Plasmonic structures fabricated by interference lithography for sensor applications

Detalhes bibliográficos
Autor(a) principal: Menezes, Jacson W.
Data de Publicação: 2009
Outros Autores: Nalin, Marcelo [UNESP], Chillcce, Enver F., Braga, Edmundo S., Cescato, Lucila
Tipo de documento: Artigo de conferência
Idioma: eng
Título da fonte: Repositório Institucional da UNESP
Texto Completo: http://dx.doi.org/10.1117/12.826129
http://hdl.handle.net/11449/71240
Resumo: In this work we demonstrate the use of holographic lithography for generation of large area plasmonic periodic structures. Submicrometric array of holes, with different periods and thickness, were recorded in gold films, in areas of about 1 cm2, with homogeneity similar to that of samples recorded by Focused Ion Beam. In order to check the plasmonic properties, we measured the transmission spectra of the samples. The spectra exhibit the typical surface plasmon resonances (SPR) in the infrared whose position and width present the expected behavior with the period of the array and film thickness. The shift of the peak position with the permittivity of the surrounding medium demonstrates the feasebility of the sample as large area sensors. © 2009 SPIE.
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spelling Plasmonic structures fabricated by interference lithography for sensor applicationsHolographyMicrofabricationPlasmonic structuresSurface plasmon resonanceGold filmHolographic lithographyInterference lithographyLarge area sensorsPeak positionPlasmonic propertiesSensor applicationsTransmission spectrumsHolographic interferometryInfrared spectroscopyLithographyMicroanalysisMicromachiningNanostructuresOptical propertiesSensorsPlasmonsIn this work we demonstrate the use of holographic lithography for generation of large area plasmonic periodic structures. Submicrometric array of holes, with different periods and thickness, were recorded in gold films, in areas of about 1 cm2, with homogeneity similar to that of samples recorded by Focused Ion Beam. In order to check the plasmonic properties, we measured the transmission spectra of the samples. The spectra exhibit the typical surface plasmon resonances (SPR) in the infrared whose position and width present the expected behavior with the period of the array and film thickness. The shift of the peak position with the permittivity of the surrounding medium demonstrates the feasebility of the sample as large area sensors. © 2009 SPIE.School of Electrical and Computer Engineering Unicamp, Campinas-SP 13081-970Institute of Physics Gleb Wataghin Unicamp, Campinas-SP 13083-970Department of Physics UNESP, Bauru-SP 17033-360Department of Physics UNESP, Bauru-SP 17033-360Universidade Estadual de Campinas (UNICAMP)Universidade Estadual Paulista (Unesp)Menezes, Jacson W.Nalin, Marcelo [UNESP]Chillcce, Enver F.Braga, Edmundo S.Cescato, Lucila2014-05-27T11:24:02Z2014-05-27T11:24:02Z2009-11-18info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/conferenceObjecthttp://dx.doi.org/10.1117/12.826129Proceedings of SPIE - The International Society for Optical Engineering, v. 7394.0277-786Xhttp://hdl.handle.net/11449/7124010.1117/12.8261292-s2.0-704493751953349586880746735Scopusreponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPengProceedings of SPIE - The International Society for Optical Engineeringinfo:eu-repo/semantics/openAccess2024-04-25T17:40:55Zoai:repositorio.unesp.br:11449/71240Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462024-04-25T17:40:55Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false
dc.title.none.fl_str_mv Plasmonic structures fabricated by interference lithography for sensor applications
title Plasmonic structures fabricated by interference lithography for sensor applications
spellingShingle Plasmonic structures fabricated by interference lithography for sensor applications
Menezes, Jacson W.
Holography
Microfabrication
Plasmonic structures
Surface plasmon resonance
Gold film
Holographic lithography
Interference lithography
Large area sensors
Peak position
Plasmonic properties
Sensor applications
Transmission spectrums
Holographic interferometry
Infrared spectroscopy
Lithography
Microanalysis
Micromachining
Nanostructures
Optical properties
Sensors
Plasmons
title_short Plasmonic structures fabricated by interference lithography for sensor applications
title_full Plasmonic structures fabricated by interference lithography for sensor applications
title_fullStr Plasmonic structures fabricated by interference lithography for sensor applications
title_full_unstemmed Plasmonic structures fabricated by interference lithography for sensor applications
title_sort Plasmonic structures fabricated by interference lithography for sensor applications
author Menezes, Jacson W.
author_facet Menezes, Jacson W.
Nalin, Marcelo [UNESP]
Chillcce, Enver F.
Braga, Edmundo S.
Cescato, Lucila
author_role author
author2 Nalin, Marcelo [UNESP]
Chillcce, Enver F.
Braga, Edmundo S.
Cescato, Lucila
author2_role author
author
author
author
dc.contributor.none.fl_str_mv Universidade Estadual de Campinas (UNICAMP)
Universidade Estadual Paulista (Unesp)
dc.contributor.author.fl_str_mv Menezes, Jacson W.
Nalin, Marcelo [UNESP]
Chillcce, Enver F.
Braga, Edmundo S.
Cescato, Lucila
dc.subject.por.fl_str_mv Holography
Microfabrication
Plasmonic structures
Surface plasmon resonance
Gold film
Holographic lithography
Interference lithography
Large area sensors
Peak position
Plasmonic properties
Sensor applications
Transmission spectrums
Holographic interferometry
Infrared spectroscopy
Lithography
Microanalysis
Micromachining
Nanostructures
Optical properties
Sensors
Plasmons
topic Holography
Microfabrication
Plasmonic structures
Surface plasmon resonance
Gold film
Holographic lithography
Interference lithography
Large area sensors
Peak position
Plasmonic properties
Sensor applications
Transmission spectrums
Holographic interferometry
Infrared spectroscopy
Lithography
Microanalysis
Micromachining
Nanostructures
Optical properties
Sensors
Plasmons
description In this work we demonstrate the use of holographic lithography for generation of large area plasmonic periodic structures. Submicrometric array of holes, with different periods and thickness, were recorded in gold films, in areas of about 1 cm2, with homogeneity similar to that of samples recorded by Focused Ion Beam. In order to check the plasmonic properties, we measured the transmission spectra of the samples. The spectra exhibit the typical surface plasmon resonances (SPR) in the infrared whose position and width present the expected behavior with the period of the array and film thickness. The shift of the peak position with the permittivity of the surrounding medium demonstrates the feasebility of the sample as large area sensors. © 2009 SPIE.
publishDate 2009
dc.date.none.fl_str_mv 2009-11-18
2014-05-27T11:24:02Z
2014-05-27T11:24:02Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/conferenceObject
format conferenceObject
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://dx.doi.org/10.1117/12.826129
Proceedings of SPIE - The International Society for Optical Engineering, v. 7394.
0277-786X
http://hdl.handle.net/11449/71240
10.1117/12.826129
2-s2.0-70449375195
3349586880746735
url http://dx.doi.org/10.1117/12.826129
http://hdl.handle.net/11449/71240
identifier_str_mv Proceedings of SPIE - The International Society for Optical Engineering, v. 7394.
0277-786X
10.1117/12.826129
2-s2.0-70449375195
3349586880746735
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv Proceedings of SPIE - The International Society for Optical Engineering
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.source.none.fl_str_mv Scopus
reponame:Repositório Institucional da UNESP
instname:Universidade Estadual Paulista (UNESP)
instacron:UNESP
instname_str Universidade Estadual Paulista (UNESP)
instacron_str UNESP
institution UNESP
reponame_str Repositório Institucional da UNESP
collection Repositório Institucional da UNESP
repository.name.fl_str_mv Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)
repository.mail.fl_str_mv
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