Temperature and stoichiometry effect on microstructural and ferroelectric properties of Pb(Zr1-xTix)O3 thin films prepared by chemical soulution deposition

Detalhes bibliográficos
Autor(a) principal: Foschini, C. R.
Data de Publicação: 2004
Outros Autores: Li, J. F., Suchicital, C. T A, Viehland, D., Stojanovic, B. D. [UNESP], Varela, José Arana [UNESP]
Tipo de documento: Artigo de conferência
Idioma: eng
Título da fonte: Repositório Institucional da UNESP
Texto Completo: http://hdl.handle.net/11449/67737
Resumo: Lead zirconate titanate (PZT) solutions were prepared using a polymeric precursor method, Zr n-propoxide and Ti i-propoxide were used as starting materials with ethylene glycol and water as solvents. The PZT solution was spin-coated on Pt/Ti/SiO2/Si substrates, baked on a hot plate, and finally heat-treated in a tube furnace between 400 and 800°C. The surface morphology and grain size of the films were characterized by atomic force microscopy (AFM), using a tapping mode with amplitude modulation. The films, thermal annealed at temperatures higher than 500°C, exhibited a dense microstructure, without noticeable cracks or voids. Electrical properties were investigated as a function of composition and annealing temperature.
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spelling Temperature and stoichiometry effect on microstructural and ferroelectric properties of Pb(Zr1-xTix)O3 thin films prepared by chemical soulution depositionAmplitude modulationAnnealingAtomic force microscopyCharacterizationCompositionFerroelectricityLead compoundsMicrostructureOrganic solventsPolyethylene glycolsSilicaStoichiometryAnnealing temperaturesDense microstructuresElectromechanical responseThin filmsLead zirconate titanate (PZT) solutions were prepared using a polymeric precursor method, Zr n-propoxide and Ti i-propoxide were used as starting materials with ethylene glycol and water as solvents. The PZT solution was spin-coated on Pt/Ti/SiO2/Si substrates, baked on a hot plate, and finally heat-treated in a tube furnace between 400 and 800°C. The surface morphology and grain size of the films were characterized by atomic force microscopy (AFM), using a tapping mode with amplitude modulation. The films, thermal annealed at temperatures higher than 500°C, exhibited a dense microstructure, without noticeable cracks or voids. Electrical properties were investigated as a function of composition and annealing temperature.Virginia Polytech. Inst./Stt. Univ. 213 Holden Hall, Blacksburg, VA 24061Institute of Chemistry UNESP, C.P. 355, Araraquara, SP, 14801-970Institute of Chemistry UNESP, C.P. 355, Araraquara, SP, 14801-970Virginia Polytechnic Institute and State UniversityUniversidade Estadual Paulista (Unesp)Foschini, C. R.Li, J. F.Suchicital, C. T AViehland, D.Stojanovic, B. D. [UNESP]Varela, José Arana [UNESP]2014-05-27T11:21:05Z2014-05-27T11:21:05Z2004-05-10info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/conferenceObject245-251Ceramic Transactions, v. 150, p. 245-251.http://hdl.handle.net/11449/677372-s2.0-214281654019223571848427670000-0003-1300-4978Scopusreponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPengCeramic Transactionsinfo:eu-repo/semantics/openAccess2021-10-23T21:41:24Zoai:repositorio.unesp.br:11449/67737Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462021-10-23T21:41:24Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false
dc.title.none.fl_str_mv Temperature and stoichiometry effect on microstructural and ferroelectric properties of Pb(Zr1-xTix)O3 thin films prepared by chemical soulution deposition
title Temperature and stoichiometry effect on microstructural and ferroelectric properties of Pb(Zr1-xTix)O3 thin films prepared by chemical soulution deposition
spellingShingle Temperature and stoichiometry effect on microstructural and ferroelectric properties of Pb(Zr1-xTix)O3 thin films prepared by chemical soulution deposition
Foschini, C. R.
