Double optical monitoring of time-dependent film formation

Bibliographic Details
Main Author: Michels, Alexandre F.
Publication Date: 2005
Other Authors: Menegotto, Thiago, Grieneisen, Hans Peter H., Santilli, Celso Valentim [UNESP], Horowitz, Flavio
Format: Conference object
Language: eng
Source: Repositório Institucional da UNESP
Download full: http://dx.doi.org/10.1117/12.617967
http://hdl.handle.net/11449/68697
Summary: A brief overview of optical monitoring for vacuum and wet bench film deposition processes is presented. Interferometric and polarimetric measurements are combined with regard to simultaneous real-time monitoring of refractive index and physical thickness. Monitor stability and accuracy are verified with transparent oil standards. This double optical technique is applied to dip coating with a multi-component Zirconyl Chloride aqueous solution, whose time varying refractive index and physical thickness curves indicate significant sensitivity to changes of film flow properties during the process.
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spelling Double optical monitoring of time-dependent film formationOptical propertiesQuality controlReflectionRefractive indexOptical monitoringPhysical thicknessPolarimetric measurementsThin filmsA brief overview of optical monitoring for vacuum and wet bench film deposition processes is presented. Interferometric and polarimetric measurements are combined with regard to simultaneous real-time monitoring of refractive index and physical thickness. Monitor stability and accuracy are verified with transparent oil standards. This double optical technique is applied to dip coating with a multi-component Zirconyl Chloride aqueous solution, whose time varying refractive index and physical thickness curves indicate significant sensitivity to changes of film flow properties during the process.Instituto de Física Universidade Federal do Rio Grande do Sul (UFRGS) Campus do Vale, CP15051, 91501-970 Porto Alegre, RSPrograma de Pós-Graduação em Microeletrônica (PGMicro) Universidade Federal do Rio Grande do Sul (UFRGS) Campus do Vale, CP15051, 91501-970 Porto Alegre, RSInstituto de Química Universidade Estadual de São Paulo (UNESP), 14800-900 Araraquara, SPInstituto de Química Universidade Estadual de São Paulo (UNESP), 14800-900 Araraquara, SPUniversidade Federal do Rio Grande do Sul (UFRGS)Universidade Estadual Paulista (Unesp)Michels, Alexandre F.Menegotto, ThiagoGrieneisen, Hans Peter H.Santilli, Celso Valentim [UNESP]Horowitz, Flavio2014-05-27T11:21:46Z2014-05-27T11:21:46Z2005-12-23info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/conferenceObject1-6http://dx.doi.org/10.1117/12.617967Proceedings of SPIE - The International Society for Optical Engineering, v. 5870, p. 1-6.0277-786Xhttp://hdl.handle.net/11449/6869710.1117/12.6179672-s2.0-2914450674755842986818708650000-0002-8356-8093Scopusreponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPengProceedings of SPIE - The International Society for Optical Engineeringinfo:eu-repo/semantics/openAccess2021-10-23T21:41:24Zoai:repositorio.unesp.br:11449/68697Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462021-10-23T21:41:24Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false
dc.title.none.fl_str_mv Double optical monitoring of time-dependent film formation
title Double optical monitoring of time-dependent film formation
spellingShingle Double optical monitoring of time-dependent film formation
Michels, Alexandre F.
Optical properties
Quality control
Reflection
Refractive index
Optical monitoring
Physical thickness
Polarimetric measurements
Thin films
title_short Double optical monitoring of time-dependent film formation
title_full Double optical monitoring of time-dependent film formation
title_fullStr Double optical monitoring of time-dependent film formation
title_full_unstemmed Double optical monitoring of time-dependent film formation
title_sort Double optical monitoring of time-dependent film formation
author Michels, Alexandre F.
author_facet Michels, Alexandre F.
Menegotto, Thiago
Grieneisen, Hans Peter H.
Santilli, Celso Valentim [UNESP]
Horowitz, Flavio
author_role author
author2 Menegotto, Thiago
Grieneisen, Hans Peter H.
Santilli, Celso Valentim [UNESP]
Horowitz, Flavio
author2_role author
author
author
author
dc.contributor.none.fl_str_mv Universidade Federal do Rio Grande do Sul (UFRGS)
Universidade Estadual Paulista (Unesp)
dc.contributor.author.fl_str_mv Michels, Alexandre F.
Menegotto, Thiago
Grieneisen, Hans Peter H.
Santilli, Celso Valentim [UNESP]
Horowitz, Flavio
dc.subject.por.fl_str_mv Optical properties
Quality control
Reflection
Refractive index
Optical monitoring
Physical thickness
Polarimetric measurements
Thin films
topic Optical properties
Quality control
Reflection
Refractive index
Optical monitoring
Physical thickness
Polarimetric measurements
Thin films
description A brief overview of optical monitoring for vacuum and wet bench film deposition processes is presented. Interferometric and polarimetric measurements are combined with regard to simultaneous real-time monitoring of refractive index and physical thickness. Monitor stability and accuracy are verified with transparent oil standards. This double optical technique is applied to dip coating with a multi-component Zirconyl Chloride aqueous solution, whose time varying refractive index and physical thickness curves indicate significant sensitivity to changes of film flow properties during the process.
publishDate 2005
dc.date.none.fl_str_mv 2005-12-23
2014-05-27T11:21:46Z
2014-05-27T11:21:46Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/conferenceObject
format conferenceObject
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://dx.doi.org/10.1117/12.617967
Proceedings of SPIE - The International Society for Optical Engineering, v. 5870, p. 1-6.
0277-786X
http://hdl.handle.net/11449/68697
10.1117/12.617967
2-s2.0-29144506747
5584298681870865
0000-0002-8356-8093
url http://dx.doi.org/10.1117/12.617967
http://hdl.handle.net/11449/68697
identifier_str_mv Proceedings of SPIE - The International Society for Optical Engineering, v. 5870, p. 1-6.
0277-786X
10.1117/12.617967
2-s2.0-29144506747
5584298681870865
0000-0002-8356-8093
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv Proceedings of SPIE - The International Society for Optical Engineering
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv 1-6
dc.source.none.fl_str_mv Scopus
reponame:Repositório Institucional da UNESP
instname:Universidade Estadual Paulista (UNESP)
instacron:UNESP
instname_str Universidade Estadual Paulista (UNESP)
instacron_str UNESP
institution UNESP
reponame_str Repositório Institucional da UNESP
collection Repositório Institucional da UNESP
repository.name.fl_str_mv Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)
repository.mail.fl_str_mv
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