Influence of substrate on the structure of predominantly anatase TiO2 films grown by reactive sputtering
Main Author: | |
---|---|
Publication Date: | 2018 |
Other Authors: | , , , , , , |
Format: | Article |
Language: | eng |
Source: | Repositório Institucional da UNESP |
Download full: | http://dx.doi.org/10.1039/c7ra10974a http://hdl.handle.net/11449/170678 |
Summary: | TiO2 films are grown on LaAlO3 (001), Si (100) and SiO2 substrates by reactive radio frequency sputtering. X-ray diffraction (XRD) pole figures revealed important characteristics about the texture and phase distribution on those films. Combined with spectroscopic ellipsometry, the pole figures allowed the analysis of the growth characteristics over the whole volume of the layers. Details in the microstructure of the films were probed using transmission electron spectroscopy. Anatase is the dominating phase in the films grown on all substrates. On TiO2/LaAlO3 fims, the mosaicity is very low, so that the pole figure closely resembles that of anatase monocrystals. Detailed inspection of XRD pole figures reveals a small amount of rutile in the TiO2/LaAlO3 films. For the growth of TiO2 onto SiO2, rutile and brookite phases are also detected. Transmission electron microscopy and XRD results show the formation of anatase {112} twins in films grown on the different substrates, suggesting that the anatase {112} twin mediates the growth of rutile and brookite phases. Optical results are in agreement with the XRD observations: the optical properties of TiO2/LaAlO3 films are similar to the ordinary values of bulk anatase crystals, indicating the orientation of the film in the [001] direction, whereas results for TiO2/SiO2 are compatible with lower crystalline ordering. |
id |
UNSP_ea11d634c85c4d047d4bc82da1098046 |
---|---|
oai_identifier_str |
oai:repositorio.unesp.br:11449/170678 |
network_acronym_str |
UNSP |
network_name_str |
Repositório Institucional da UNESP |
repository_id_str |
2946 |
spelling |
Influence of substrate on the structure of predominantly anatase TiO2 films grown by reactive sputteringTiO2 films are grown on LaAlO3 (001), Si (100) and SiO2 substrates by reactive radio frequency sputtering. X-ray diffraction (XRD) pole figures revealed important characteristics about the texture and phase distribution on those films. Combined with spectroscopic ellipsometry, the pole figures allowed the analysis of the growth characteristics over the whole volume of the layers. Details in the microstructure of the films were probed using transmission electron spectroscopy. Anatase is the dominating phase in the films grown on all substrates. On TiO2/LaAlO3 fims, the mosaicity is very low, so that the pole figure closely resembles that of anatase monocrystals. Detailed inspection of XRD pole figures reveals a small amount of rutile in the TiO2/LaAlO3 films. For the growth of TiO2 onto SiO2, rutile and brookite phases are also detected. Transmission electron microscopy and XRD results show the formation of anatase {112} twins in films grown on the different substrates, suggesting that the anatase {112} twin mediates the growth of rutile and brookite phases. Optical results are in agreement with the XRD observations: the optical properties of TiO2/LaAlO3 films are similar to the ordinary values of bulk anatase crystals, indicating the orientation of the film in the [001] direction, whereas results for TiO2/SiO2 are compatible with lower crystalline ordering.Coordenação de Aperfeiçoamento de Pessoal de Nível Superior (CAPES)Fundação de Amparo à Pesquisa e Inovação do Estado de Santa CatarinaFinanciadora de Estudos e ProjetosLaboratório de Filmes Finos e Superfícies Universidade Federal de Santa CatarinaPrograma de Pós-Graduação em Ciência e Engenharia de Materiais Universidade Federal de Santa CatarinaFaculdade de Ciências Universidade Estadual Paulista UNESPUniversidade Federal da Grande Dourados UFGDDepartamento de Física Universidade Federal de Minas GeraisFaculdade de Ciências Universidade Estadual Paulista UNESPUniversidade Federal de Santa Catarina (UFSC)Universidade Estadual Paulista (Unesp)Universidade Federal da Grande Dourados UFGDUniversidade Federal de Minas Gerais (UFMG)Brandt, Iuri S.Plá Cid, Cristiani C.Azevedo, Carlos G. G. [UNESP]Pereira, André L. J.Benetti, Luana C.Ferlauto, Andre S.Dias Da Silva, José H. [UNESP]Pasa, André A.2018-12-11T16:51:58Z2018-12-11T16:51:58Z2018-01-01info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/article7062-7071http://dx.doi.org/10.1039/c7ra10974aRSC Advances, v. 8, n. 13, p. 7062-7071, 2018.2046-2069http://hdl.handle.net/11449/17067810.1039/c7ra10974a2-s2.0-85042192986Scopusreponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPengRSC Advances0,863info:eu-repo/semantics/openAccess2021-10-23T15:54:58Zoai:repositorio.unesp.br:11449/170678Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462021-10-23T15:54:58Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false |
