Direct preparation of standard functional interfaces in oxide heterostructures for 2DEG analysis through beam-induced platinum contacts
Autor(a) principal: | |
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Data de Publicação: | 2018 |
Outros Autores: | , , , , , , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Institucional da UNESP |
Texto Completo: | http://dx.doi.org/10.1063/1.5046093 http://hdl.handle.net/11449/186906 |
Resumo: | Two-dimensional electron gas (2DEG) in SrTiO3/LaAlO3 heterostructures has been extensively studied in the last few years; however, little attention has been given to a practical way to contact electrically the low dimensional gas at the interface. This work demonstrates a method to contact the 2DEG formed at the oxide interfaces connected by platinum electrodes which were made by the decomposition of organometallic gas using focused ion beams. On the surface, the electrodes were defined through photolithography, and at the interface, the electrodes were deposited through the focused ion beams and electrons, which were then evaluated. The quality of the interface electrodes was evaluated at two different partial oxygen pressures (pO2) used for the film deposition: low (10−4 mbar) and high (10−1 mbar). The electrode deposition conditions using electrons or ions have resulted in different rates of metal deposition and interaction with the interface leading to either metallic (2DEG) or insulating behavior. |
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Direct preparation of standard functional interfaces in oxide heterostructures for 2DEG analysis through beam-induced platinum contactsTwo-dimensional electron gas (2DEG) in SrTiO3/LaAlO3 heterostructures has been extensively studied in the last few years; however, little attention has been given to a practical way to contact electrically the low dimensional gas at the interface. This work demonstrates a method to contact the 2DEG formed at the oxide interfaces connected by platinum electrodes which were made by the decomposition of organometallic gas using focused ion beams. On the surface, the electrodes were defined through photolithography, and at the interface, the electrodes were deposited through the focused ion beams and electrons, which were then evaluated. The quality of the interface electrodes was evaluated at two different partial oxygen pressures (pO2) used for the film deposition: low (10−4 mbar) and high (10−1 mbar). The electrode deposition conditions using electrons or ions have resulted in different rates of metal deposition and interaction with the interface leading to either metallic (2DEG) or insulating behavior.LIEC - Chemistry Institute São Paulo State University - UNESPLIEC Department of Chemistry Universidade Federal de São Carlos - UFSCARDepartment of Analytical and Physical Chemistry University Jaume I (UJI)Department of Physics Universidade Federal de São Carlos - UFSCARLIEC - Chemistry Institute São Paulo State University - UNESPUniversidade Estadual Paulista (Unesp)Universidade Federal de São Carlos (UFSCar)University Jaume I (UJI)Amoresi, Rafael A. C. [UNESP]Cichetto, LeonélioKundu, Swarup [UNESP]Teodoro, Marcio D.Marques, Gilmar E.Longo, ElsonAndrés, JuanChiquito, Adenilson J.Zaghete, Maria A. [UNESP]2019-10-06T15:19:28Z2019-10-06T15:19:28Z2018-09-24info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articlehttp://dx.doi.org/10.1063/1.5046093Applied Physics Letters, v. 113, n. 13, 2018.0003-6951http://hdl.handle.net/11449/18690610.1063/1.50460932-s2.0-85054143873Scopusreponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPengApplied Physics Lettersinfo:eu-repo/semantics/openAccess2021-10-23T19:49:58Zoai:repositorio.unesp.br:11449/186906Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462021-10-23T19:49:58Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false |
dc.title.none.fl_str_mv |
Direct preparation of standard functional interfaces in oxide heterostructures for 2DEG analysis through beam-induced platinum contacts |
title |
