DC magnetron discharge fluid model using a new numerical scheme

Detalhes bibliográficos
Autor(a) principal: Costin, C.
Data de Publicação: 2003
Outros Autores: Marques, L., Gousset, G., Popa, G.
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/1822/4381
Resumo: Numerical modelling of an electrical discharge by fluid model can be accomplished through different procedures and approaches. A 2D time-dependent one was applied in order to describe a cylindrical symmetry Argon DC planar magnetron discharge. All transport equations, which means continuity and momentum transfer equations for electrons and ions and electron mean energy transport equation are solved in the same manner, using corrected classical drift-diffusion expressions for fluxes. For the validity of this last approach, the presence of magnetic field has been introduced as a correction in the electronic flux expression, while for ions an effective electric field has been considered. Plasma potential is given by Poisson equation.
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spelling DC magnetron discharge fluid model using a new numerical schemeModellingMagnetronNumerical modelling of an electrical discharge by fluid model can be accomplished through different procedures and approaches. A 2D time-dependent one was applied in order to describe a cylindrical symmetry Argon DC planar magnetron discharge. All transport equations, which means continuity and momentum transfer equations for electrons and ions and electron mean energy transport equation are solved in the same manner, using corrected classical drift-diffusion expressions for fluxes. For the validity of this last approach, the presence of magnetic field has been introduced as a correction in the electronic flux expression, while for ions an effective electric field has been considered. Plasma potential is given by Poisson equation.University GreifswaldUniversidade do MinhoCostin, C.Marques, L.Gousset, G.Popa, G.2003-072003-07-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/4381engMEICHSNER, J, ; LOFFHOGEN, D. ; WAGNER, H.-E., ed. lit. – “ICPIG2003 : proceedings of International Conference on Phenomena in Ionized Gases, 26, Greifswald, Germany, 2003”. Greifswald : University at Greifswald, 2003. ISBN 3-00-011689-3. vol. 3, p. 49-50.info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:32:03ZPortal AgregadorONG
dc.title.none.fl_str_mv DC magnetron discharge fluid model using a new numerical scheme
title DC magnetron discharge fluid model using a new numerical scheme
spellingShingle DC magnetron discharge fluid model using a new numerical scheme
Costin, C.
Modelling
Magnetron
title_short DC magnetron discharge fluid model using a new numerical scheme
title_full DC magnetron discharge fluid model using a new numerical scheme
title_fullStr DC magnetron discharge fluid model using a new numerical scheme
title_full_unstemmed DC magnetron discharge fluid model using a new numerical scheme
title_sort DC magnetron discharge fluid model using a new numerical scheme
author Costin, C.
author_facet Costin, C.
Marques, L.
Gousset, G.
Popa, G.
author_role author
author2 Marques, L.
Gousset, G.
Popa, G.
author2_role author
author
author
dc.contributor.none.fl_str_mv Universidade do Minho
dc.contributor.author.fl_str_mv Costin, C.
Marques, L.
Gousset, G.
Popa, G.
dc.subject.por.fl_str_mv Modelling
Magnetron
topic Modelling
Magnetron
description Numerical modelling of an electrical discharge by fluid model can be accomplished through different procedures and approaches. A 2D time-dependent one was applied in order to describe a cylindrical symmetry Argon DC planar magnetron discharge. All transport equations, which means continuity and momentum transfer equations for electrons and ions and electron mean energy transport equation are solved in the same manner, using corrected classical drift-diffusion expressions for fluxes. For the validity of this last approach, the presence of magnetic field has been introduced as a correction in the electronic flux expression, while for ions an effective electric field has been considered. Plasma potential is given by Poisson equation.
publishDate 2003
dc.date.none.fl_str_mv 2003-07
2003-07-01T00:00:00Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/1822/4381
url http://hdl.handle.net/1822/4381
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv MEICHSNER, J, ; LOFFHOGEN, D. ; WAGNER, H.-E., ed. lit. – “ICPIG2003 : proceedings of International Conference on Phenomena in Ionized Gases, 26, Greifswald, Germany, 2003”. Greifswald : University at Greifswald, 2003. ISBN 3-00-011689-3. vol. 3, p. 49-50.
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv University Greifswald
publisher.none.fl_str_mv University Greifswald
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
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instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
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