dc.title.none.fl_str_mv |
Influence of substrate on the structure of predominantly anatase TiO2 films grown by reactive sputtering |
title |
Influence of substrate on the structure of predominantly anatase TiO2 films grown by reactive sputtering |
spellingShingle |
Influence of substrate on the structure of predominantly anatase TiO2 films grown by reactive sputtering Brandt, Iuri S. |
title_short |
Influence of substrate on the structure of predominantly anatase TiO2 films grown by reactive sputtering |
title_full |
Influence of substrate on the structure of predominantly anatase TiO2 films grown by reactive sputtering |
title_fullStr |
Influence of substrate on the structure of predominantly anatase TiO2 films grown by reactive sputtering |
title_full_unstemmed |
Influence of substrate on the structure of predominantly anatase TiO2 films grown by reactive sputtering |
title_sort |
Influence of substrate on the structure of predominantly anatase TiO2 films grown by reactive sputtering |
author |
Brandt, Iuri S. |
author_facet |
Brandt, Iuri S. Plá Cid, Cristiani C. Azevedo, Carlos G. G. [UNESP] Pereira, André L. J. Benetti, Luana C. Ferlauto, Andre S. Dias Da Silva, José H. [UNESP] Pasa, André A. |
author_role |
author |
author2 |
Plá Cid, Cristiani C. Azevedo, Carlos G. G. [UNESP] Pereira, André L. J. Benetti, Luana C. Ferlauto, Andre S. Dias Da Silva, José H. [UNESP] Pasa, André A. |
author2_role |
author author author author author author author |
dc.contributor.none.fl_str_mv |
Universidade Federal de Santa Catarina (UFSC) Universidade Estadual Paulista (Unesp) Universidade Federal da Grande Dourados UFGD Universidade Federal de Minas Gerais (UFMG) |
dc.contributor.author.fl_str_mv |
Brandt, Iuri S. Plá Cid, Cristiani C. Azevedo, Carlos G. G. [UNESP] Pereira, André L. J. Benetti, Luana C. Ferlauto, Andre S. Dias Da Silva, José H. [UNESP] Pasa, André A. |
description |
TiO2 films are grown on LaAlO3 (001), Si (100) and SiO2 substrates by reactive radio frequency sputtering. X-ray diffraction (XRD) pole figures revealed important characteristics about the texture and phase distribution on those films. Combined with spectroscopic ellipsometry, the pole figures allowed the analysis of the growth characteristics over the whole volume of the layers. Details in the microstructure of the films were probed using transmission electron spectroscopy. Anatase is the dominating phase in the films grown on all substrates. On TiO2/LaAlO3 fims, the mosaicity is very low, so that the pole figure closely resembles that of anatase monocrystals. Detailed inspection of XRD pole figures reveals a small amount of rutile in the TiO2/LaAlO3 films. For the growth of TiO2 onto SiO2, rutile and brookite phases are also detected. Transmission electron microscopy and XRD results show the formation of anatase {112} twins in films grown on the different substrates, suggesting that the anatase {112} twin mediates the growth of rutile and brookite phases. Optical results are in agreement with the XRD observations: the optical properties of TiO2/LaAlO3 films are similar to the ordinary values of bulk anatase crystals, indicating the orientation of the film in the [001] direction, whereas results for TiO2/SiO2 are compatible with lower crystalline ordering. |
publishDate |
2018 |
dc.date.none.fl_str_mv |
2018-12-11T16:51:58Z 2018-12-11T16:51:58Z 2018-01-01 |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://dx.doi.org/10.1039/c7ra10974a RSC Advances, v. 8, n. 13, p. 7062-7071, 2018. 2046-2069 http://hdl.handle.net/11449/170678 10.1039/c7ra10974a 2-s2.0-85042192986 |
url |
http://dx.doi.org/10.1039/c7ra10974a http://hdl.handle.net/11449/170678 |
identifier_str_mv |
RSC Advances, v. 8, n. 13, p. 7062-7071, 2018. 2046-2069 10.1039/c7ra10974a 2-s2.0-85042192986 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
RSC Advances 0,863 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
7062-7071 |
dc.source.none.fl_str_mv |
Scopus reponame:Repositório Institucional da UNESP instname:Universidade Estadual Paulista (UNESP) instacron:UNESP |
instname_str |
Universidade Estadual Paulista (UNESP) |
instacron_str |
UNESP |
institution |
UNESP |
reponame_str |
Repositório Institucional da UNESP |
collection |
Repositório Institucional da UNESP |
repository.name.fl_str_mv |
Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP) |
repository.mail.fl_str_mv |
|
_version_ |
1797789813655470080 |