Effect of the deposition conditions of platinum electrodes on their performance as resistive heating elements

Detalhes bibliográficos
Autor(a) principal: Mardare,Andrei Ionut
Data de Publicação: 2004
Outros Autores: Mardare,Cezarina Cela, Joanni,Ednan
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Materials research (São Carlos. Online)
Texto Completo: http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392004000300009
Resumo: The performance of different platinum electrodes used as resistive heating elements was studied. Pt films having different thickness were deposited by RF magnetron sputtering at room temperature followed by post-deposition annealing at 700 ºC or made in-situ at 700 ºC. The Pt films were deposited over oxidized silicon, using Ti or Zr buffer layers. The resistance dependence on temperature was studied by applying increasing currents (up to 2A) to the Pt films. Changes in the microstructure of the Pt films account for the changes in the temperature coefficient of resistance as a function of the deposition parameters. The maximum substrate temperature (675 ºC) was obtained when using 200 nm Pt films deposited at 700 ºC over Ti, with a power consumption of only 16 W.
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spelling Effect of the deposition conditions of platinum electrodes on their performance as resistive heating elementsjoule heatingplatinumthin filmsbottom electrodesThe performance of different platinum electrodes used as resistive heating elements was studied. Pt films having different thickness were deposited by RF magnetron sputtering at room temperature followed by post-deposition annealing at 700 ºC or made in-situ at 700 ºC. The Pt films were deposited over oxidized silicon, using Ti or Zr buffer layers. The resistance dependence on temperature was studied by applying increasing currents (up to 2A) to the Pt films. Changes in the microstructure of the Pt films account for the changes in the temperature coefficient of resistance as a function of the deposition parameters. The maximum substrate temperature (675 ºC) was obtained when using 200 nm Pt films deposited at 700 ºC over Ti, with a power consumption of only 16 W.ABM, ABC, ABPol2004-09-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersiontext/htmlhttp://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392004000300009Materials Research v.7 n.3 2004reponame:Materials research (São Carlos. Online)instname:Universidade Federal de São Carlos (UFSCAR)instacron:ABM ABC ABPOL10.1590/S1516-14392004000300009info:eu-repo/semantics/openAccessMardare,Andrei IonutMardare,Cezarina CelaJoanni,Ednaneng2004-08-13T00:00:00Zoai:scielo:S1516-14392004000300009Revistahttp://www.scielo.br/mrPUBhttps://old.scielo.br/oai/scielo-oai.phpdedz@power.ufscar.br1980-53731516-1439opendoar:2004-08-13T00:00Materials research (São Carlos. Online) - Universidade Federal de São Carlos (UFSCAR)false
dc.title.none.fl_str_mv Effect of the deposition conditions of platinum electrodes on their performance as resistive heating elements
title Effect of the deposition conditions of platinum electrodes on their performance as resistive heating elements
spellingShingle Effect of the deposition conditions of platinum electrodes on their performance as resistive heating elements
Mardare,Andrei Ionut
joule heating
platinum
thin films
bottom electrodes
title_short Effect of the deposition conditions of platinum electrodes on their performance as resistive heating elements
title_full Effect of the deposition conditions of platinum electrodes on their performance as resistive heating elements
title_fullStr Effect of the deposition conditions of platinum electrodes on their performance as resistive heating elements
title_full_unstemmed Effect of the deposition conditions of platinum electrodes on their performance as resistive heating elements
title_sort Effect of the deposition conditions of platinum electrodes on their performance as resistive heating elements
author Mardare,Andrei Ionut
author_facet Mardare,Andrei Ionut
Mardare,Cezarina Cela
Joanni,Ednan
author_role author
author2 Mardare,Cezarina Cela
Joanni,Ednan
author2_role author
author
dc.contributor.author.fl_str_mv Mardare,Andrei Ionut
Mardare,Cezarina Cela
Joanni,Ednan
dc.subject.por.fl_str_mv joule heating
platinum
thin films
bottom electrodes
topic joule heating
platinum
thin films
bottom electrodes
description The performance of different platinum electrodes used as resistive heating elements was studied. Pt films having different thickness were deposited by RF magnetron sputtering at room temperature followed by post-deposition annealing at 700 ºC or made in-situ at 700 ºC. The Pt films were deposited over oxidized silicon, using Ti or Zr buffer layers. The resistance dependence on temperature was studied by applying increasing currents (up to 2A) to the Pt films. Changes in the microstructure of the Pt films account for the changes in the temperature coefficient of resistance as a function of the deposition parameters. The maximum substrate temperature (675 ºC) was obtained when using 200 nm Pt films deposited at 700 ºC over Ti, with a power consumption of only 16 W.
publishDate 2004
dc.date.none.fl_str_mv 2004-09-01
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392004000300009
url http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392004000300009
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 10.1590/S1516-14392004000300009
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv text/html
dc.publisher.none.fl_str_mv ABM, ABC, ABPol
publisher.none.fl_str_mv ABM, ABC, ABPol
dc.source.none.fl_str_mv Materials Research v.7 n.3 2004
reponame:Materials research (São Carlos. Online)
instname:Universidade Federal de São Carlos (UFSCAR)
instacron:ABM ABC ABPOL
instname_str Universidade Federal de São Carlos (UFSCAR)
instacron_str ABM ABC ABPOL
institution ABM ABC ABPOL
reponame_str Materials research (São Carlos. Online)
collection Materials research (São Carlos. Online)
repository.name.fl_str_mv Materials research (São Carlos. Online) - Universidade Federal de São Carlos (UFSCAR)
repository.mail.fl_str_mv dedz@power.ufscar.br
_version_ 1754212657736450048

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