Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method
Main Author: | |
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Publication Date: | 2003 |
Other Authors: | , , |
Format: | Conference object |
Language: | eng |
Source: | Repositório Institucional da UNESP |
Download full: | http://hdl.handle.net/11449/38205 |
Summary: | Lithium tantalate (LiTaO3) thin films with (50:50) stoichiometry were prepared using polymeric organic solution. The 5-layered films were deposited on silicon (100) substrates by spin coating method. The coated substrates were thermally treated at 500degreesC for 3 h under several oxygen atmospheres in order to study the influence of oxygen flow on the crystallinity, microstructure, grain size and roughness of the final film. X-ray diffraction results showed that an oxygen flow of 100 cm(3)/min leads to LiTaO3 thin films with higher crystallinity, without preferential orientation. It was observed by scanning electron microscopy (SEM) that the thickness of thin films decreases when the oxygen flow increases. The atomic force microscopy (AFM) studies showed that the grain size and roughness are strongly influenced by oxygen flow. |
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Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor methodLithium tantalate (LiTaO3) thin films with (50:50) stoichiometry were prepared using polymeric organic solution. The 5-layered films were deposited on silicon (100) substrates by spin coating method. The coated substrates were thermally treated at 500degreesC for 3 h under several oxygen atmospheres in order to study the influence of oxygen flow on the crystallinity, microstructure, grain size and roughness of the final film. X-ray diffraction results showed that an oxygen flow of 100 cm(3)/min leads to LiTaO3 thin films with higher crystallinity, without preferential orientation. It was observed by scanning electron microscopy (SEM) that the thickness of thin films decreases when the oxygen flow increases. The atomic force microscopy (AFM) studies showed that the grain size and roughness are strongly influenced by oxygen flow.Univ Estadual Paulista, BR-14801970 São Paulo, BrazilUniv Estadual Paulista, BR-14801970 São Paulo, BrazilAmer Ceramic SocUniversidade Estadual Paulista (Unesp)Gonzalez, AHMSimes, A. Z.Zaghete, M. A.Varela, José Arana [UNESP]2014-05-20T15:28:24Z2014-05-20T15:28:24Z2003-01-01info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/conferenceObject69-76Innovative Processing and Synthesis of Ceramics, Glasses, and Composites Vii. Westerville: Amer Ceramic Soc, v. 154, p. 69-76, 2003.1042-1122http://hdl.handle.net/11449/38205WOS:000188792900007Web of Sciencereponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPengInnovative Processing and Synthesis of Ceramics, Glasses, and Composites Vii0,120info:eu-repo/semantics/openAccess2021-10-23T21:44:17Zoai:repositorio.unesp.br:11449/38205Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462021-10-23T21:44:17Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false |
dc.title.none.fl_str_mv |
Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method |
title |
Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method |
spellingShingle |
Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method Gonzalez, AHM |
title_short |
Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method |
title_full |
Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method |
title_fullStr |
Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method |
title_full_unstemmed |
Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method |
title_sort |
Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method |
author |
Gonzalez, AHM |
author_facet |
Gonzalez, AHM Simes, A. Z. Zaghete, M. A. Varela, José Arana [UNESP] |
author_role |
author |
author2 |
Simes, A. Z. Zaghete, M. A. Varela, José Arana [UNESP] |
author2_role |
author author author |
dc.contributor.none.fl_str_mv |
Universidade Estadual Paulista (Unesp) |
dc.contributor.author.fl_str_mv |
Gonzalez, AHM Simes, A. Z. Zaghete, M. A. Varela, José Arana [UNESP] |
description |
Lithium tantalate (LiTaO3) thin films with (50:50) stoichiometry were prepared using polymeric organic solution. The 5-layered films were deposited on silicon (100) substrates by spin coating method. The coated substrates were thermally treated at 500degreesC for 3 h under several oxygen atmospheres in order to study the influence of oxygen flow on the crystallinity, microstructure, grain size and roughness of the final film. X-ray diffraction results showed that an oxygen flow of 100 cm(3)/min leads to LiTaO3 thin films with higher crystallinity, without preferential orientation. It was observed by scanning electron microscopy (SEM) that the thickness of thin films decreases when the oxygen flow increases. The atomic force microscopy (AFM) studies showed that the grain size and roughness are strongly influenced by oxygen flow. |
publishDate |
2003 |
dc.date.none.fl_str_mv |
2003-01-01 2014-05-20T15:28:24Z 2014-05-20T15:28:24Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/conferenceObject |
format |
conferenceObject |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
Innovative Processing and Synthesis of Ceramics, Glasses, and Composites Vii. Westerville: Amer Ceramic Soc, v. 154, p. 69-76, 2003. 1042-1122 http://hdl.handle.net/11449/38205 WOS:000188792900007 |
identifier_str_mv |
Innovative Processing and Synthesis of Ceramics, Glasses, and Composites Vii. Westerville: Amer Ceramic Soc, v. 154, p. 69-76, 2003. 1042-1122 WOS:000188792900007 |
url |
http://hdl.handle.net/11449/38205 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
Innovative Processing and Synthesis of Ceramics, Glasses, and Composites Vii 0,120 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
69-76 |
dc.publisher.none.fl_str_mv |
Amer Ceramic Soc |
publisher.none.fl_str_mv |
Amer Ceramic Soc |
dc.source.none.fl_str_mv |
Web of Science reponame:Repositório Institucional da UNESP instname:Universidade Estadual Paulista (UNESP) instacron:UNESP |
instname_str |
Universidade Estadual Paulista (UNESP) |
instacron_str |
UNESP |
institution |
UNESP |
reponame_str |
Repositório Institucional da UNESP |
collection |
Repositório Institucional da UNESP |
repository.name.fl_str_mv |
Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP) |
repository.mail.fl_str_mv |
|
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1797789749234106368 |