Damage accumulation in Si crystal during ion implantation at elevated temperatures : evidence of chemical effects
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Publication Date: | 2000 |
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Format: | Article |
Language: | eng |
Source: | Repositório Institucional da UFRGS |
Download full: | http://hdl.handle.net/10183/95427 |
Summary: | Damage in Si induced by irradiation with various light/medium mass ions at elevated temperatures and high doses (>=3x1016 cm-²) was studied using Rutherford backscattering spectroscopy, cross-section transmission electron microscopy, and high resolution x-ray diffraction. The results obtained have shown that there is a marked variation in the damage accumulation for different ion species. For O+ and N+ ions a distinct layer with a low level of damage presenting negative strain is formed at the surface. It has been found that the magnitude of the strain does not correlate with the energy deposited in the collision cascades. In the cases of Ne+ and Mg+ implantation, a low damage accumulation occurs near the surface but no negative strain is formed. In contrast to the N+ and O+ cases, with the increase of the Ne+ or Mg+ dose (>1x1017 cm-²) the damage profile stretches almost to the crystal surface. It is proposed that in addition to the mechanism of spatial separation of Frenkel pairs taking place in the collision cascades, the ability of the implanted ions to form precipitates and complexes with Si atoms noticeably influences the damage formation during implantation at elevated temperatures. |
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Souza, Joel Pereira deSuprun-Belevich, Yu.Boudinov, Henri IvanovCima, Carlos Alberto2014-05-20T02:04:56Z20000021-8979http://hdl.handle.net/10183/95427000274889Damage in Si induced by irradiation with various light/medium mass ions at elevated temperatures and high doses (>=3x1016 cm-²) was studied using Rutherford backscattering spectroscopy, cross-section transmission electron microscopy, and high resolution x-ray diffraction. The results obtained have shown that there is a marked variation in the damage accumulation for different ion species. For O+ and N+ ions a distinct layer with a low level of damage presenting negative strain is formed at the surface. It has been found that the magnitude of the strain does not correlate with the energy deposited in the collision cascades. In the cases of Ne+ and Mg+ implantation, a low damage accumulation occurs near the surface but no negative strain is formed. In contrast to the N+ and O+ cases, with the increase of the Ne+ or Mg+ dose (>1x1017 cm-²) the damage profile stretches almost to the crystal surface. It is proposed that in addition to the mechanism of spatial separation of Frenkel pairs taking place in the collision cascades, the ability of the implanted ions to form precipitates and complexes with Si atoms noticeably influences the damage formation during implantation at elevated temperatures.application/pdfengJournal of applied physics. Melville. Vol. 87, no. 12 (June 2000), p. 8385-8388Retroespalhamento rutherfordSilícioMicroscopia eletrônicaImplantação de íonsCristaisDamage accumulation in Si crystal during ion implantation at elevated temperatures : evidence of chemical effectsEstrangeiroinfo:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/openAccessreponame:Repositório Institucional da UFRGSinstname:Universidade Federal do Rio Grande do Sul (UFRGS)instacron:UFRGSORIGINAL000274889.pdf000274889.pdfTexto completo (inglês)application/pdf276052http://www.lume.ufrgs.br/bitstream/10183/95427/1/000274889.pdf270064fea5b904924bdbd3bcef3179abMD51TEXT000274889.pdf.txt000274889.pdf.txtExtracted Texttext/plain21470http://www.lume.ufrgs.br/bitstream/10183/95427/2/000274889.pdf.txt6e55418317dcd78e985af9868e15de3bMD52THUMBNAIL000274889.pdf.jpg000274889.pdf.jpgGenerated Thumbnailimage/jpeg1584http://www.lume.ufrgs.br/bitstream/10183/95427/3/000274889.pdf.jpg73cdfe9aa9a92fccc951df336f8e392bMD5310183/954272022-02-22 04:53:29.668507oai:www.lume.ufrgs.br:10183/95427Repositório de PublicaçõesPUBhttps://lume.ufrgs.br/oai/requestopendoar:2022-02-22T07:53:29Repositório Institucional da UFRGS - Universidade Federal do Rio Grande do Sul (UFRGS)false |
dc.title.pt_BR.fl_str_mv |
Damage accumulation in Si crystal during ion implantation at elevated temperatures : evidence of chemical effects |
title |
Damage accumulation in Si crystal during ion implantation at elevated temperatures : evidence of chemical effects |
spellingShingle |
Damage accumulation in Si crystal during ion implantation at elevated temperatures : evidence of chemical effects Souza, Joel Pereira de Retroespalhamento rutherford Silício Microscopia eletrônica Implantação de íons Cristais |
title_short |
Damage accumulation in Si crystal during ion implantation at elevated temperatures : evidence of chemical effects |
title_full |
Damage accumulation in Si crystal during ion implantation at elevated temperatures : evidence of chemical effects |
title_fullStr |
Damage accumulation in Si crystal during ion implantation at elevated temperatures : evidence of chemical effects |
title_full_unstemmed |
Damage accumulation in Si crystal during ion implantation at elevated temperatures : evidence of chemical effects |
title_sort |
Damage accumulation in Si crystal during ion implantation at elevated temperatures : evidence of chemical effects |
author |
Souza, Joel Pereira de |
author_facet |
Souza, Joel Pereira de Suprun-Belevich, Yu. Boudinov, Henri Ivanov Cima, Carlos Alberto |
author_role |
author |
author2 |
Suprun-Belevich, Yu. Boudinov, Henri Ivanov Cima, Carlos Alberto |
author2_role |
author author author |
dc.contributor.author.fl_str_mv |
Souza, Joel Pereira de Suprun-Belevich, Yu. Boudinov, Henri Ivanov Cima, Carlos Alberto |
dc.subject.por.fl_str_mv |
Retroespalhamento rutherford Silício Microscopia eletrônica Implantação de íons Cristais |
topic |
Retroespalhamento rutherford Silício Microscopia eletrônica Implantação de íons Cristais |
description |
Damage in Si induced by irradiation with various light/medium mass ions at elevated temperatures and high doses (>=3x1016 cm-²) was studied using Rutherford backscattering spectroscopy, cross-section transmission electron microscopy, and high resolution x-ray diffraction. The results obtained have shown that there is a marked variation in the damage accumulation for different ion species. For O+ and N+ ions a distinct layer with a low level of damage presenting negative strain is formed at the surface. It has been found that the magnitude of the strain does not correlate with the energy deposited in the collision cascades. In the cases of Ne+ and Mg+ implantation, a low damage accumulation occurs near the surface but no negative strain is formed. In contrast to the N+ and O+ cases, with the increase of the Ne+ or Mg+ dose (>1x1017 cm-²) the damage profile stretches almost to the crystal surface. It is proposed that in addition to the mechanism of spatial separation of Frenkel pairs taking place in the collision cascades, the ability of the implanted ions to form precipitates and complexes with Si atoms noticeably influences the damage formation during implantation at elevated temperatures. |
publishDate |
2000 |
dc.date.issued.fl_str_mv |
2000 |
dc.date.accessioned.fl_str_mv |
2014-05-20T02:04:56Z |
dc.type.driver.fl_str_mv |
Estrangeiro info:eu-repo/semantics/article |
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http://hdl.handle.net/10183/95427 |
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eng |
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Journal of applied physics. Melville. Vol. 87, no. 12 (June 2000), p. 8385-8388 |
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