Capacitive MEMS accelerometers testing mechanism for auto-calibration and long-term diagnostics

Detalhes bibliográficos
Autor(a) principal: L. A. Rocha
Data de Publicação: 2007
Outros Autores: Lukas Mol, Edmond Cretu, Reinoud F. Wolffenbuttel, José Machado da Silva
Tipo de documento: Livro
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: https://repositorio-aberto.up.pt/handle/10216/71515
Resumo: A test technique for capacitive MEMSaccelerometers and electrostatic micro-actuators based onthe measurement of pull-in voltages is described. Acombination of pull-in voltages and resonance frequencymeasurements can be used for the estimation of processinducedvariations in device dimensions from layout anddeviations in material properties from nominal value,which enables auto-calibration. Preliminary measurementson fabricated devices confirm the validity of the proposedtechnique. Moreover, long-term pull-in measurements haveindicated the suitability of the approach as in-systemdiagnostic tool.
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spelling Capacitive MEMS accelerometers testing mechanism for auto-calibration and long-term diagnosticsMicro-sistemas, Outras ciências da engenharia e tecnologiasMicrosystems, Other engineering and technologiesA test technique for capacitive MEMSaccelerometers and electrostatic micro-actuators based onthe measurement of pull-in voltages is described. Acombination of pull-in voltages and resonance frequencymeasurements can be used for the estimation of processinducedvariations in device dimensions from layout anddeviations in material properties from nominal value,which enables auto-calibration. Preliminary measurementson fabricated devices confirm the validity of the proposedtechnique. Moreover, long-term pull-in measurements haveindicated the suitability of the approach as in-systemdiagnostic tool.20072007-01-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/bookapplication/pdfhttps://repositorio-aberto.up.pt/handle/10216/71515engL. A. RochaLukas MolEdmond CretuReinoud F. WolffenbuttelJosé Machado da Silvainfo:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-26T14:12:17ZPortal AgregadorONG
dc.title.none.fl_str_mv Capacitive MEMS accelerometers testing mechanism for auto-calibration and long-term diagnostics
title Capacitive MEMS accelerometers testing mechanism for auto-calibration and long-term diagnostics
spellingShingle Capacitive MEMS accelerometers testing mechanism for auto-calibration and long-term diagnostics
L. A. Rocha
Micro-sistemas, Outras ciências da engenharia e tecnologias
Microsystems, Other engineering and technologies
title_short Capacitive MEMS accelerometers testing mechanism for auto-calibration and long-term diagnostics
title_full Capacitive MEMS accelerometers testing mechanism for auto-calibration and long-term diagnostics
title_fullStr Capacitive MEMS accelerometers testing mechanism for auto-calibration and long-term diagnostics
title_full_unstemmed Capacitive MEMS accelerometers testing mechanism for auto-calibration and long-term diagnostics
title_sort Capacitive MEMS accelerometers testing mechanism for auto-calibration and long-term diagnostics
author L. A. Rocha
author_facet L. A. Rocha
Lukas Mol
Edmond Cretu
Reinoud F. Wolffenbuttel
José Machado da Silva
author_role author
author2 Lukas Mol
Edmond Cretu
Reinoud F. Wolffenbuttel
José Machado da Silva
author2_role author
author
author
author
dc.contributor.author.fl_str_mv L. A. Rocha
Lukas Mol
Edmond Cretu
Reinoud F. Wolffenbuttel
José Machado da Silva
dc.subject.por.fl_str_mv Micro-sistemas, Outras ciências da engenharia e tecnologias
Microsystems, Other engineering and technologies
topic Micro-sistemas, Outras ciências da engenharia e tecnologias
Microsystems, Other engineering and technologies
description A test technique for capacitive MEMSaccelerometers and electrostatic micro-actuators based onthe measurement of pull-in voltages is described. Acombination of pull-in voltages and resonance frequencymeasurements can be used for the estimation of processinducedvariations in device dimensions from layout anddeviations in material properties from nominal value,which enables auto-calibration. Preliminary measurementson fabricated devices confirm the validity of the proposedtechnique. Moreover, long-term pull-in measurements haveindicated the suitability of the approach as in-systemdiagnostic tool.
publishDate 2007
dc.date.none.fl_str_mv 2007
2007-01-01T00:00:00Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/book
format book
status_str publishedVersion
dc.identifier.uri.fl_str_mv https://repositorio-aberto.up.pt/handle/10216/71515
url https://repositorio-aberto.up.pt/handle/10216/71515
dc.language.iso.fl_str_mv eng
language eng
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv
repository.mail.fl_str_mv
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