TiAgx thin films for lower limb prosthesis pressure sensors: effect of composition and structural changes on the electrical and thermal response of the films
Autor(a) principal: | |
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Data de Publicação: | 2013 |
Outros Autores: | , , , , , , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | http://hdl.handle.net/10316/27485 https://doi.org/10.1016/j.apsusc.2013.07.021 |
Resumo: | Titanium–silver, Ti–Ag, thin films display excellent biocompatibility and reveal great potential to be used as conductive materials for prosthesis pressure sensors. In the frame of this work, TiAgx thin films were deposited onto silicon and glass substrates by DC magnetron sputtering, using a pure Ti target containing different amounts of Ag pellets. The films display Ag/Ti ratios varying from 0 up to 0.36, resulting in relatively large range of composition, which gave rise to varied morphological, structural and some selected property responses. For Ag/Ti ratios below 3.0 × 10−3, the TiAgx films exhibited similar behavior to those of standard Ti films. Above this critical value, the role of Ag becomes crucial on the crystallographic structure evolution, as well as on the surface morphology changes of the films. A gradual increase of the Ag/Ti ratio leads to the growth of Ti–Ag crystalline phases, whereas the long range order of Ti grains was reduced from 22 nm down to 7 nm. Similarly, a denser microstructure was developed with a reduction of the sharpness of the surface morphology. This critical Ag/Ti ratio (<3.0 × 10−3) also corresponded to an enhanced electrical resistivity, which reached a value of ρ300K = 72 μΩ cm. The thermal characterization revealed a similar trend, with the existence of two clear distinct zones, related again with the different critical composition ratios and the correspondent changes in both morphology and structural features. |
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TiAgx thin films for lower limb prosthesis pressure sensors: effect of composition and structural changes on the electrical and thermal response of the filmsPressure sensorsTiAg filmsXRDElectrical resistivityThermal conductivityTitanium–silver, Ti–Ag, thin films display excellent biocompatibility and reveal great potential to be used as conductive materials for prosthesis pressure sensors. In the frame of this work, TiAgx thin films were deposited onto silicon and glass substrates by DC magnetron sputtering, using a pure Ti target containing different amounts of Ag pellets. The films display Ag/Ti ratios varying from 0 up to 0.36, resulting in relatively large range of composition, which gave rise to varied morphological, structural and some selected property responses. For Ag/Ti ratios below 3.0 × 10−3, the TiAgx films exhibited similar behavior to those of standard Ti films. Above this critical value, the role of Ag becomes crucial on the crystallographic structure evolution, as well as on the surface morphology changes of the films. A gradual increase of the Ag/Ti ratio leads to the growth of Ti–Ag crystalline phases, whereas the long range order of Ti grains was reduced from 22 nm down to 7 nm. Similarly, a denser microstructure was developed with a reduction of the sharpness of the surface morphology. This critical Ag/Ti ratio (<3.0 × 10−3) also corresponded to an enhanced electrical resistivity, which reached a value of ρ300K = 72 μΩ cm. The thermal characterization revealed a similar trend, with the existence of two clear distinct zones, related again with the different critical composition ratios and the correspondent changes in both morphology and structural features.Elsevier2013-11-15info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articlehttp://hdl.handle.net/10316/27485http://hdl.handle.net/10316/27485https://doi.org/10.1016/j.apsusc.2013.07.021engLOPES, C. [et. al] - TiAgx thin films for lower limb prosthesis pressure sensors: effect of composition and structural changes on the electrical and thermal response of the films. "Applied Surface Science". ISSN 0169-4332. Vol. 285 (2013) p. 10-180169-4332http://www.sciencedirect.com/science/article/pii/S0169433213013299Lopes, C.Gonçalves, C.Pedrosa, P.Macedo, F.Alves, E.Barradas, N. P.Martin, N.Fonseca, C.Vaz, F.info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2020-05-25T04:44:51ZPortal AgregadorONG |
dc.title.none.fl_str_mv |
TiAgx thin films for lower limb prosthesis pressure sensors: effect of composition and structural changes on the electrical and thermal response of the films |
title |
TiAgx thin films for lower limb prosthesis pressure sensors: effect of composition and structural changes on the electrical and thermal response of the films |
