Effects of the atmosphere and substrate on the crystallization of PLZT thin films

Detalhes bibliográficos
Autor(a) principal: Simões,A.Z.
Data de Publicação: 2000
Outros Autores: Gonzalez,A.H.M., Zaghete,M.A., Varela,J.A., Stojanovic,B.D.
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Materials research (São Carlos. Online)
Texto Completo: http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392000000300004
Resumo: Lead lanthanum zirconate titanate [PLZT (9/65/35)] thin films were prepared by dip-coating on Si (100) or Si/Ti/Pt (100) substrates using a polymeric precursor solution and annealed at 650 °C for 3 h. Perovskite phase formation of the PLZT thin films and microstructure were analysed using XRD and SEM. Effects of Si (100), Si/Ti/Pt (100) substrates and atmosphere on crystallization of PLZT thin films were studied. Films deposited on platinum coated silicon (100) show a heterogeneous surface with presence of bubbles. Otherwise, the PLZT (9/65/35) thin films deposited on silicon (100) substrate shows a more uniform surface after annealing in oxygen atmosphere.
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spelling Effects of the atmosphere and substrate on the crystallization of PLZT thin filmsPLZTPechini methoddip-coatingcrystallizationLead lanthanum zirconate titanate [PLZT (9/65/35)] thin films were prepared by dip-coating on Si (100) or Si/Ti/Pt (100) substrates using a polymeric precursor solution and annealed at 650 °C for 3 h. Perovskite phase formation of the PLZT thin films and microstructure were analysed using XRD and SEM. Effects of Si (100), Si/Ti/Pt (100) substrates and atmosphere on crystallization of PLZT thin films were studied. Films deposited on platinum coated silicon (100) show a heterogeneous surface with presence of bubbles. Otherwise, the PLZT (9/65/35) thin films deposited on silicon (100) substrate shows a more uniform surface after annealing in oxygen atmosphere.ABM, ABC, ABPol2000-07-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersiontext/htmlhttp://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392000000300004Materials Research v.3 n.3 2000reponame:Materials research (São Carlos. Online)instname:Universidade Federal de São Carlos (UFSCAR)instacron:ABM ABC ABPOL10.1590/S1516-14392000000300004info:eu-repo/semantics/openAccessSimões,A.Z.Gonzalez,A.H.M.Zaghete,M.A.Varela,J.A.Stojanovic,B.D.eng2000-11-17T00:00:00Zoai:scielo:S1516-14392000000300004Revistahttp://www.scielo.br/mrPUBhttps://old.scielo.br/oai/scielo-oai.phpdedz@power.ufscar.br1980-53731516-1439opendoar:2000-11-17T00:00Materials research (São Carlos. Online) - Universidade Federal de São Carlos (UFSCAR)false
dc.title.none.fl_str_mv Effects of the atmosphere and substrate on the crystallization of PLZT thin films
title Effects of the atmosphere and substrate on the crystallization of PLZT thin films
spellingShingle Effects of the atmosphere and substrate on the crystallization of PLZT thin films
Simões,A.Z.
PLZT
Pechini method
dip-coating
crystallization
title_short Effects of the atmosphere and substrate on the crystallization of PLZT thin films
title_full Effects of the atmosphere and substrate on the crystallization of PLZT thin films
title_fullStr Effects of the atmosphere and substrate on the crystallization of PLZT thin films
title_full_unstemmed Effects of the atmosphere and substrate on the crystallization of PLZT thin films
title_sort Effects of the atmosphere and substrate on the crystallization of PLZT thin films
author Simões,A.Z.
author_facet Simões,A.Z.
Gonzalez,A.H.M.
Zaghete,M.A.
Varela,J.A.
Stojanovic,B.D.
author_role author
author2 Gonzalez,A.H.M.
Zaghete,M.A.
Varela,J.A.
Stojanovic,B.D.
author2_role author
author
author
author
dc.contributor.author.fl_str_mv Simões,A.Z.
Gonzalez,A.H.M.
Zaghete,M.A.
Varela,J.A.
Stojanovic,B.D.
dc.subject.por.fl_str_mv PLZT
Pechini method
dip-coating
crystallization
topic PLZT
Pechini method
dip-coating
crystallization
description Lead lanthanum zirconate titanate [PLZT (9/65/35)] thin films were prepared by dip-coating on Si (100) or Si/Ti/Pt (100) substrates using a polymeric precursor solution and annealed at 650 °C for 3 h. Perovskite phase formation of the PLZT thin films and microstructure were analysed using XRD and SEM. Effects of Si (100), Si/Ti/Pt (100) substrates and atmosphere on crystallization of PLZT thin films were studied. Films deposited on platinum coated silicon (100) show a heterogeneous surface with presence of bubbles. Otherwise, the PLZT (9/65/35) thin films deposited on silicon (100) substrate shows a more uniform surface after annealing in oxygen atmosphere.
publishDate 2000
dc.date.none.fl_str_mv 2000-07-01
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392000000300004
url http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392000000300004
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 10.1590/S1516-14392000000300004
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv text/html
dc.publisher.none.fl_str_mv ABM, ABC, ABPol
publisher.none.fl_str_mv ABM, ABC, ABPol
dc.source.none.fl_str_mv Materials Research v.3 n.3 2000
reponame:Materials research (São Carlos. Online)
instname:Universidade Federal de São Carlos (UFSCAR)
instacron:ABM ABC ABPOL
instname_str Universidade Federal de São Carlos (UFSCAR)
instacron_str ABM ABC ABPOL
institution ABM ABC ABPOL
reponame_str Materials research (São Carlos. Online)
collection Materials research (São Carlos. Online)
repository.name.fl_str_mv Materials research (São Carlos. Online) - Universidade Federal de São Carlos (UFSCAR)
repository.mail.fl_str_mv dedz@power.ufscar.br
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