Amplitude modulation
Annealing
Atomic force microscopy
Characterization
Composition
Ferroelectricity
Lead compounds
Microstructure
Organic solvents
Polyethylene glycols
Silica
Stoichiometry
Annealing temperatures
Dense microstructures
Electromechanical response
Thin films
title_short Temperature and stoichiometry effect on microstructural and ferroelectric properties of Pb(Zr1-xTix)O3 thin films prepared by chemical soulution deposition
title_full Temperature and stoichiometry effect on microstructural and ferroelectric properties of Pb(Zr1-xTix)O3 thin films prepared by chemical soulution deposition
title_fullStr Temperature and stoichiometry effect on microstructural and ferroelectric properties of Pb(Zr1-xTix)O3 thin films prepared by chemical soulution deposition
title_full_unstemmed Temperature and stoichiometry effect on microstructural and ferroelectric properties of Pb(Zr1-xTix)O3 thin films prepared by chemical soulution deposition
title_sort Temperature and stoichiometry effect on microstructural and ferroelectric properties of Pb(Zr1-xTix)O3 thin films prepared by chemical soulution deposition
author Foschini, C. R.
author_facet Foschini, C. R.
Li, J. F.
Suchicital, C. T A
Viehland, D.
Stojanovic, B. D. [UNESP]
Varela, José Arana [UNESP]
author_role author
author2 Li, J. F.
Suchicital, C. T A
Viehland, D.
Stojanovic, B. D. [UNESP]
Varela, José Arana [UNESP]
author2_role author
author
author
author
author
dc.contributor.none.fl_str_mv Virginia Polytechnic Institute and State University
Universidade Estadual Paulista (Unesp)
dc.contributor.author.fl_str_mv Foschini, C. R.
Li, J. F.
Suchicital, C. T A
Viehland, D.
Stojanovic, B. D. [UNESP]
Varela, José Arana [UNESP]
dc.subject.por.fl_str_mv Amplitude modulation
Annealing
Atomic force microscopy
Characterization
Composition
Ferroelectricity
Lead compounds
Microstructure
Organic solvents
Polyethylene glycols
Silica
Stoichiometry
Annealing temperatures
Dense microstructures
Electromechanical response
Thin films
topic Amplitude modulation
Annealing
Atomic force microscopy
Characterization
Composition
Ferroelectricity
Lead compounds
Microstructure
Organic solvents
Polyethylene glycols
Silica
Stoichiometry
Annealing temperatures
Dense microstructures
Electromechanical response
Thin films
description Lead zirconate titanate (PZT) solutions were prepared using a polymeric precursor method, Zr n-propoxide and Ti i-propoxide were used as starting materials with ethylene glycol and water as solvents. The PZT solution was spin-coated on Pt/Ti/SiO2/Si substrates, baked on a hot plate, and finally heat-treated in a tube furnace between 400 and 800°C. The surface morphology and grain size of the films were characterized by atomic force microscopy (AFM), using a tapping mode with amplitude modulation. The films, thermal annealed at temperatures higher than 500°C, exhibited a dense microstructure, without noticeable cracks or voids. Electrical properties were investigated as a function of composition and annealing temperature.
publishDate 2004
dc.date.none.fl_str_mv 2004-05-10
2014-05-27T11:21:05Z
2014-05-27T11:21:05Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/conferenceObject
format conferenceObject
status_str publishedVersion
dc.identifier.uri.fl_str_mv Ceramic Transactions, v. 150, p. 245-251.
http://hdl.handle.net/11449/67737
2-s2.0-2142816540
1922357184842767
0000-0003-1300-4978
identifier_str_mv Ceramic Transactions, v. 150, p. 245-251.
2-s2.0-2142816540
1922357184842767
0000-0003-1300-4978
url http://hdl.handle.net/11449/67737
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv Ceramic Transactions
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv 245-251
dc.source.none.fl_str_mv Scopus
reponame:Repositório Institucional da UNESP
instname:Universidade Estadual Paulista (UNESP)
instacron:UNESP
instname_str Universidade Estadual Paulista (UNESP)
instacron_str UNESP
institution UNESP
reponame_str Repositório Institucional da UNESP
collection Repositório Institucional da UNESP
repository.name.fl_str_mv Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)
repository.mail.fl_str_mv
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