spellingShingle |
TiAgx thin films for lower limb prosthesis pressure sensors: effect of composition and structural changes on the electrical and thermal response of the films Lopes, C. Pressure sensors TiAg films XRD Electrical resistivity Thermal conductivity |
title_short |
TiAgx thin films for lower limb prosthesis pressure sensors: effect of composition and structural changes on the electrical and thermal response of the films |
title_full |
TiAgx thin films for lower limb prosthesis pressure sensors: effect of composition and structural changes on the electrical and thermal response of the films |
title_fullStr |
TiAgx thin films for lower limb prosthesis pressure sensors: effect of composition and structural changes on the electrical and thermal response of the films |
title_full_unstemmed |
TiAgx thin films for lower limb prosthesis pressure sensors: effect of composition and structural changes on the electrical and thermal response of the films |
title_sort |
TiAgx thin films for lower limb prosthesis pressure sensors: effect of composition and structural changes on the electrical and thermal response of the films |
author |
Lopes, C. |
author_facet |
Lopes, C. Gonçalves, C. Pedrosa, P. Macedo, F. Alves, E. Barradas, N. P. Martin, N. Fonseca, C. Vaz, F. |
author_role |
author |
author2 |
Gonçalves, C. Pedrosa, P. Macedo, F. Alves, E. Barradas, N. P. Martin, N. Fonseca, C. Vaz, F. |
author2_role |
author author author author author author author author |
dc.contributor.author.fl_str_mv |
Lopes, C. Gonçalves, C. Pedrosa, P. Macedo, F. Alves, E. Barradas, N. P. Martin, N. Fonseca, C. Vaz, F. |
dc.subject.por.fl_str_mv |
Pressure sensors TiAg films XRD Electrical resistivity Thermal conductivity |
topic |
Pressure sensors TiAg films XRD Electrical resistivity Thermal conductivity |
description |
Titanium–silver, Ti–Ag, thin films display excellent biocompatibility and reveal great potential to be used as conductive materials for prosthesis pressure sensors. In the frame of this work, TiAgx thin films were deposited onto silicon and glass substrates by DC magnetron sputtering, using a pure Ti target containing different amounts of Ag pellets. The films display Ag/Ti ratios varying from 0 up to 0.36, resulting in relatively large range of composition, which gave rise to varied morphological, structural and some selected property responses. For Ag/Ti ratios below 3.0 × 10−3, the TiAgx films exhibited similar behavior to those of standard Ti films. Above this critical value, the role of Ag becomes crucial on the crystallographic structure evolution, as well as on the surface morphology changes of the films. A gradual increase of the Ag/Ti ratio leads to the growth of Ti–Ag crystalline phases, whereas the long range order of Ti grains was reduced from 22 nm down to 7 nm. Similarly, a denser microstructure was developed with a reduction of the sharpness of the surface morphology. This critical Ag/Ti ratio (<3.0 × 10−3) also corresponded to an enhanced electrical resistivity, which reached a value of ρ300K = 72 μΩ cm. The thermal characterization revealed a similar trend, with the existence of two clear distinct zones, related again with the different critical composition ratios and the correspondent changes in both morphology and structural features. |
publishDate |
2013 |
dc.date.none.fl_str_mv |
2013-11-15 |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/10316/27485 http://hdl.handle.net/10316/27485 https://doi.org/10.1016/j.apsusc.2013.07.021 |
url |
http://hdl.handle.net/10316/27485 https://doi.org/10.1016/j.apsusc.2013.07.021 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
LOPES, C. [et. al] - TiAgx thin films for lower limb prosthesis pressure sensors: effect of composition and structural changes on the electrical and thermal response of the films. "Applied Surface Science". ISSN 0169-4332. Vol. 285 (2013) p. 10-18 0169-4332 http://www.sciencedirect.com/science/article/pii/S0169433213013299 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.publisher.none.fl_str_mv |
Elsevier |
publisher.none.fl_str_mv |
Elsevier |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
instname_str |
Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
instacron_str |
RCAAP |
institution |
RCAAP |
reponame_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
collection |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository.name.fl_str_mv |
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repository.mail.fl_str_mv |
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_version_ |
1777302630458982400 |