Effect of thermal treatments on the structure of MoNxOy thin films

Detalhes bibliográficos
Autor(a) principal: Cunha, L.
Data de Publicação: 2008
Outros Autores: Rebouta, L., Vaz, F., Staszuk, M., Malara, S., Barbosa, J., Carvalho, P., Alves, E., Le Bourhis, E., Goudeau, Ph., Rivière, J. P.
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/1822/13841
Resumo: Article in Press
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spelling Effect of thermal treatments on the structure of MoNxOy thin filmsMoNxOyStructureAnnealingMoN O x yScience & TechnologyArticle in PressMoNxOy films were deposited on steel substrates by dc reactive magnetron sputtering. The depositions were carried out from a pure molybdenum target, varying the flow rate of reactive gases. X-ray diffraction (XRD) results revealed the occurrence of cubic MoNx and hexagonal (d-MoN) phases for the films with high nitrogen flow rates. The increase of oxygen content induces the decrease of the grain size of the molybdenum nitride crystallites. The thermal stability of a set of samples was studied in vacuum, for an annealing time of 1 h, for temperatures ranging from 500 to 800 C in 100 C steps. The results showed that pure molybdenum nitride films changed their structure from a meta-stable cubic MoN to hexagonal d-MoN and cubic g-Mo2N-type structures with increasing annealing temperatures. The samples with molybdenum nitride films evidenced a good thermal stability, but those with molybdenum oxynitride coatings showed a tendency to detach with the increase of the annealing temperature.Fundação para a Ciência e a Tecnologia (FCT) - POCTI/CTM/38086/2001ElsevierUniversidade do MinhoCunha, L.Rebouta, L.Vaz, F.Staszuk, M.Malara, S.Barbosa, J.Carvalho, P.Alves, E.Le Bourhis, E.Goudeau, Ph.Rivière, J. P.2008-08-082008-08-08T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/13841eng0042-207X10.1016/j.vacuum.2008.03.015http://www.sciencedirect.com/science/article/pii/S0042207X0800136Xinfo:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:44:08Zoai:repositorium.sdum.uminho.pt:1822/13841Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T19:41:46.538960Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv Effect of thermal treatments on the structure of MoNxOy thin films
title Effect of thermal treatments on the structure of MoNxOy thin films
spellingShingle Effect of thermal treatments on the structure of MoNxOy thin films
Cunha, L.
MoNxOy
Structure
Annealing
MoN O x y
Science & Technology
title_short Effect of thermal treatments on the structure of MoNxOy thin films
title_full Effect of thermal treatments on the structure of MoNxOy thin films
title_fullStr Effect of thermal treatments on the structure of MoNxOy thin films
title_full_unstemmed Effect of thermal treatments on the structure of MoNxOy thin films
title_sort Effect of thermal treatments on the structure of MoNxOy thin films
author Cunha, L.
author_facet Cunha, L.
Rebouta, L.
Vaz, F.
Staszuk, M.
Malara, S.
Barbosa, J.
Carvalho, P.
Alves, E.
Le Bourhis, E.
Goudeau, Ph.
Rivière, J. P.
author_role author
author2 Rebouta, L.
Vaz, F.
Staszuk, M.
Malara, S.
Barbosa, J.
Carvalho, P.
Alves, E.
Le Bourhis, E.
Goudeau, Ph.
Rivière, J. P.
author2_role author
author
author
author
author
author
author
author
author
author
dc.contributor.none.fl_str_mv Universidade do Minho
dc.contributor.author.fl_str_mv Cunha, L.
Rebouta, L.
Vaz, F.
Staszuk, M.
Malara, S.
Barbosa, J.
Carvalho, P.
Alves, E.
Le Bourhis, E.
Goudeau, Ph.
Rivière, J. P.
dc.subject.por.fl_str_mv MoNxOy
Structure
Annealing
MoN O x y
Science & Technology
topic MoNxOy
Structure
Annealing
MoN O x y
Science & Technology
description Article in Press
publishDate 2008
dc.date.none.fl_str_mv 2008-08-08
2008-08-08T00:00:00Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/1822/13841
url http://hdl.handle.net/1822/13841
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 0042-207X
10.1016/j.vacuum.2008.03.015
http://www.sciencedirect.com/science/article/pii/S0042207X0800136X
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Elsevier
publisher.none.fl_str_mv Elsevier
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
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reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
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repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
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