/2006-4, 472036/2009-2), CAPES (Proc. 88881.030488/2013-01), and the SNSF. The authors would like to thank M. Hillenkamp and D. Ugarte for countless discussions and help concerning the clusters source and the Laboratorio Nacional Luz Sincrotron (LNLS) for the assistance with their machine shop. The authors also would like to thank the Laboratorio Nacional de Nanotecnologia (LNNano) for allowing the use of their transmission electron microscope
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spelling New experimental setup for metallic clusters production based on hollow cylindrical magnetron sputteringNanopartículasMateriais nanoestruturadosNanotecnologiaNanotechnologyNanostructured materialsNanoparticlesArtigo originalAgradecimentos: This work was supported by FAPESP (Proc. 2007/01722-9, 2008/11293-0, 2008/11588-0), CNPq (Proc. 555647/2006-4, 472036/2009-2), CAPES (Proc. 88881.030488/2013-01), and the SNSF. The authors would like to thank M. Hillenkamp and D. Ugarte for countless discussions and help concerning the clusters source and the Laboratorio Nacional Luz Sincrotron (LNLS) for the assistance with their machine shop. The authors also would like to thank the Laboratorio Nacional de Nanotecnologia (LNNano) for allowing the use of their transmission electron microscopeAbstract: Nanoscale structures have been widely studied because their properties differ greatly from their bulk counterpart systems, raising both a fundamental and technological interest. Despite the great advances that have been made, the domain still presents great challenges. The development of dedicated instrumentation, in particular, is an essential issue since the well established techniques used for atomic size and for macroscopic systems are often not suited for the study of nanoaggregates. In this article, the authors present the development of a new cluster source aimed to produce pure or alloy metallic clusters ranging from two up to thousands atoms in a controllable way. The setup is based on the design of Haberland et al. [J. Vac. Sci. Technol. 12, 2925 (1994)] with the implementation of an hollow cylindrical sputtering as atoms source that enhances the control over the production of alloy clusters and also improves target usageFUNDAÇÃO DE AMPARO À PESQUISA DO ESTADO DE SÃO PAULO - FAPESPCONSELHO NACIONAL DE DESENVOLVIMENTO CIENTÍFICO E TECNOLÓGICO - CNPQCOORDENAÇÃO DE APERFEIÇOAMENTO DE PESSOAL DE NÍVEL SUPERIOR - CAPESFechadoUNIVERSIDADE ESTADUAL DE CAMPINASSá, Artur Domingues Tavares de, 1985-Oiko, Vitor Toshiyuki Abrão, 1986-Di Domenicantonio, Giulia, 1979-Rodrigues, Varlei, 1973-2014info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttps://hdl.handle.net/20.500.12733/1665521SÁ, Artur Domingues Tavares de et al. New experimental setup for metallic clusters production based on hollow cylindrical magnetron sputtering. Journal of vacuum science and technology. B, Nanotechnology & microelectronics. New York, NY : AIP Publishing, 2014. Vol. 32, n. 6 (Nov., 2014), n. art. 061804, p. 1-9. Disponível em: https://hdl.handle.net/20.500.12733/1665521. Acesso em: 24 mai. 2023.Inglêshttps://repositorio.unicamp.br/acervo/detalhe/1217306reponame:Repositório da Produção Científica e Intelectual da Unicampinstname:Universidade Estadual de Campinas (UNICAMP)instacron:UNICAMPinfo:eu-repo/semantics/openAccess2022-07-18T09:10:00Zoai:https://www.repositorio.unicamp.br/:1217306Repositório InstitucionalPUBhttp://repositorio.unicamp.br/oai/requestreposip@unicamp.bropendoar:2022-07-18T09:10Repositório da Produção Científica e Intelectual da Unicamp - Universidade Estadual de Campinas (UNICAMP)false
dc.title.none.fl_str_mv New experimental setup for metallic clusters production based on hollow cylindrical magnetron sputtering
title New experimental setup for metallic clusters production based on hollow cylindrical magnetron sputtering
spellingShingle New experimental setup for metallic clusters production based on hollow cylindrical magnetron sputtering
