2D fluid approaches of DC magnetron discharge
Autor(a) principal: | |
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Data de Publicação: | 2005 |
Outros Autores: | , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | http://hdl.handle.net/1822/3817 |
Resumo: | A two dimensional (r,z) time-dependent fluid model was developed and used to describe a DC planar magnetron discharge with cylindrical symmetry. The transport description of the charged species uses the corresponding first three moments of Boltzmann equation: continuity, momentum transfer and mean energy transfer (the latter one only for electrons), coupled with Poisson equation. An original way is proposed to treat the transport equations. Electron and ion momentum transport equations are reduced to the classical drift-diffusion expression of the fluxes since the presence of the magnetic field is introduced as an additional part in the electron flux, while for ions an effective electric field was considered. Thus, both continuity and mean energy transfer equations are solved in a classical manner. Numerical simulations were performed considering Argon as buffer gas, with a neutral pressure varying between 5 and 30 mtorr, a gas temperature from 300 to 350 K and cathode voltages lying from -200 up to -600 V. Results obtained for densities of the charged particle, fluxes and plasma potential are in good agreement with previous works. |
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Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
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2D fluid approaches of DC magnetron dischargeMagnetron dischargeNumerical modellingFluid modelA two dimensional (r,z) time-dependent fluid model was developed and used to describe a DC planar magnetron discharge with cylindrical symmetry. The transport description of the charged species uses the corresponding first three moments of Boltzmann equation: continuity, momentum transfer and mean energy transfer (the latter one only for electrons), coupled with Poisson equation. An original way is proposed to treat the transport equations. Electron and ion momentum transport equations are reduced to the classical drift-diffusion expression of the fluxes since the presence of the magnetic field is introduced as an additional part in the electron flux, while for ions an effective electric field was considered. Thus, both continuity and mean energy transfer equations are solved in a classical manner. Numerical simulations were performed considering Argon as buffer gas, with a neutral pressure varying between 5 and 30 mtorr, a gas temperature from 300 to 350 K and cathode voltages lying from -200 up to -600 V. Results obtained for densities of the charged particle, fluxes and plasma potential are in good agreement with previous works.Laboratoire de Physique des Gaz el des Plasmas (LPGP).Consiliul National al Cercetarii Stiintifice din Invatamantul Superior (CNCSIS) - A/1344/40213/2003.IOP PublishingUniversidade do MinhoCostin, C.Marques, L.Popa, G.Gousset, G.20052005-01-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/3817eng"Plasma Sources Science and Tecnhology". ISSN 0963-0252. 14 (2005) 168-176.0963-0252http://ej.iop.org/links/q51/kYCVdpS6q5uvHJp6NQavzg/psst5_1_018.pdfinfo:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:06:34ZPortal AgregadorONG |
dc.title.none.fl_str_mv |
2D fluid approaches of DC magnetron discharge |
title |
2D fluid approaches of DC magnetron discharge |
spellingShingle |
2D fluid approaches of DC magnetron discharge Costin, C. Magnetron discharge Numerical modelling Fluid model |
title_short |
2D fluid approaches of DC magnetron discharge |
title_full |
2D fluid approaches of DC magnetron discharge |
title_fullStr |
2D fluid approaches of DC magnetron discharge |
title_full_unstemmed |
2D fluid approaches of DC magnetron discharge |
title_sort |
2D fluid approaches of DC magnetron discharge |
author |
Costin, C. |
author_facet |
Costin, C. Marques, L. Popa, G. Gousset, G. |
author_role |
author |
author2 |
Marques, L. Popa, G. Gousset, G. |
author2_role |
author author author |
dc.contributor.none.fl_str_mv |
Universidade do Minho |
dc.contributor.author.fl_str_mv |
Costin, C. Marques, L. Popa, G. Gousset, G. |
dc.subject.por.fl_str_mv |
Magnetron discharge Numerical modelling Fluid model |
topic |
Magnetron discharge Numerical modelling Fluid model |
description |
A two dimensional (r,z) time-dependent fluid model was developed and used to describe a DC planar magnetron discharge with cylindrical symmetry. The transport description of the charged species uses the corresponding first three moments of Boltzmann equation: continuity, momentum transfer and mean energy transfer (the latter one only for electrons), coupled with Poisson equation. An original way is proposed to treat the transport equations. Electron and ion momentum transport equations are reduced to the classical drift-diffusion expression of the fluxes since the presence of the magnetic field is introduced as an additional part in the electron flux, while for ions an effective electric field was considered. Thus, both continuity and mean energy transfer equations are solved in a classical manner. Numerical simulations were performed considering Argon as buffer gas, with a neutral pressure varying between 5 and 30 mtorr, a gas temperature from 300 to 350 K and cathode voltages lying from -200 up to -600 V. Results obtained for densities of the charged particle, fluxes and plasma potential are in good agreement with previous works. |
publishDate |
2005 |
dc.date.none.fl_str_mv |
2005 2005-01-01T00:00:00Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/1822/3817 |
url |
http://hdl.handle.net/1822/3817 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
"Plasma Sources Science and Tecnhology". ISSN 0963-0252. 14 (2005) 168-176. 0963-0252 http://ej.iop.org/links/q51/kYCVdpS6q5uvHJp6NQavzg/psst5_1_018.pdf |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.publisher.none.fl_str_mv |
IOP Publishing |
publisher.none.fl_str_mv |
IOP Publishing |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
instname_str |
Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
instacron_str |
RCAAP |
institution |
RCAAP |
reponame_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
collection |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository.name.fl_str_mv |
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repository.mail.fl_str_mv |
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_version_ |
1777303683391815680 |