Plasmonic structures fabricated by interference lithography for sensor applications
Autor(a) principal: | |
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Data de Publicação: | 2009 |
Outros Autores: | , , , |
Tipo de documento: | Artigo de conferência |
Idioma: | eng |
Título da fonte: | Repositório Institucional da UNESP |
Texto Completo: | http://dx.doi.org/10.1117/12.826129 http://hdl.handle.net/11449/71240 |
Resumo: | In this work we demonstrate the use of holographic lithography for generation of large area plasmonic periodic structures. Submicrometric array of holes, with different periods and thickness, were recorded in gold films, in areas of about 1 cm2, with homogeneity similar to that of samples recorded by Focused Ion Beam. In order to check the plasmonic properties, we measured the transmission spectra of the samples. The spectra exhibit the typical surface plasmon resonances (SPR) in the infrared whose position and width present the expected behavior with the period of the array and film thickness. The shift of the peak position with the permittivity of the surrounding medium demonstrates the feasebility of the sample as large area sensors. © 2009 SPIE. |
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Plasmonic structures fabricated by interference lithography for sensor applicationsHolographyMicrofabricationPlasmonic structuresSurface plasmon resonanceGold filmHolographic lithographyInterference lithographyLarge area sensorsPeak positionPlasmonic propertiesSensor applicationsTransmission spectrumsHolographic interferometryInfrared spectroscopyLithographyMicroanalysisMicromachiningNanostructuresOptical propertiesSensorsPlasmonsIn this work we demonstrate the use of holographic lithography for generation of large area plasmonic periodic structures. Submicrometric array of holes, with different periods and thickness, were recorded in gold films, in areas of about 1 cm2, with homogeneity similar to that of samples recorded by Focused Ion Beam. In order to check the plasmonic properties, we measured the transmission spectra of the samples. The spectra exhibit the typical surface plasmon resonances (SPR) in the infrared whose position and width present the expected behavior with the period of the array and film thickness. The shift of the peak position with the permittivity of the surrounding medium demonstrates the feasebility of the sample as large area sensors. © 2009 SPIE.School of Electrical and Computer Engineering Unicamp, Campinas-SP 13081-970Institute of Physics Gleb Wataghin Unicamp, Campinas-SP 13083-970Department of Physics UNESP, Bauru-SP 17033-360Department of Physics UNESP, Bauru-SP 17033-360Universidade Estadual de Campinas (UNICAMP)Universidade Estadual Paulista (Unesp)Menezes, Jacson W.Nalin, Marcelo [UNESP]Chillcce, Enver F.Braga, Edmundo S.Cescato, Lucila2014-05-27T11:24:02Z2014-05-27T11:24:02Z2009-11-18info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/conferenceObjecthttp://dx.doi.org/10.1117/12.826129Proceedings of SPIE - The International Society for Optical Engineering, v. 7394.0277-786Xhttp://hdl.handle.net/11449/7124010.1117/12.8261292-s2.0-704493751953349586880746735Scopusreponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPengProceedings of SPIE - The International Society for Optical Engineeringinfo:eu-repo/semantics/openAccess2024-04-25T17:40:55Zoai:repositorio.unesp.br:11449/71240Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462024-04-25T17:40:55Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false |
dc.title.none.fl_str_mv |
Plasmonic structures fabricated by interference lithography for sensor applications |
title |
Plasmonic structures fabricated by interference lithography for sensor applications |
spellingShingle |
Plasmonic structures fabricated by interference lithography for sensor applications Menezes, Jacson W. Holography Microfabrication Plasmonic structures Surface plasmon resonance Gold film Holographic lithography Interference lithography Large area sensors Peak position Plasmonic properties Sensor applications Transmission spectrums Holographic interferometry Infrared spectroscopy Lithography Microanalysis Micromachining Nanostructures Optical properties Sensors Plasmons |
title_short |
Plasmonic structures fabricated by interference lithography for sensor applications |
title_full |
Plasmonic structures fabricated by interference lithography for sensor applications |
title_fullStr |
Plasmonic structures fabricated by interference lithography for sensor applications |
title_full_unstemmed |
Plasmonic structures fabricated by interference lithography for sensor applications |
title_sort |
Plasmonic structures fabricated by interference lithography for sensor applications |
author |
Menezes, Jacson W. |
author_facet |
Menezes, Jacson W. Nalin, Marcelo [UNESP] Chillcce, Enver F. Braga, Edmundo S. Cescato, Lucila |
author_role |
author |
author2 |
Nalin, Marcelo [UNESP] Chillcce, Enver F. Braga, Edmundo S. Cescato, Lucila |
author2_role |
author author author author |
dc.contributor.none.fl_str_mv |
Universidade Estadual de Campinas (UNICAMP) Universidade Estadual Paulista (Unesp) |
dc.contributor.author.fl_str_mv |
Menezes, Jacson W. Nalin, Marcelo [UNESP] Chillcce, Enver F. Braga, Edmundo S. Cescato, Lucila |
dc.subject.por.fl_str_mv |
Holography Microfabrication Plasmonic structures Surface plasmon resonance Gold film Holographic lithography Interference lithography Large area sensors Peak position Plasmonic properties Sensor applications Transmission spectrums Holographic interferometry Infrared spectroscopy Lithography Microanalysis Micromachining Nanostructures Optical properties Sensors Plasmons |
topic |
Holography Microfabrication Plasmonic structures Surface plasmon resonance Gold film Holographic lithography Interference lithography Large area sensors Peak position Plasmonic properties Sensor applications Transmission spectrums Holographic interferometry Infrared spectroscopy Lithography Microanalysis Micromachining Nanostructures Optical properties Sensors Plasmons |
description |
In this work we demonstrate the use of holographic lithography for generation of large area plasmonic periodic structures. Submicrometric array of holes, with different periods and thickness, were recorded in gold films, in areas of about 1 cm2, with homogeneity similar to that of samples recorded by Focused Ion Beam. In order to check the plasmonic properties, we measured the transmission spectra of the samples. The spectra exhibit the typical surface plasmon resonances (SPR) in the infrared whose position and width present the expected behavior with the period of the array and film thickness. The shift of the peak position with the permittivity of the surrounding medium demonstrates the feasebility of the sample as large area sensors. © 2009 SPIE. |
publishDate |
2009 |
dc.date.none.fl_str_mv |
2009-11-18 2014-05-27T11:24:02Z 2014-05-27T11:24:02Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/conferenceObject |
format |
conferenceObject |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://dx.doi.org/10.1117/12.826129 Proceedings of SPIE - The International Society for Optical Engineering, v. 7394. 0277-786X http://hdl.handle.net/11449/71240 10.1117/12.826129 2-s2.0-70449375195 3349586880746735 |
url |
http://dx.doi.org/10.1117/12.826129 http://hdl.handle.net/11449/71240 |
identifier_str_mv |
Proceedings of SPIE - The International Society for Optical Engineering, v. 7394. 0277-786X 10.1117/12.826129 2-s2.0-70449375195 3349586880746735 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
Proceedings of SPIE - The International Society for Optical Engineering |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.source.none.fl_str_mv |
Scopus reponame:Repositório Institucional da UNESP instname:Universidade Estadual Paulista (UNESP) instacron:UNESP |
instname_str |
Universidade Estadual Paulista (UNESP) |
instacron_str |
UNESP |
institution |
UNESP |
reponame_str |
Repositório Institucional da UNESP |
collection |
Repositório Institucional da UNESP |
repository.name.fl_str_mv |
Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP) |
repository.mail.fl_str_mv |
|
_version_ |
1799965025953120256 |