Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method
Autor(a) principal: | |
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Data de Publicação: | 2004 |
Outros Autores: | , , |
Tipo de documento: | Artigo de conferência |
Idioma: | eng |
Título da fonte: | Repositório Institucional da UNESP |
Texto Completo: | http://hdl.handle.net/11449/231763 |
Resumo: | Lithium tantalate (LiTaO3) thin films with (50:50) stoichiometry were prepared using polymeric organic solution. The 5-layered films were deposited on silicon (100) substrates by spin coating method. The coated substrates were thermally treated at 500°C for 3 h under several oxygen atmospheres in order to study the influence of oxygen flow on the crystallinity, microstructure, grain size and roughness of the final film. X-ray diffraction results showed that an oxygen flow of 100 cm3/min leads to LiTaO 3 thin films with higher crystallinity, without preferential orientation. It was observed by scanning electron microscopy (SEM) that the thickness of thin films decreases when the oxygen flow increases. The atomic force microscopy (AFM) studies showed that the grain size and roughness are strongly influenced by oxygen flow. |
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Repositório Institucional da UNESP |
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spelling |
Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor methodLithium tantalate (LiTaO3) thin films with (50:50) stoichiometry were prepared using polymeric organic solution. The 5-layered films were deposited on silicon (100) substrates by spin coating method. The coated substrates were thermally treated at 500°C for 3 h under several oxygen atmospheres in order to study the influence of oxygen flow on the crystallinity, microstructure, grain size and roughness of the final film. X-ray diffraction results showed that an oxygen flow of 100 cm3/min leads to LiTaO 3 thin films with higher crystallinity, without preferential orientation. It was observed by scanning electron microscopy (SEM) that the thickness of thin films decreases when the oxygen flow increases. The atomic force microscopy (AFM) studies showed that the grain size and roughness are strongly influenced by oxygen flow.Universidade Estadual Paulista, Rua Prof. Francisco Degni s/n, Araraquara CEP 14801-970 Sao PauloUniversidade Estadual Paulista, Rua Prof. Francisco Degni s/n, Araraquara CEP 14801-970 Sao PauloUniversidade Estadual Paulista (UNESP)González, A. H.M. [UNESP]Simões, A. Z. [UNESP]Zaghete, M. A. [UNESP]Varela, J. A. [UNESP]2022-04-29T08:47:21Z2022-04-29T08:47:21Z2004-05-10info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/conferenceObject69-76Ceramic Transactions, v. 154, p. 69-76.http://hdl.handle.net/11449/2317632-s2.0-2142769575Scopusreponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPengCeramic Transactionsinfo:eu-repo/semantics/openAccess2022-04-29T08:47:21Zoai:repositorio.unesp.br:11449/231763Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462022-04-29T08:47:21Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false |
dc.title.none.fl_str_mv |
Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method |
title |
Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method |
spellingShingle |
Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method González, A. H.M. [UNESP] |
title_short |
Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method |
title_full |
Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method |
title_fullStr |
Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method |
title_full_unstemmed |
Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method |
title_sort |
Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method |
author |
González, A. H.M. [UNESP] |
author_facet |
González, A. H.M. [UNESP] Simões, A. Z. [UNESP] Zaghete, M. A. [UNESP] Varela, J. A. [UNESP] |
author_role |
author |
author2 |
Simões, A. Z. [UNESP] Zaghete, M. A. [UNESP] Varela, J. A. [UNESP] |
author2_role |
author author author |
dc.contributor.none.fl_str_mv |
Universidade Estadual Paulista (UNESP) |
dc.contributor.author.fl_str_mv |
González, A. H.M. [UNESP] Simões, A. Z. [UNESP] Zaghete, M. A. [UNESP] Varela, J. A. [UNESP] |
description |
Lithium tantalate (LiTaO3) thin films with (50:50) stoichiometry were prepared using polymeric organic solution. The 5-layered films were deposited on silicon (100) substrates by spin coating method. The coated substrates were thermally treated at 500°C for 3 h under several oxygen atmospheres in order to study the influence of oxygen flow on the crystallinity, microstructure, grain size and roughness of the final film. X-ray diffraction results showed that an oxygen flow of 100 cm3/min leads to LiTaO 3 thin films with higher crystallinity, without preferential orientation. It was observed by scanning electron microscopy (SEM) that the thickness of thin films decreases when the oxygen flow increases. The atomic force microscopy (AFM) studies showed that the grain size and roughness are strongly influenced by oxygen flow. |
publishDate |
2004 |
dc.date.none.fl_str_mv |
2004-05-10 2022-04-29T08:47:21Z 2022-04-29T08:47:21Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/conferenceObject |
format |
conferenceObject |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
Ceramic Transactions, v. 154, p. 69-76. http://hdl.handle.net/11449/231763 2-s2.0-2142769575 |
identifier_str_mv |
Ceramic Transactions, v. 154, p. 69-76. 2-s2.0-2142769575 |
url |
http://hdl.handle.net/11449/231763 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
Ceramic Transactions |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
69-76 |
dc.source.none.fl_str_mv |
Scopus reponame:Repositório Institucional da UNESP instname:Universidade Estadual Paulista (UNESP) instacron:UNESP |
instname_str |
Universidade Estadual Paulista (UNESP) |
instacron_str |
UNESP |
institution |
UNESP |
reponame_str |
Repositório Institucional da UNESP |
collection |
Repositório Institucional da UNESP |
repository.name.fl_str_mv |
Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP) |
repository.mail.fl_str_mv |
|
_version_ |
1799965436102574080 |