Direct preparation of standard functional interfaces in oxide heterostructures for 2DEG analysis through beam-induced platinum contacts |
spellingShingle |
Direct preparation of standard functional interfaces in oxide heterostructures for 2DEG analysis through beam-induced platinum contacts Amoresi, Rafael A. C. [UNESP] |
title_short |
Direct preparation of standard functional interfaces in oxide heterostructures for 2DEG analysis through beam-induced platinum contacts |
title_full |
Direct preparation of standard functional interfaces in oxide heterostructures for 2DEG analysis through beam-induced platinum contacts |
title_fullStr |
Direct preparation of standard functional interfaces in oxide heterostructures for 2DEG analysis through beam-induced platinum contacts |
title_full_unstemmed |
Direct preparation of standard functional interfaces in oxide heterostructures for 2DEG analysis through beam-induced platinum contacts |
title_sort |
Direct preparation of standard functional interfaces in oxide heterostructures for 2DEG analysis through beam-induced platinum contacts |
author |
Amoresi, Rafael A. C. [UNESP] |
author_facet |
Amoresi, Rafael A. C. [UNESP] Cichetto, Leonélio Kundu, Swarup [UNESP] Teodoro, Marcio D. Marques, Gilmar E. Longo, Elson Andrés, Juan Chiquito, Adenilson J. Zaghete, Maria A. [UNESP] |
author_role |
author |
author2 |
Cichetto, Leonélio Kundu, Swarup [UNESP] Teodoro, Marcio D. Marques, Gilmar E. Longo, Elson Andrés, Juan Chiquito, Adenilson J. Zaghete, Maria A. [UNESP] |
author2_role |
author author author author author author author author |
dc.contributor.none.fl_str_mv |
Universidade Estadual Paulista (Unesp) Universidade Federal de São Carlos (UFSCar) University Jaume I (UJI) |
dc.contributor.author.fl_str_mv |
Amoresi, Rafael A. C. [UNESP] Cichetto, Leonélio Kundu, Swarup [UNESP] Teodoro, Marcio D. Marques, Gilmar E. Longo, Elson Andrés, Juan Chiquito, Adenilson J. Zaghete, Maria A. [UNESP] |
description |
Two-dimensional electron gas (2DEG) in SrTiO3/LaAlO3 heterostructures has been extensively studied in the last few years; however, little attention has been given to a practical way to contact electrically the low dimensional gas at the interface. This work demonstrates a method to contact the 2DEG formed at the oxide interfaces connected by platinum electrodes which were made by the decomposition of organometallic gas using focused ion beams. On the surface, the electrodes were defined through photolithography, and at the interface, the electrodes were deposited through the focused ion beams and electrons, which were then evaluated. The quality of the interface electrodes was evaluated at two different partial oxygen pressures (pO2) used for the film deposition: low (10−4 mbar) and high (10−1 mbar). The electrode deposition conditions using electrons or ions have resulted in different rates of metal deposition and interaction with the interface leading to either metallic (2DEG) or insulating behavior. |
publishDate |
2018 |
dc.date.none.fl_str_mv |
2018-09-24 2019-10-06T15:19:28Z 2019-10-06T15:19:28Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://dx.doi.org/10.1063/1.5046093 Applied Physics Letters, v. 113, n. 13, 2018. 0003-6951 http://hdl.handle.net/11449/186906 10.1063/1.5046093 2-s2.0-85054143873 |
url |
http://dx.doi.org/10.1063/1.5046093 http://hdl.handle.net/11449/186906 |
identifier_str_mv |
Applied Physics Letters, v. 113, n. 13, 2018. 0003-6951 10.1063/1.5046093 2-s2.0-85054143873 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
Applied Physics Letters |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.source.none.fl_str_mv |
Scopus reponame:Repositório Institucional da UNESP instname:Universidade Estadual Paulista (UNESP) instacron:UNESP |
instname_str |
Universidade Estadual Paulista (UNESP) |
instacron_str |
UNESP |
institution |
UNESP |
reponame_str |
Repositório Institucional da UNESP |
collection |
Repositório Institucional da UNESP |
repository.name.fl_str_mv |
Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP) |
repository.mail.fl_str_mv |
|
_version_ |
1797789424717660160 |