Silicon nitride thin-films deposited by radiofrequency reactive sputtering: refractive index optimization with substrate cooling in a nitrogen-rich atmosphere
Autor(a) principal: | |
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Data de Publicação: | 2024 |
Outros Autores: | , , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | https://hdl.handle.net/1822/89541 |
Resumo: | Silicon nitride (SiN) is widely used as a core material in optical waveguides due to its optical properties. The deposition of SiN thin-films by radiofrequency (RF) reactive sputtering is commonly used in low-temperature processes, where the thin-films optical properties can be optimized by controlling the deposition parameters (sputtering power, gases ratio, etc.). This work presents the deposition of several SiN thin-films by RF reactive sputtering with different sputtering powers (ranging from 180 W to 300 W), with a nitrogen-argon ratio of 16:4, and performing substrate cooling in a nitrogen-rich atmosphere immediately after deposition, consisting in keeping the substrate under 16 sccm of nitrogen until it reaches 25 ◦C. The refractive indices of the SiN thin-films were assessed through ellipsometry, obtaining a maximum refractive index of 1.906 at 400 nm. SiN thin-films were also analyzed by energy-dispersive spectroscopy (EDS) and atomic force microscopy (AFM). |
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Silicon nitride thin-films deposited by radiofrequency reactive sputtering: refractive index optimization with substrate cooling in a nitrogen-rich atmosphereThin-filmsPhysical vapor depositionSputteringOptical materialEllipsometryEnergy-dispersive spectroscopySilicon nitride (SiN) is widely used as a core material in optical waveguides due to its optical properties. The deposition of SiN thin-films by radiofrequency (RF) reactive sputtering is commonly used in low-temperature processes, where the thin-films optical properties can be optimized by controlling the deposition parameters (sputtering power, gases ratio, etc.). This work presents the deposition of several SiN thin-films by RF reactive sputtering with different sputtering powers (ranging from 180 W to 300 W), with a nitrogen-argon ratio of 16:4, and performing substrate cooling in a nitrogen-rich atmosphere immediately after deposition, consisting in keeping the substrate under 16 sccm of nitrogen until it reaches 25 ◦C. The refractive indices of the SiN thin-films were assessed through ellipsometry, obtaining a maximum refractive index of 1.906 at 400 nm. SiN thin-films were also analyzed by energy-dispersive spectroscopy (EDS) and atomic force microscopy (AFM).This work is supported by: MPhotonBiopsy, PTDC/FISOTI/1259/2020, http://doi.org/10.54499/PTDC/FIS-OTI/1259/2020; and CMEMS-UMinho Strategic Project UIDB/04436/2020 and UIDP/ 04436/2020. João R. Freitas thanks FCT (Fundação para a Ciência e a Tecnologia) for the Ph.D. grant, 2020.07708.BD. Sara Pimenta thanks FCT for the grant 2022.00101.CEECIND/CP1718/CT0008, https://doi.org/10.54499/2022.00101.CEECIND/CP1718/CT0008.ElsevierUniversidade do MinhoFreitas, João Rui MartinsPimenta, Sara Filomena RibeiroRodrigues, Vítor H.Silva, Manuel Fernando RibeiroCorreia, J. H.20242024-01-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttps://hdl.handle.net/1822/89541engFreitas, J. R., Pimenta, S., Rodrigues, V. H., Silva, M. F., & Correia, J. H. (2024, March). Silicon nitride thin-films deposited by radiofrequency reactive sputtering: Refractive index optimization with substrate cooling in a nitrogen-rich atmosphere. Optical Materials. Elsevier BV. http://doi.org/10.1016/j.optmat.2024.1151300925-34671873-125210.1016/j.optmat.2024.115130115130https://www.sciencedirect.com/science/article/pii/S0925346724003136info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2024-03-16T01:21:44Zoai:repositorium.sdum.uminho.pt:1822/89541Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-20T04:01:10.985838Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse |
dc.title.none.fl_str_mv |
Silicon nitride thin-films deposited by radiofrequency reactive sputtering: refractive index optimization with substrate cooling in a nitrogen-rich atmosphere |
title |
Silicon nitride thin-films deposited by radiofrequency reactive sputtering: refractive index optimization with substrate cooling in a nitrogen-rich atmosphere |
spellingShingle |
