Foundry Polymer-Based Inverted-Rib Waveguides
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Publication Date: | 2018 |
Other Authors: | , , , , , , |
Format: | Conference object |
Language: | eng |
Source: | Repositório Institucional da UNESP |
Download full: | http://hdl.handle.net/11449/184348 |
Summary: | Development of polymer inverted-rib waveguides based on high-volume CMOS foundry process is presented. Simulation of waveguiding structures using a basic inverted waveguide manufacturing process showed that viable devices can be obtained. Full wafers were processed at the foundry's 150 mm-facility. Photomask layout and manufacturing as well as wafer post-processing and characterization were carried out. As preliminary results, spectral filters based on integrated ring resonators with free spectral range (FSR) of 1 nm are presented. |
id |
UNSP_5ef1bed4f1108b2047a2f17b1231f0f5 |
---|---|
oai_identifier_str |
oai:repositorio.unesp.br:11449/184348 |
network_acronym_str |
UNSP |
network_name_str |
Repositório Institucional da UNESP |
repository_id_str |
2946 |
spelling |
Foundry Polymer-Based Inverted-Rib Waveguidesoptical device fabricationoptical polymersoptical resonatorsDevelopment of polymer inverted-rib waveguides based on high-volume CMOS foundry process is presented. Simulation of waveguiding structures using a basic inverted waveguide manufacturing process showed that viable devices can be obtained. Full wafers were processed at the foundry's 150 mm-facility. Photomask layout and manufacturing as well as wafer post-processing and characterization were carried out. As preliminary results, spectral filters based on integrated ring resonators with free spectral range (FSR) of 1 nm are presented.Conselho Nacional de Desenvolvimento Científico e Tecnológico (CNPq)Fundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP)Ctr Tecnol Informacao CTI Renato Archer, BR-13069901 Campinas, SP, BrazilUniv Estadual Paulista UNESP, Campus Expt Sao Joao da Boa Vista, BR-13876750 Sao Paulo, SP, BrazilCEITEC SA Semicond, BR-91550000 Porto Alegre, RS, BrazilUniv Estadual Paulista UNESP, Campus Expt Sao Joao da Boa Vista, BR-13876750 Sao Paulo, SP, BrazilCNPq: 456294/2013-9CNPq: 300594/2017-8FAPESP: 13/07559-3FAPESP: 09/54045IeeeCtr Tecnol Informacao CTI Renato ArcherUniversidade Estadual Paulista (Unesp)CEITEC SA SemicondMalheiros-Silveira, G. N. [UNESP]Finardi, C. A.Van Etten, E. A. M. A.Burger, T. S.Silva, R. C. G. daDaltrini, A. M.Panepucci, R. R.IEEE2019-10-04T11:56:52Z2019-10-04T11:56:52Z2018-01-01info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/conferenceObject32018 Sbfoton International Optics And Photonics Conference (sbfoton Iopc). New York: Ieee, 3 p., 2018.http://hdl.handle.net/11449/184348WOS:000458662800022Web of Sciencereponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPeng2018 Sbfoton International Optics And Photonics Conference (sbfoton Iopc)info:eu-repo/semantics/openAccess2021-10-22T23:59:52Zoai:repositorio.unesp.br:11449/184348Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462021-10-22T23:59:52Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false |
dc.title.none.fl_str_mv |
Foundry Polymer-Based Inverted-Rib Waveguides |
title |
Foundry Polymer-Based Inverted-Rib Waveguides |
spellingShingle |
Foundry Polymer-Based Inverted-Rib Waveguides Malheiros-Silveira, G. N. [UNESP] optical device fabrication optical polymers optical resonators |
title_short |
Foundry Polymer-Based Inverted-Rib Waveguides |
title_full |
Foundry Polymer-Based Inverted-Rib Waveguides |
title_fullStr |
Foundry Polymer-Based Inverted-Rib Waveguides |
title_full_unstemmed |
Foundry Polymer-Based Inverted-Rib Waveguides |
title_sort |
Foundry Polymer-Based Inverted-Rib Waveguides |
author |
Malheiros-Silveira, G. N. [UNESP] |
author_facet |
Malheiros-Silveira, G. N. [UNESP] Finardi, C. A. Van Etten, E. A. M. A. Burger, T. S. Silva, R. C. G. da Daltrini, A. M. Panepucci, R. R. IEEE |
author_role |
author |
author2 |
Finardi, C. A. Van Etten, E. A. M. A. Burger, T. S. Silva, R. C. G. da Daltrini, A. M. Panepucci, R. R. IEEE |
author2_role |
author author author author author author author |
dc.contributor.none.fl_str_mv |
Ctr Tecnol Informacao CTI Renato Archer Universidade Estadual Paulista (Unesp) CEITEC SA Semicond |
dc.contributor.author.fl_str_mv |
Malheiros-Silveira, G. N. [UNESP] Finardi, C. A. Van Etten, E. A. M. A. Burger, T. S. Silva, R. C. G. da Daltrini, A. M. Panepucci, R. R. IEEE |
dc.subject.por.fl_str_mv |
optical device fabrication optical polymers optical resonators |
topic |
optical device fabrication optical polymers optical resonators |
description |
Development of polymer inverted-rib waveguides based on high-volume CMOS foundry process is presented. Simulation of waveguiding structures using a basic inverted waveguide manufacturing process showed that viable devices can be obtained. Full wafers were processed at the foundry's 150 mm-facility. Photomask layout and manufacturing as well as wafer post-processing and characterization were carried out. As preliminary results, spectral filters based on integrated ring resonators with free spectral range (FSR) of 1 nm are presented. |
publishDate |
2018 |
dc.date.none.fl_str_mv |
2018-01-01 2019-10-04T11:56:52Z 2019-10-04T11:56:52Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/conferenceObject |
format |
conferenceObject |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
2018 Sbfoton International Optics And Photonics Conference (sbfoton Iopc). New York: Ieee, 3 p., 2018. http://hdl.handle.net/11449/184348 WOS:000458662800022 |
identifier_str_mv |
2018 Sbfoton International Optics And Photonics Conference (sbfoton Iopc). New York: Ieee, 3 p., 2018. WOS:000458662800022 |
url |
http://hdl.handle.net/11449/184348 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
2018 Sbfoton International Optics And Photonics Conference (sbfoton Iopc) |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
3 |
dc.publisher.none.fl_str_mv |
Ieee |
publisher.none.fl_str_mv |
Ieee |
dc.source.none.fl_str_mv |
Web of Science reponame:Repositório Institucional da UNESP instname:Universidade Estadual Paulista (UNESP) instacron:UNESP |
instname_str |
Universidade Estadual Paulista (UNESP) |
instacron_str |
UNESP |
institution |
UNESP |
reponame_str |
Repositório Institucional da UNESP |
collection |
Repositório Institucional da UNESP |
repository.name.fl_str_mv |
Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP) |
repository.mail.fl_str_mv |
|
_version_ |
1797790280415444992 |