Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method

Detalhes bibliográficos
Autor(a) principal: Gonzalez, AHM
Data de Publicação: 2003
Outros Autores: Simes, A. Z., Zaghete, M. A., Varela, José Arana [UNESP]
Tipo de documento: Artigo de conferência
Idioma: eng
Título da fonte: Repositório Institucional da UNESP
Texto Completo: http://hdl.handle.net/11449/38205
Resumo: Lithium tantalate (LiTaO3) thin films with (50:50) stoichiometry were prepared using polymeric organic solution. The 5-layered films were deposited on silicon (100) substrates by spin coating method. The coated substrates were thermally treated at 500degreesC for 3 h under several oxygen atmospheres in order to study the influence of oxygen flow on the crystallinity, microstructure, grain size and roughness of the final film. X-ray diffraction results showed that an oxygen flow of 100 cm(3)/min leads to LiTaO3 thin films with higher crystallinity, without preferential orientation. It was observed by scanning electron microscopy (SEM) that the thickness of thin films decreases when the oxygen flow increases. The atomic force microscopy (AFM) studies showed that the grain size and roughness are strongly influenced by oxygen flow.
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spelling Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor methodLithium tantalate (LiTaO3) thin films with (50:50) stoichiometry were prepared using polymeric organic solution. The 5-layered films were deposited on silicon (100) substrates by spin coating method. The coated substrates were thermally treated at 500degreesC for 3 h under several oxygen atmospheres in order to study the influence of oxygen flow on the crystallinity, microstructure, grain size and roughness of the final film. X-ray diffraction results showed that an oxygen flow of 100 cm(3)/min leads to LiTaO3 thin films with higher crystallinity, without preferential orientation. It was observed by scanning electron microscopy (SEM) that the thickness of thin films decreases when the oxygen flow increases. The atomic force microscopy (AFM) studies showed that the grain size and roughness are strongly influenced by oxygen flow.Univ Estadual Paulista, BR-14801970 São Paulo, BrazilUniv Estadual Paulista, BR-14801970 São Paulo, BrazilAmer Ceramic SocUniversidade Estadual Paulista (Unesp)Gonzalez, AHMSimes, A. Z.Zaghete, M. A.Varela, José Arana [UNESP]2014-05-20T15:28:24Z2014-05-20T15:28:24Z2003-01-01info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/conferenceObject69-76Innovative Processing and Synthesis of Ceramics, Glasses, and Composites Vii. Westerville: Amer Ceramic Soc, v. 154, p. 69-76, 2003.1042-1122http://hdl.handle.net/11449/38205WOS:000188792900007Web of Sciencereponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPengInnovative Processing and Synthesis of Ceramics, Glasses, and Composites Vii0,120info:eu-repo/semantics/openAccess2021-10-23T21:44:17Zoai:repositorio.unesp.br:11449/38205Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462021-10-23T21:44:17Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false
dc.title.none.fl_str_mv Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method
title Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method
spellingShingle Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method
Gonzalez, AHM
title_short Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method
title_full Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method
title_fullStr Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method
title_full_unstemmed Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method
title_sort Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method
author Gonzalez, AHM
author_facet Gonzalez, AHM
Simes, A. Z.
Zaghete, M. A.
Varela, José Arana [UNESP]
author_role author
author2 Simes, A. Z.
Zaghete, M. A.
Varela, José Arana [UNESP]
author2_role author
author
author
dc.contributor.none.fl_str_mv Universidade Estadual Paulista (Unesp)
dc.contributor.author.fl_str_mv Gonzalez, AHM
Simes, A. Z.
Zaghete, M. A.
Varela, José Arana [UNESP]
description Lithium tantalate (LiTaO3) thin films with (50:50) stoichiometry were prepared using polymeric organic solution. The 5-layered films were deposited on silicon (100) substrates by spin coating method. The coated substrates were thermally treated at 500degreesC for 3 h under several oxygen atmospheres in order to study the influence of oxygen flow on the crystallinity, microstructure, grain size and roughness of the final film. X-ray diffraction results showed that an oxygen flow of 100 cm(3)/min leads to LiTaO3 thin films with higher crystallinity, without preferential orientation. It was observed by scanning electron microscopy (SEM) that the thickness of thin films decreases when the oxygen flow increases. The atomic force microscopy (AFM) studies showed that the grain size and roughness are strongly influenced by oxygen flow.
publishDate 2003
dc.date.none.fl_str_mv 2003-01-01
2014-05-20T15:28:24Z
2014-05-20T15:28:24Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/conferenceObject
format conferenceObject
status_str publishedVersion
dc.identifier.uri.fl_str_mv Innovative Processing and Synthesis of Ceramics, Glasses, and Composites Vii. Westerville: Amer Ceramic Soc, v. 154, p. 69-76, 2003.
1042-1122
http://hdl.handle.net/11449/38205
WOS:000188792900007
identifier_str_mv Innovative Processing and Synthesis of Ceramics, Glasses, and Composites Vii. Westerville: Amer Ceramic Soc, v. 154, p. 69-76, 2003.
1042-1122
WOS:000188792900007
url http://hdl.handle.net/11449/38205
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv Innovative Processing and Synthesis of Ceramics, Glasses, and Composites Vii
0,120
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv 69-76
dc.publisher.none.fl_str_mv Amer Ceramic Soc
publisher.none.fl_str_mv Amer Ceramic Soc
dc.source.none.fl_str_mv Web of Science
reponame:Repositório Institucional da UNESP
instname:Universidade Estadual Paulista (UNESP)
instacron:UNESP
instname_str Universidade Estadual Paulista (UNESP)
instacron_str UNESP
institution UNESP
reponame_str Repositório Institucional da UNESP
collection Repositório Institucional da UNESP
repository.name.fl_str_mv Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)
repository.mail.fl_str_mv
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