Microstructure and mechanical properties of nanocomposite (Ti,Si,Al)N coatings

Detalhes bibliográficos
Autor(a) principal: Carvalho, S.
Data de Publicação: 2001
Outros Autores: Rebouta, L., Cavaleiro, A., Rocha, L. A., Gomes, J., Alves, E.
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/10316/4291
https://doi.org/10.1016/S0040-6090(01)01348-7
Resumo: In this work (Ti,Si,Al)N films were deposited using only rf or a combination of rf and d.c. reactive magnetron sputtering. Chemical composition, thickness, film structure and mechanical properties of the films were investigated by means of Rutherford backscattering (RBS), electron microprobe analysis (EPMA), ball-cratering, X-ray diffraction (XRD) and ultramicroindentation, respectively. All samples showed high hardness values, exceeding, in some cases, 50 GPa. XRD results revealed the formation of a mixture of two phases whose structure is similar to TiN. One phase is noted as being TiN bulk with a lattice parameter of 0.428 nm and develops only in conditions of high surface mobility. This behaviour can be associated with the segregation of the SiNx phase, though the formation of an amorphous AlN phase cannot be excluded. Another phase, which is noted as Ti---Si---Al---N (a[approximate]0.420 nm), where Si and Al atoms substitute the Ti atoms on the TiN lattice, develops in situations of lower surface mobility. The thermal stability of these coatings was studied by thermal treatments in a vacuum atmosphere, where it was found that a small increase in hardness was obtained after 1 h heat treatment at 800°C.
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spelling Microstructure and mechanical properties of nanocomposite (Ti,Si,Al)N coatingsNanocompositesSuperhard coatingsTi-Si-Al-NMicrostructureThermal stabilityWear coefficientIn this work (Ti,Si,Al)N films were deposited using only rf or a combination of rf and d.c. reactive magnetron sputtering. Chemical composition, thickness, film structure and mechanical properties of the films were investigated by means of Rutherford backscattering (RBS), electron microprobe analysis (EPMA), ball-cratering, X-ray diffraction (XRD) and ultramicroindentation, respectively. All samples showed high hardness values, exceeding, in some cases, 50 GPa. XRD results revealed the formation of a mixture of two phases whose structure is similar to TiN. One phase is noted as being TiN bulk with a lattice parameter of 0.428 nm and develops only in conditions of high surface mobility. This behaviour can be associated with the segregation of the SiNx phase, though the formation of an amorphous AlN phase cannot be excluded. Another phase, which is noted as Ti---Si---Al---N (a[approximate]0.420 nm), where Si and Al atoms substitute the Ti atoms on the TiN lattice, develops in situations of lower surface mobility. The thermal stability of these coatings was studied by thermal treatments in a vacuum atmosphere, where it was found that a small increase in hardness was obtained after 1 h heat treatment at 800°C.http://www.sciencedirect.com/science/article/B6TW0-44JDBYS-2G/1/d7819a04df29f7a493595f68509bc9632001info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleaplication/PDFhttp://hdl.handle.net/10316/4291http://hdl.handle.net/10316/4291https://doi.org/10.1016/S0040-6090(01)01348-7engThin Solid Films. 398-399:(2001) 391-396Carvalho, S.Rebouta, L.Cavaleiro, A.Rocha, L. A.Gomes, J.Alves, E.info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2021-08-18T09:19:51Zoai:estudogeral.uc.pt:10316/4291Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T20:58:29.352867Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv Microstructure and mechanical properties of nanocomposite (Ti,Si,Al)N coatings
title Microstructure and mechanical properties of nanocomposite (Ti,Si,Al)N coatings
spellingShingle Microstructure and mechanical properties of nanocomposite (Ti,Si,Al)N coatings
Carvalho, S.
Nanocomposites
Superhard coatings
Ti-Si-Al-N
Microstructure
Thermal stability
Wear coefficient
title_short Microstructure and mechanical properties of nanocomposite (Ti,Si,Al)N coatings
title_full Microstructure and mechanical properties of nanocomposite (Ti,Si,Al)N coatings
title_fullStr Microstructure and mechanical properties of nanocomposite (Ti,Si,Al)N coatings
title_full_unstemmed Microstructure and mechanical properties of nanocomposite (Ti,Si,Al)N coatings
title_sort Microstructure and mechanical properties of nanocomposite (Ti,Si,Al)N coatings
author Carvalho, S.
author_facet Carvalho, S.
Rebouta, L.
Cavaleiro, A.
Rocha, L. A.
Gomes, J.
Alves, E.
author_role author
author2 Rebouta, L.
Cavaleiro, A.
Rocha, L. A.
Gomes, J.
Alves, E.
author2_role author
author
author
author
author
dc.contributor.author.fl_str_mv Carvalho, S.
Rebouta, L.
Cavaleiro, A.
Rocha, L. A.
Gomes, J.
Alves, E.
dc.subject.por.fl_str_mv Nanocomposites
Superhard coatings
Ti-Si-Al-N
Microstructure
Thermal stability
Wear coefficient
topic Nanocomposites
Superhard coatings
Ti-Si-Al-N
Microstructure
Thermal stability
Wear coefficient
description In this work (Ti,Si,Al)N films were deposited using only rf or a combination of rf and d.c. reactive magnetron sputtering. Chemical composition, thickness, film structure and mechanical properties of the films were investigated by means of Rutherford backscattering (RBS), electron microprobe analysis (EPMA), ball-cratering, X-ray diffraction (XRD) and ultramicroindentation, respectively. All samples showed high hardness values, exceeding, in some cases, 50 GPa. XRD results revealed the formation of a mixture of two phases whose structure is similar to TiN. One phase is noted as being TiN bulk with a lattice parameter of 0.428 nm and develops only in conditions of high surface mobility. This behaviour can be associated with the segregation of the SiNx phase, though the formation of an amorphous AlN phase cannot be excluded. Another phase, which is noted as Ti---Si---Al---N (a[approximate]0.420 nm), where Si and Al atoms substitute the Ti atoms on the TiN lattice, develops in situations of lower surface mobility. The thermal stability of these coatings was studied by thermal treatments in a vacuum atmosphere, where it was found that a small increase in hardness was obtained after 1 h heat treatment at 800°C.
publishDate 2001
dc.date.none.fl_str_mv 2001
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
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status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/10316/4291
http://hdl.handle.net/10316/4291
https://doi.org/10.1016/S0040-6090(01)01348-7
url http://hdl.handle.net/10316/4291
https://doi.org/10.1016/S0040-6090(01)01348-7
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv Thin Solid Films. 398-399:(2001) 391-396
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eu_rights_str_mv openAccess
dc.format.none.fl_str_mv aplication/PDF
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