Silicon nitride thin-films deposited by radiofrequency reactive sputtering: refractive index optimization with substrate cooling in a nitrogen-rich atmosphere Freitas, João Rui Martins Thin-films Physical vapor deposition Sputtering Optical material Ellipsometry Energy-dispersive spectroscopy |
title_short |
Silicon nitride thin-films deposited by radiofrequency reactive sputtering: refractive index optimization with substrate cooling in a nitrogen-rich atmosphere |
title_full |
Silicon nitride thin-films deposited by radiofrequency reactive sputtering: refractive index optimization with substrate cooling in a nitrogen-rich atmosphere |
title_fullStr |
Silicon nitride thin-films deposited by radiofrequency reactive sputtering: refractive index optimization with substrate cooling in a nitrogen-rich atmosphere |
title_full_unstemmed |
Silicon nitride thin-films deposited by radiofrequency reactive sputtering: refractive index optimization with substrate cooling in a nitrogen-rich atmosphere |
title_sort |
Silicon nitride thin-films deposited by radiofrequency reactive sputtering: refractive index optimization with substrate cooling in a nitrogen-rich atmosphere |
author |
Freitas, João Rui Martins |
author_facet |
Freitas, João Rui Martins Pimenta, Sara Filomena Ribeiro Rodrigues, Vítor H. Silva, Manuel Fernando Ribeiro Correia, J. H. |
author_role |
author |
author2 |
Pimenta, Sara Filomena Ribeiro Rodrigues, Vítor H. Silva, Manuel Fernando Ribeiro Correia, J. H. |
author2_role |
author author author author |
dc.contributor.none.fl_str_mv |
Universidade do Minho |
dc.contributor.author.fl_str_mv |
Freitas, João Rui Martins Pimenta, Sara Filomena Ribeiro Rodrigues, Vítor H. Silva, Manuel Fernando Ribeiro Correia, J. H. |
dc.subject.por.fl_str_mv |
Thin-films Physical vapor deposition Sputtering Optical material Ellipsometry Energy-dispersive spectroscopy |
topic |
Thin-films Physical vapor deposition Sputtering Optical material Ellipsometry Energy-dispersive spectroscopy |
description |
Silicon nitride (SiN) is widely used as a core material in optical waveguides due to its optical properties. The deposition of SiN thin-films by radiofrequency (RF) reactive sputtering is commonly used in low-temperature processes, where the thin-films optical properties can be optimized by controlling the deposition parameters (sputtering power, gases ratio, etc.). This work presents the deposition of several SiN thin-films by RF reactive sputtering with different sputtering powers (ranging from 180 W to 300 W), with a nitrogen-argon ratio of 16:4, and performing substrate cooling in a nitrogen-rich atmosphere immediately after deposition, consisting in keeping the substrate under 16 sccm of nitrogen until it reaches 25 ◦C. The refractive indices of the SiN thin-films were assessed through ellipsometry, obtaining a maximum refractive index of 1.906 at 400 nm. SiN thin-films were also analyzed by energy-dispersive spectroscopy (EDS) and atomic force microscopy (AFM). |
publishDate |
2024 |
dc.date.none.fl_str_mv |
2024 2024-01-01T00:00:00Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
https://hdl.handle.net/1822/89541 |
url |
https://hdl.handle.net/1822/89541 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
Freitas, J. R., Pimenta, S., Rodrigues, V. H., Silva, M. F., & Correia, J. H. (2024, March). Silicon nitride thin-films deposited by radiofrequency reactive sputtering: Refractive index optimization with substrate cooling in a nitrogen-rich atmosphere. Optical Materials. Elsevier BV. http://doi.org/10.1016/j.optmat.2024.115130 0925-3467 1873-1252 10.1016/j.optmat.2024.115130 115130 https://www.sciencedirect.com/science/article/pii/S0925346724003136 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.publisher.none.fl_str_mv |
Elsevier |
publisher.none.fl_str_mv |
Elsevier |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
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Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
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RCAAP |
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RCAAP |
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Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
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Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
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Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
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