Modelling and characterization of a low pressure capacitively coupled hydrogen discharge

Detalhes bibliográficos
Autor(a) principal: Marques, L.
Data de Publicação: 2004
Outros Autores: Jolly, J., Gousset, G., Alves, L. L.
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/1822/4384
Resumo: This paper presents a systematic characterization of a pure hydrogen capacitively coupled radio frequency discharge, produced in a parallel plate cylindrical setup, comparing experimental measurements obtained for such discharge with numerical simulations. A good agreement is found between simulation results and experimental measurements for the discharge main electrical parameters. A comparison of H atom absolute density LIF measurements with simulation results will also be presented.
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spelling Modelling and characterization of a low pressure capacitively coupled hydrogen dischargeThis paper presents a systematic characterization of a pure hydrogen capacitively coupled radio frequency discharge, produced in a parallel plate cylindrical setup, comparing experimental measurements obtained for such discharge with numerical simulations. A good agreement is found between simulation results and experimental measurements for the discharge main electrical parameters. A comparison of H atom absolute density LIF measurements with simulation results will also be presented.European Physical SocietyUniversidade do MinhoMarques, L.Jolly, J.Gousset, G.Alves, L. L.2004-092004-09-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/4384engCIUPINA, Victor ; MUSA, Geavit ; VLADOIU, Rodica, ed. lit. – “ESCAMPIG : proceedings of the European Conference on Atomic and Molecular Physics of Ionised Gases, 17, Constanta, Roménia, 2004”. [S.l.] : European Physical Society, 2004, p. 113.info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:27:40Zoai:repositorium.sdum.uminho.pt:1822/4384Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T19:22:19.502159Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv Modelling and characterization of a low pressure capacitively coupled hydrogen discharge
title Modelling and characterization of a low pressure capacitively coupled hydrogen discharge
spellingShingle Modelling and characterization of a low pressure capacitively coupled hydrogen discharge
Marques, L.
title_short Modelling and characterization of a low pressure capacitively coupled hydrogen discharge
title_full Modelling and characterization of a low pressure capacitively coupled hydrogen discharge
title_fullStr Modelling and characterization of a low pressure capacitively coupled hydrogen discharge
title_full_unstemmed Modelling and characterization of a low pressure capacitively coupled hydrogen discharge
title_sort Modelling and characterization of a low pressure capacitively coupled hydrogen discharge
author Marques, L.
author_facet Marques, L.
Jolly, J.
Gousset, G.
Alves, L. L.
author_role author
author2 Jolly, J.
Gousset, G.
Alves, L. L.
author2_role author
author
author
dc.contributor.none.fl_str_mv Universidade do Minho
dc.contributor.author.fl_str_mv Marques, L.
Jolly, J.
Gousset, G.
Alves, L. L.
description This paper presents a systematic characterization of a pure hydrogen capacitively coupled radio frequency discharge, produced in a parallel plate cylindrical setup, comparing experimental measurements obtained for such discharge with numerical simulations. A good agreement is found between simulation results and experimental measurements for the discharge main electrical parameters. A comparison of H atom absolute density LIF measurements with simulation results will also be presented.
publishDate 2004
dc.date.none.fl_str_mv 2004-09
2004-09-01T00:00:00Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/1822/4384
url http://hdl.handle.net/1822/4384
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv CIUPINA, Victor ; MUSA, Geavit ; VLADOIU, Rodica, ed. lit. – “ESCAMPIG : proceedings of the European Conference on Atomic and Molecular Physics of Ionised Gases, 17, Constanta, Roménia, 2004”. [S.l.] : European Physical Society, 2004, p. 113.
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv European Physical Society
publisher.none.fl_str_mv European Physical Society
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
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