Influence of oxygen flow on crystallization and morphology of LiNbO 3 thin films

Detalhes bibliográficos
Autor(a) principal: Simões, A. Z. [UNESP]
Data de Publicação: 2002
Outros Autores: Gonzalez, A. H. [UNESP], Zaghete, M. A. [UNESP], Stojanovic, B. D. [UNESP], Cavalheiro, A. A. [UNESP], Moeckli, P., Setter, N., Varela, José Arana [UNESP]
Tipo de documento: Artigo de conferência
Idioma: eng
Título da fonte: Repositório Institucional da UNESP
Texto Completo: http://dx.doi.org/10.1080/00150190211491
http://hdl.handle.net/11449/66761
Resumo: Polymeric precursor solution (Pechini method) was used to deposit LiNbO 3 thin films by spin-coating on (100) silicon substrates. X-ray diffraction data of thin films showed that the increase of oxygen flow promotes a preferred orientation of (001) LiNbO 3 planes parallel to the substrate surface. Surface roughness and grain size, observed by atomic force microscopy, change also with oxygen flow. © 2002 Taylor & Francis.
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spelling Influence of oxygen flow on crystallization and morphology of LiNbO 3 thin filmsCrystallizationLiNbO 3Rietveld analysisLiNbO3Oxygen flowSubstrate surfaceAtomic force microscopyCrystalline materialsFlow of fluidsLithium niobateMorphologyOxygenSiliconSpin coatingThin filmsPolymeric precursor solution (Pechini method) was used to deposit LiNbO 3 thin films by spin-coating on (100) silicon substrates. X-ray diffraction data of thin films showed that the increase of oxygen flow promotes a preferred orientation of (001) LiNbO 3 planes parallel to the substrate surface. Surface roughness and grain size, observed by atomic force microscopy, change also with oxygen flow. © 2002 Taylor & Francis.Chemistry Institute Department of Chemistry-Physics Unesp, C.P. 355, CEP 14801-970 Araraquara-SPSwiss Federal Institute of Technology, CH - 1015 LausanneChemistry Institute Department of Chemistry-Physics Unesp, C.P. 355, CEP 14801-970 Araraquara-SPUniversidade Estadual Paulista (Unesp)Swiss Federal Institute of TechnologySimões, A. Z. [UNESP]Gonzalez, A. H. [UNESP]Zaghete, M. A. [UNESP]Stojanovic, B. D. [UNESP]Cavalheiro, A. A. [UNESP]Moeckli, P.Setter, N.Varela, José Arana [UNESP]2014-05-27T11:20:23Z2014-05-27T11:20:23Z2002-01-01info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/conferenceObject33-38http://dx.doi.org/10.1080/00150190211491Ferroelectrics, v. 271, p. 33-38.0015-01931563-5112http://hdl.handle.net/11449/6676110.1080/001501902114912-s2.0-0141943464Scopusreponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPengFerroelectrics0.7280,260info:eu-repo/semantics/openAccess2021-10-23T21:41:41Zoai:repositorio.unesp.br:11449/66761Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462021-10-23T21:41:41Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false
dc.title.none.fl_str_mv Influence of oxygen flow on crystallization and morphology of LiNbO 3 thin films
title Influence of oxygen flow on crystallization and morphology of LiNbO 3 thin films
spellingShingle Influence of oxygen flow on crystallization and morphology of LiNbO 3 thin films
Simões, A. Z. [UNESP]
Crystallization
LiNbO 3
Rietveld analysis
LiNbO3
Oxygen flow
Substrate surface
Atomic force microscopy
Crystalline materials
Flow of fluids
Lithium niobate
Morphology
Oxygen
Silicon
Spin coating
Thin films
title_short Influence of oxygen flow on crystallization and morphology of LiNbO 3 thin films
title_full Influence of oxygen flow on crystallization and morphology of LiNbO 3 thin films
title_fullStr Influence of oxygen flow on crystallization and morphology of LiNbO 3 thin films
title_full_unstemmed Influence of oxygen flow on crystallization and morphology of LiNbO 3 thin films
title_sort Influence of oxygen flow on crystallization and morphology of LiNbO 3 thin films
author Simões, A. Z. [UNESP]
author_facet Simões, A. Z. [UNESP]
Gonzalez, A. H. [UNESP]
Zaghete, M. A. [UNESP]
Stojanovic, B. D. [UNESP]
Cavalheiro, A. A. [UNESP]
Moeckli, P.
Setter, N.
Varela, José Arana [UNESP]
author_role author
author2 Gonzalez, A. H. [UNESP]
Zaghete, M. A. [UNESP]
Stojanovic, B. D. [UNESP]
Cavalheiro, A. A. [UNESP]
Moeckli, P.
Setter, N.
Varela, José Arana [UNESP]
author2_role author
author
author
author
author
author
author
dc.contributor.none.fl_str_mv Universidade Estadual Paulista (Unesp)
Swiss Federal Institute of Technology
dc.contributor.author.fl_str_mv Simões, A. Z. [UNESP]
Gonzalez, A. H. [UNESP]
Zaghete, M. A. [UNESP]
Stojanovic, B. D. [UNESP]
Cavalheiro, A. A. [UNESP]
Moeckli, P.
Setter, N.
Varela, José Arana [UNESP]
dc.subject.por.fl_str_mv Crystallization
LiNbO 3
Rietveld analysis
LiNbO3
Oxygen flow
Substrate surface
Atomic force microscopy
Crystalline materials
Flow of fluids
Lithium niobate
Morphology
Oxygen
Silicon
Spin coating
Thin films
topic Crystallization
LiNbO 3
Rietveld analysis
LiNbO3
Oxygen flow
Substrate surface
Atomic force microscopy
Crystalline materials
Flow of fluids
Lithium niobate
Morphology
Oxygen
Silicon
Spin coating
Thin films
description Polymeric precursor solution (Pechini method) was used to deposit LiNbO 3 thin films by spin-coating on (100) silicon substrates. X-ray diffraction data of thin films showed that the increase of oxygen flow promotes a preferred orientation of (001) LiNbO 3 planes parallel to the substrate surface. Surface roughness and grain size, observed by atomic force microscopy, change also with oxygen flow. © 2002 Taylor & Francis.
publishDate 2002
dc.date.none.fl_str_mv 2002-01-01
2014-05-27T11:20:23Z
2014-05-27T11:20:23Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/conferenceObject
format conferenceObject
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://dx.doi.org/10.1080/00150190211491
Ferroelectrics, v. 271, p. 33-38.
0015-0193
1563-5112
http://hdl.handle.net/11449/66761
10.1080/00150190211491
2-s2.0-0141943464
url http://dx.doi.org/10.1080/00150190211491
http://hdl.handle.net/11449/66761
identifier_str_mv Ferroelectrics, v. 271, p. 33-38.
0015-0193
1563-5112
10.1080/00150190211491
2-s2.0-0141943464
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv Ferroelectrics
0.728
0,260
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv 33-38
dc.source.none.fl_str_mv Scopus
reponame:Repositório Institucional da UNESP
instname:Universidade Estadual Paulista (UNESP)
instacron:UNESP
instname_str Universidade Estadual Paulista (UNESP)
instacron_str UNESP
institution UNESP
reponame_str Repositório Institucional da UNESP
collection Repositório Institucional da UNESP
repository.name.fl_str_mv Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)
repository.mail.fl_str_mv
_version_ 1799965464940511232

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