Dynamic analysis of silicon micromachined double-rotor scanning mirror
Autor(a) principal: | |
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Data de Publicação: | 2006 |
Outros Autores: | , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Journal of the Brazilian Society of Mechanical Sciences and Engineering (Online) |
Texto Completo: | http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1678-58782006000400008 |
Resumo: | The use of MEMS-based technologies for producing scanning mirrors enables its batch production with a consequent increase in the throughput and a decrease in the manufacturing costs per device. However, the use of Silicon as a structural material could introduce non-linearities in the device behavior due to the variation of its mechanical properties according to the crystalline orientation. The orthotropic properties when taken into account in the finite element model of the device could enhance the accuracy in the design of micromachined scanning mirrors. The model used in this paper does not take into account the orthotropic behavior, however, satisfactory results were obtained. To validate the finite element model, a modal analysis of the device was performed using the Laser Doppler Vibrometry method. The normal modes of the structure were identified and the results agree well with the finite element model. This work presents the FE model and experimental modal analysis results of a Silicon micromachined double-rotor scanning mirror. |
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Journal of the Brazilian Society of Mechanical Sciences and Engineering (Online) |
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Dynamic analysis of silicon micromachined double-rotor scanning mirrorMicroscannerstorsional oscillatorsmodal analysisLaser Doppler vibrometryThe use of MEMS-based technologies for producing scanning mirrors enables its batch production with a consequent increase in the throughput and a decrease in the manufacturing costs per device. However, the use of Silicon as a structural material could introduce non-linearities in the device behavior due to the variation of its mechanical properties according to the crystalline orientation. The orthotropic properties when taken into account in the finite element model of the device could enhance the accuracy in the design of micromachined scanning mirrors. The model used in this paper does not take into account the orthotropic behavior, however, satisfactory results were obtained. To validate the finite element model, a modal analysis of the device was performed using the Laser Doppler Vibrometry method. The normal modes of the structure were identified and the results agree well with the finite element model. This work presents the FE model and experimental modal analysis results of a Silicon micromachined double-rotor scanning mirror.Associação Brasileira de Engenharia e Ciências Mecânicas - ABCM2006-12-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersiontext/htmlhttp://old.scielo.br/scielo.php?script=sci_arttext&pid=S1678-58782006000400008Journal of the Brazilian Society of Mechanical Sciences and Engineering v.28 n.4 2006reponame:Journal of the Brazilian Society of Mechanical Sciences and Engineering (Online)instname:Associação Brasileira de Engenharia e Ciências Mecânicas (ABCM)instacron:ABCM10.1590/S1678-58782006000400008info:eu-repo/semantics/openAccessOliveira,Luiz Claudio M.Ahmida,Khaled M.Ferreira,Luiz Otávio S.eng2007-10-08T00:00:00Zoai:scielo:S1678-58782006000400008Revistahttps://www.scielo.br/j/jbsmse/https://old.scielo.br/oai/scielo-oai.php||abcm@abcm.org.br1806-36911678-5878opendoar:2007-10-08T00:00Journal of the Brazilian Society of Mechanical Sciences and Engineering (Online) - Associação Brasileira de Engenharia e Ciências Mecânicas (ABCM)false |
dc.title.none.fl_str_mv |
Dynamic analysis of silicon micromachined double-rotor scanning mirror |
title |
Dynamic analysis of silicon micromachined double-rotor scanning mirror |
spellingShingle |
Dynamic analysis of silicon micromachined double-rotor scanning mirror Oliveira,Luiz Claudio M. Microscanners torsional oscillators modal analysis Laser Doppler vibrometry |
title_short |
Dynamic analysis of silicon micromachined double-rotor scanning mirror |
title_full |
Dynamic analysis of silicon micromachined double-rotor scanning mirror |
title_fullStr |
Dynamic analysis of silicon micromachined double-rotor scanning mirror |
title_full_unstemmed |
Dynamic analysis of silicon micromachined double-rotor scanning mirror |
title_sort |
Dynamic analysis of silicon micromachined double-rotor scanning mirror |
author |
Oliveira,Luiz Claudio M. |
author_facet |
Oliveira,Luiz Claudio M. Ahmida,Khaled M. Ferreira,Luiz Otávio S. |
author_role |
author |
author2 |
Ahmida,Khaled M. Ferreira,Luiz Otávio S. |
author2_role |
author author |
dc.contributor.author.fl_str_mv |
Oliveira,Luiz Claudio M. Ahmida,Khaled M. Ferreira,Luiz Otávio S. |
dc.subject.por.fl_str_mv |
Microscanners torsional oscillators modal analysis Laser Doppler vibrometry |
topic |
Microscanners torsional oscillators modal analysis Laser Doppler vibrometry |
description |
The use of MEMS-based technologies for producing scanning mirrors enables its batch production with a consequent increase in the throughput and a decrease in the manufacturing costs per device. However, the use of Silicon as a structural material could introduce non-linearities in the device behavior due to the variation of its mechanical properties according to the crystalline orientation. The orthotropic properties when taken into account in the finite element model of the device could enhance the accuracy in the design of micromachined scanning mirrors. The model used in this paper does not take into account the orthotropic behavior, however, satisfactory results were obtained. To validate the finite element model, a modal analysis of the device was performed using the Laser Doppler Vibrometry method. The normal modes of the structure were identified and the results agree well with the finite element model. This work presents the FE model and experimental modal analysis results of a Silicon micromachined double-rotor scanning mirror. |
publishDate |
2006 |
dc.date.none.fl_str_mv |
2006-12-01 |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1678-58782006000400008 |
url |
http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1678-58782006000400008 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
10.1590/S1678-58782006000400008 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
text/html |
dc.publisher.none.fl_str_mv |
Associação Brasileira de Engenharia e Ciências Mecânicas - ABCM |
publisher.none.fl_str_mv |
Associação Brasileira de Engenharia e Ciências Mecânicas - ABCM |
dc.source.none.fl_str_mv |
Journal of the Brazilian Society of Mechanical Sciences and Engineering v.28 n.4 2006 reponame:Journal of the Brazilian Society of Mechanical Sciences and Engineering (Online) instname:Associação Brasileira de Engenharia e Ciências Mecânicas (ABCM) instacron:ABCM |
instname_str |
Associação Brasileira de Engenharia e Ciências Mecânicas (ABCM) |
instacron_str |
ABCM |
institution |
ABCM |
reponame_str |
Journal of the Brazilian Society of Mechanical Sciences and Engineering (Online) |
collection |
Journal of the Brazilian Society of Mechanical Sciences and Engineering (Online) |
repository.name.fl_str_mv |
Journal of the Brazilian Society of Mechanical Sciences and Engineering (Online) - Associação Brasileira de Engenharia e Ciências Mecânicas (ABCM) |
repository.mail.fl_str_mv |
||abcm@abcm.org.br |
_version_ |
1754734680900370432 |