Sá, Artur Domingues Tavares de, 1985-
Nanopartículas
Materiais nanoestruturados
Nanotecnologia
Nanotechnology
Nanostructured materials
Nanoparticles
Artigo original
title_short New experimental setup for metallic clusters production based on hollow cylindrical magnetron sputtering
title_full New experimental setup for metallic clusters production based on hollow cylindrical magnetron sputtering
title_fullStr New experimental setup for metallic clusters production based on hollow cylindrical magnetron sputtering
title_full_unstemmed New experimental setup for metallic clusters production based on hollow cylindrical magnetron sputtering
title_sort New experimental setup for metallic clusters production based on hollow cylindrical magnetron sputtering
author Sá, Artur Domingues Tavares de, 1985-
author_facet Sá, Artur Domingues Tavares de, 1985-
Oiko, Vitor Toshiyuki Abrão, 1986-
Di Domenicantonio, Giulia, 1979-
Rodrigues, Varlei, 1973-
author_role author
author2 Oiko, Vitor Toshiyuki Abrão, 1986-
Di Domenicantonio, Giulia, 1979-
Rodrigues, Varlei, 1973-
author2_role author
author
author
dc.contributor.none.fl_str_mv UNIVERSIDADE ESTADUAL DE CAMPINAS
dc.contributor.author.fl_str_mv Sá, Artur Domingues Tavares de, 1985-
Oiko, Vitor Toshiyuki Abrão, 1986-
Di Domenicantonio, Giulia, 1979-
Rodrigues, Varlei, 1973-
dc.subject.por.fl_str_mv Nanopartículas
Materiais nanoestruturados
Nanotecnologia
Nanotechnology
Nanostructured materials
Nanoparticles
Artigo original
topic Nanopartículas
Materiais nanoestruturados
Nanotecnologia
Nanotechnology
Nanostructured materials
Nanoparticles
Artigo original
description Agradecimentos: This work was supported by FAPESP (Proc. 2007/01722-9, 2008/11293-0, 2008/11588-0), CNPq (Proc. 555647/2006-4, 472036/2009-2), CAPES (Proc. 88881.030488/2013-01), and the SNSF. The authors would like to thank M. Hillenkamp and D. Ugarte for countless discussions and help concerning the clusters source and the Laboratorio Nacional Luz Sincrotron (LNLS) for the assistance with their machine shop. The authors also would like to thank the Laboratorio Nacional de Nanotecnologia (LNNano) for allowing the use of their transmission electron microscope
publishDate 2014
dc.date.none.fl_str_mv 2014
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv https://hdl.handle.net/20.500.12733/1665521
SÁ, Artur Domingues Tavares de et al. New experimental setup for metallic clusters production based on hollow cylindrical magnetron sputtering. Journal of vacuum science and technology. B, Nanotechnology & microelectronics. New York, NY : AIP Publishing, 2014. Vol. 32, n. 6 (Nov., 2014), n. art. 061804, p. 1-9. Disponível em: https://hdl.handle.net/20.500.12733/1665521. Acesso em: 24 mai. 2023.
url https://hdl.handle.net/20.500.12733/1665521
identifier_str_mv SÁ, Artur Domingues Tavares de et al. New experimental setup for metallic clusters production based on hollow cylindrical magnetron sputtering. Journal of vacuum science and technology. B, Nanotechnology & microelectronics. New York, NY : AIP Publishing, 2014. Vol. 32, n. 6 (Nov., 2014), n. art. 061804, p. 1-9. Disponível em: https://hdl.handle.net/20.500.12733/1665521. Acesso em: 24 mai. 2023.
dc.language.iso.fl_str_mv Inglês
language_invalid_str_mv Inglês
dc.relation.none.fl_str_mv https://repositorio.unicamp.br/acervo/detalhe/1217306
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.source.none.fl_str_mv reponame:Repositório da Produção Científica e Intelectual da Unicamp
instname:Universidade Estadual de Campinas (UNICAMP)
instacron:UNICAMP
instname_str Universidade Estadual de Campinas (UNICAMP)
instacron_str UNICAMP
institution UNICAMP
reponame_str Repositório da Produção Científica e Intelectual da Unicamp
collection Repositório da Produção Científica e Intelectual da Unicamp
repository.name.fl_str_mv Repositório da Produção Científica e Intelectual da Unicamp - Universidade Estadual de Campinas (UNICAMP)
repository.mail.fl_str_mv reposip@unicamp.br
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