High-quality Finishing Process for Silicon Carbide Optical Components Using Conventional Equipment

Detalhes bibliográficos
Autor(a) principal: Santos,Marcos Valentim Ribeiro dos
Data de Publicação: 2022
Outros Autores: Damião,Alvaro José, Abdalla,Antonio Jorge
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Materials research (São Carlos. Online)
Texto Completo: http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392022000100281
Resumo: Abstract The development of low-cost high quality surface finishing methods for silicon carbide (SiC) is an arduous task. Nowadays, the SiC mirrors manufacture involves extensive, complex, and costly finishing processes carried out on highly expensive ultra-precise machines. In this work, a cost-effective surface finishing method has been successfully developed, using conventional machines for the optical finishing of SiC. The results showed that the combination of ductile grinding and polishing in conventional low-cost machines allowed to obtain high-quality surface finish on SiC substrates with low roughness (4 - 10 nm Ra ) and optical figure in the range λ / 4 - λ / 8, at a reduced 32 hours total processing time.
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spelling High-quality Finishing Process for Silicon Carbide Optical Components Using Conventional EquipmentSilicon carbidemachiningpolishingroughnessoptical figureAbstract The development of low-cost high quality surface finishing methods for silicon carbide (SiC) is an arduous task. Nowadays, the SiC mirrors manufacture involves extensive, complex, and costly finishing processes carried out on highly expensive ultra-precise machines. In this work, a cost-effective surface finishing method has been successfully developed, using conventional machines for the optical finishing of SiC. The results showed that the combination of ductile grinding and polishing in conventional low-cost machines allowed to obtain high-quality surface finish on SiC substrates with low roughness (4 - 10 nm Ra ) and optical figure in the range λ / 4 - λ / 8, at a reduced 32 hours total processing time.ABM, ABC, ABPol2022-01-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersiontext/htmlhttp://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392022000100281Materials Research v.25 2022reponame:Materials research (São Carlos. Online)instname:Universidade Federal de São Carlos (UFSCAR)instacron:ABM ABC ABPOL10.1590/1980-5373-mr-2021-0422info:eu-repo/semantics/openAccessSantos,Marcos Valentim Ribeiro dosDamião,Alvaro JoséAbdalla,Antonio Jorgeeng2022-02-23T00:00:00Zoai:scielo:S1516-14392022000100281Revistahttp://www.scielo.br/mrPUBhttps://old.scielo.br/oai/scielo-oai.phpdedz@power.ufscar.br1980-53731516-1439opendoar:2022-02-23T00:00Materials research (São Carlos. Online) - Universidade Federal de São Carlos (UFSCAR)false
dc.title.none.fl_str_mv High-quality Finishing Process for Silicon Carbide Optical Components Using Conventional Equipment
title High-quality Finishing Process for Silicon Carbide Optical Components Using Conventional Equipment
spellingShingle High-quality Finishing Process for Silicon Carbide Optical Components Using Conventional Equipment
Santos,Marcos Valentim Ribeiro dos
Silicon carbide
machining
polishing
roughness
optical figure
title_short High-quality Finishing Process for Silicon Carbide Optical Components Using Conventional Equipment
title_full High-quality Finishing Process for Silicon Carbide Optical Components Using Conventional Equipment
title_fullStr High-quality Finishing Process for Silicon Carbide Optical Components Using Conventional Equipment
title_full_unstemmed High-quality Finishing Process for Silicon Carbide Optical Components Using Conventional Equipment
title_sort High-quality Finishing Process for Silicon Carbide Optical Components Using Conventional Equipment
author Santos,Marcos Valentim Ribeiro dos
author_facet Santos,Marcos Valentim Ribeiro dos
Damião,Alvaro José
Abdalla,Antonio Jorge
author_role author
author2 Damião,Alvaro José
Abdalla,Antonio Jorge
author2_role author
author
dc.contributor.author.fl_str_mv Santos,Marcos Valentim Ribeiro dos
Damião,Alvaro José
Abdalla,Antonio Jorge
dc.subject.por.fl_str_mv Silicon carbide
machining
polishing
roughness
optical figure
topic Silicon carbide
machining
polishing
roughness
optical figure
description Abstract The development of low-cost high quality surface finishing methods for silicon carbide (SiC) is an arduous task. Nowadays, the SiC mirrors manufacture involves extensive, complex, and costly finishing processes carried out on highly expensive ultra-precise machines. In this work, a cost-effective surface finishing method has been successfully developed, using conventional machines for the optical finishing of SiC. The results showed that the combination of ductile grinding and polishing in conventional low-cost machines allowed to obtain high-quality surface finish on SiC substrates with low roughness (4 - 10 nm Ra ) and optical figure in the range λ / 4 - λ / 8, at a reduced 32 hours total processing time.
publishDate 2022
dc.date.none.fl_str_mv 2022-01-01
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392022000100281
url http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392022000100281
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 10.1590/1980-5373-mr-2021-0422
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv text/html
dc.publisher.none.fl_str_mv ABM, ABC, ABPol
publisher.none.fl_str_mv ABM, ABC, ABPol
dc.source.none.fl_str_mv Materials Research v.25 2022
reponame:Materials research (São Carlos. Online)
instname:Universidade Federal de São Carlos (UFSCAR)
instacron:ABM ABC ABPOL
instname_str Universidade Federal de São Carlos (UFSCAR)
instacron_str ABM ABC ABPOL
institution ABM ABC ABPOL
reponame_str Materials research (São Carlos. Online)
collection Materials research (São Carlos. Online)
repository.name.fl_str_mv Materials research (São Carlos. Online) - Universidade Federal de São Carlos (UFSCAR)
repository.mail.fl_str_mv dedz@power.ufscar.br
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