The annealing effect on structural and optical properties of ZnO thin films produced by RF sputtering

Detalhes bibliográficos
Autor(a) principal: Rolo, Anabela G.
Data de Publicação: 2007
Outros Autores: Campos, J. Ayres de, Viseu, T. M. R., Arôso, T. de Lacerda, Cerqueira, M. F.
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/1822/13774
Resumo: In this work, a study of the structure and optical properties of undoped ZnO thin films produced by r.f. magnetron sputtering technique as a function of the growth parameters is reported. Modification under annealing conditions is also analysed. Raman spectroscopy, X-ray photoelectron spectroscopy, X-ray diffraction and optical transmittance have been used. From the position of the (002) X-ray diffraction peak and the E2 (high) mode detected in Raman spectra, the residual stress both in the as-grown and in the annealed samples has been estimated.
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spelling The annealing effect on structural and optical properties of ZnO thin films produced by RF sputteringZnOThin filmsX-rayRamanStressScience & TechnologyIn this work, a study of the structure and optical properties of undoped ZnO thin films produced by r.f. magnetron sputtering technique as a function of the growth parameters is reported. Modification under annealing conditions is also analysed. Raman spectroscopy, X-ray photoelectron spectroscopy, X-ray diffraction and optical transmittance have been used. From the position of the (002) X-ray diffraction peak and the E2 (high) mode detected in Raman spectra, the residual stress both in the as-grown and in the annealed samples has been estimated.ElsevierUniversidade do MinhoRolo, Anabela G.Campos, J. Ayres deViseu, T. M. R.Arôso, T. de LacerdaCerqueira, M. F.20072007-01-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/13774eng0749-603610.1016/j.spmi.2007.04.069http://www.sciencedirect.com/science/article/pii/S0749603607001036info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T11:58:27ZPortal AgregadorONG
dc.title.none.fl_str_mv The annealing effect on structural and optical properties of ZnO thin films produced by RF sputtering
title The annealing effect on structural and optical properties of ZnO thin films produced by RF sputtering
spellingShingle The annealing effect on structural and optical properties of ZnO thin films produced by RF sputtering
Rolo, Anabela G.
ZnO
Thin films
X-ray
Raman
Stress
Science & Technology
title_short The annealing effect on structural and optical properties of ZnO thin films produced by RF sputtering
title_full The annealing effect on structural and optical properties of ZnO thin films produced by RF sputtering
title_fullStr The annealing effect on structural and optical properties of ZnO thin films produced by RF sputtering
title_full_unstemmed The annealing effect on structural and optical properties of ZnO thin films produced by RF sputtering
title_sort The annealing effect on structural and optical properties of ZnO thin films produced by RF sputtering
author Rolo, Anabela G.
author_facet Rolo, Anabela G.
Campos, J. Ayres de
Viseu, T. M. R.
Arôso, T. de Lacerda
Cerqueira, M. F.
author_role author
author2 Campos, J. Ayres de
Viseu, T. M. R.
Arôso, T. de Lacerda
Cerqueira, M. F.
author2_role author
author
author
author
dc.contributor.none.fl_str_mv Universidade do Minho
dc.contributor.author.fl_str_mv Rolo, Anabela G.
Campos, J. Ayres de
Viseu, T. M. R.
Arôso, T. de Lacerda
Cerqueira, M. F.
dc.subject.por.fl_str_mv ZnO
Thin films
X-ray
Raman
Stress
Science & Technology
topic ZnO
Thin films
X-ray
Raman
Stress
Science & Technology
description In this work, a study of the structure and optical properties of undoped ZnO thin films produced by r.f. magnetron sputtering technique as a function of the growth parameters is reported. Modification under annealing conditions is also analysed. Raman spectroscopy, X-ray photoelectron spectroscopy, X-ray diffraction and optical transmittance have been used. From the position of the (002) X-ray diffraction peak and the E2 (high) mode detected in Raman spectra, the residual stress both in the as-grown and in the annealed samples has been estimated.
publishDate 2007
dc.date.none.fl_str_mv 2007
2007-01-01T00:00:00Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/1822/13774
url http://hdl.handle.net/1822/13774
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 0749-6036
10.1016/j.spmi.2007.04.069
http://www.sciencedirect.com/science/article/pii/S0749603607001036
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Elsevier
publisher.none.fl_str_mv Elsevier
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv
repository.mail.fl_str_mv
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