Alternative anode geometry for magnetron sputtering
Autor(a) principal: | |
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Data de Publicação: | 2020 |
Outros Autores: | |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Institucional da UNESP |
Texto Completo: | http://dx.doi.org/10.1016/j.vacuum.2020.109703 http://hdl.handle.net/11449/199259 |
Resumo: | Anode geometry can play a crucial role in magnetron sputtering deposition. In this work, we investigated the use of five different ring anodes placed in front of the target. Their effects in the current-voltage relations and the hysteresis curves in reactive deposition were compared to conventional magnetron sputtering and grid-assisted magnetron sputtering. We measured the current-voltage relations in Ar discharges using Al and Ti targets. The hysteresis curves were obtained in Ar/N2 and Ar/O2 atmospheres for both targets. By changing the ring internal diameter, we change the ratio between the ring internal diameter and the target diameter. The results show that this ratio is determinant to the current-voltage relations and substrate floating potential, which can vary from negative to positive values relative to the ground. We also report hysteresis in the substrate floating potential during reactive deposition. The analysis of these hysteresis curves shows that the substrate floating potential can decrease to values around – 60 V depending on target/reactive gas combination. |
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Repositório Institucional da UNESP |
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2946 |
spelling |
Alternative anode geometry for magnetron sputteringCurrent-voltage relationsHysteresis curvesMagnetron sputteringSubstrate floating potentialAnode geometry can play a crucial role in magnetron sputtering deposition. In this work, we investigated the use of five different ring anodes placed in front of the target. Their effects in the current-voltage relations and the hysteresis curves in reactive deposition were compared to conventional magnetron sputtering and grid-assisted magnetron sputtering. We measured the current-voltage relations in Ar discharges using Al and Ti targets. The hysteresis curves were obtained in Ar/N2 and Ar/O2 atmospheres for both targets. By changing the ring internal diameter, we change the ratio between the ring internal diameter and the target diameter. The results show that this ratio is determinant to the current-voltage relations and substrate floating potential, which can vary from negative to positive values relative to the ground. We also report hysteresis in the substrate floating potential during reactive deposition. The analysis of these hysteresis curves shows that the substrate floating potential can decrease to values around – 60 V depending on target/reactive gas combination.Fundação de Amparo à Pesquisa e Inovação do Estado de Santa CatarinaUniversidade do Estado de Santa CatarinaLaboratory of Plasmas Films and Surfaces Santa Catarina State University (UDESC)São Paulo State University (UNESP) Faculty of Engineering – FEGSão Paulo State University (UNESP) Faculty of Engineering – FEGSanta Catarina State University (UDESC)Universidade Estadual Paulista (Unesp)Petroski, Kleber Alexandre [UNESP]Sagás, Julio César2020-12-12T01:35:03Z2020-12-12T01:35:03Z2020-12-01info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articlehttp://dx.doi.org/10.1016/j.vacuum.2020.109703Vacuum, v. 182.0042-207Xhttp://hdl.handle.net/11449/19925910.1016/j.vacuum.2020.1097032-s2.0-85089478676Scopusreponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPengVacuuminfo:eu-repo/semantics/openAccess2021-10-23T05:55:12Zoai:repositorio.unesp.br:11449/199259Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462021-10-23T05:55:12Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false |
dc.title.none.fl_str_mv |
Alternative anode geometry for magnetron sputtering |
title |
Alternative anode geometry for magnetron sputtering |
spellingShingle |
Alternative anode geometry for magnetron sputtering Petroski, Kleber Alexandre [UNESP] Current-voltage relations Hysteresis curves Magnetron sputtering Substrate floating potential |
title_short |
Alternative anode geometry for magnetron sputtering |
title_full |
Alternative anode geometry for magnetron sputtering |
title_fullStr |
Alternative anode geometry for magnetron sputtering |
title_full_unstemmed |
Alternative anode geometry for magnetron sputtering |
title_sort |
Alternative anode geometry for magnetron sputtering |
author |
Petroski, Kleber Alexandre [UNESP] |
author_facet |
Petroski, Kleber Alexandre [UNESP] Sagás, Julio César |
author_role |
author |
author2 |
Sagás, Julio César |
author2_role |
author |
dc.contributor.none.fl_str_mv |
Santa Catarina State University (UDESC) Universidade Estadual Paulista (Unesp) |
dc.contributor.author.fl_str_mv |
Petroski, Kleber Alexandre [UNESP] Sagás, Julio César |
dc.subject.por.fl_str_mv |
Current-voltage relations Hysteresis curves Magnetron sputtering Substrate floating potential |
topic |
Current-voltage relations Hysteresis curves Magnetron sputtering Substrate floating potential |
description |
Anode geometry can play a crucial role in magnetron sputtering deposition. In this work, we investigated the use of five different ring anodes placed in front of the target. Their effects in the current-voltage relations and the hysteresis curves in reactive deposition were compared to conventional magnetron sputtering and grid-assisted magnetron sputtering. We measured the current-voltage relations in Ar discharges using Al and Ti targets. The hysteresis curves were obtained in Ar/N2 and Ar/O2 atmospheres for both targets. By changing the ring internal diameter, we change the ratio between the ring internal diameter and the target diameter. The results show that this ratio is determinant to the current-voltage relations and substrate floating potential, which can vary from negative to positive values relative to the ground. We also report hysteresis in the substrate floating potential during reactive deposition. The analysis of these hysteresis curves shows that the substrate floating potential can decrease to values around – 60 V depending on target/reactive gas combination. |
publishDate |
2020 |
dc.date.none.fl_str_mv |
2020-12-12T01:35:03Z 2020-12-12T01:35:03Z 2020-12-01 |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://dx.doi.org/10.1016/j.vacuum.2020.109703 Vacuum, v. 182. 0042-207X http://hdl.handle.net/11449/199259 10.1016/j.vacuum.2020.109703 2-s2.0-85089478676 |
url |
http://dx.doi.org/10.1016/j.vacuum.2020.109703 http://hdl.handle.net/11449/199259 |
identifier_str_mv |
Vacuum, v. 182. 0042-207X 10.1016/j.vacuum.2020.109703 2-s2.0-85089478676 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
Vacuum |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.source.none.fl_str_mv |
Scopus reponame:Repositório Institucional da UNESP instname:Universidade Estadual Paulista (UNESP) instacron:UNESP |
instname_str |
Universidade Estadual Paulista (UNESP) |
instacron_str |
UNESP |
institution |
UNESP |
reponame_str |
Repositório Institucional da UNESP |
collection |
Repositório Institucional da UNESP |
repository.name.fl_str_mv |
Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP) |
repository.mail.fl_str_mv |
|
_version_ |
1799965023501549568 |