Structural and optical properties o plasma-deposited a-C:H:Si:O:N films
Autor(a) principal: | |
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Data de Publicação: | 2021 |
Outros Autores: | , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Polímeros (São Carlos. Online) |
Texto Completo: | http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0104-14282021000300410 |
Resumo: | Abstract Thin a-C:H:Si:O:N films were deposited from plasmas fed hexamethyldisiloxane, oxygen and nitrogen, and characterized as a function of the partial pressure of oxygen in the feed, Rox. Deposition rates varied from 10 to 27 nm min-1. Surface roughness was independent of Rox, being around 10 nm. The films contain C=C and C=O, and also Si-C and Si-O-Si groups. Lower [C] and [N] but greater [O] and [Si] were measured in the films as Rox was increased. Refractive indices of ~ 1.5 and optical energy gaps which fell from ~ 3.3 to ~2.3 eV were observed with increasing Rox. The Urbach energy fell with increasing optical gap, which is characteristic of amorphous materials. Such materials have potential as transparent barrier coatings. |
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Structural and optical properties o plasma-deposited a-C:H:Si:O:N filmsplasma enhanced chemical vapor depositionoptical band gapurbach energyAbstract Thin a-C:H:Si:O:N films were deposited from plasmas fed hexamethyldisiloxane, oxygen and nitrogen, and characterized as a function of the partial pressure of oxygen in the feed, Rox. Deposition rates varied from 10 to 27 nm min-1. Surface roughness was independent of Rox, being around 10 nm. The films contain C=C and C=O, and also Si-C and Si-O-Si groups. Lower [C] and [N] but greater [O] and [Si] were measured in the films as Rox was increased. Refractive indices of ~ 1.5 and optical energy gaps which fell from ~ 3.3 to ~2.3 eV were observed with increasing Rox. The Urbach energy fell with increasing optical gap, which is characteristic of amorphous materials. Such materials have potential as transparent barrier coatings.Associação Brasileira de Polímeros2021-01-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersiontext/htmlhttp://old.scielo.br/scielo.php?script=sci_arttext&pid=S0104-14282021000300410Polímeros v.31 n.3 2021reponame:Polímeros (São Carlos. Online)instname:Associação Brasileira de Polímeros (ABPol)instacron:ABPO10.1590/0104-1428.210043info:eu-repo/semantics/openAccessLopes,Juliana Feletto Silveira CostaTardelli,JeanRangel,Elidiane CiprianoDurrant,Steven Frederickeng2022-01-05T00:00:00Zoai:scielo:S0104-14282021000300410Revistahttp://www.scielo.br/pohttps://old.scielo.br/oai/scielo-oai.php||revista@abpol.org.br1678-51690104-1428opendoar:2022-01-05T00:00Polímeros (São Carlos. Online) - Associação Brasileira de Polímeros (ABPol)false |
dc.title.none.fl_str_mv |
Structural and optical properties o plasma-deposited a-C:H:Si:O:N films |
title |
Structural and optical properties o plasma-deposited a-C:H:Si:O:N films |
spellingShingle |
Structural and optical properties o plasma-deposited a-C:H:Si:O:N films Lopes,Juliana Feletto Silveira Costa plasma enhanced chemical vapor deposition optical band gap urbach energy |
title_short |
Structural and optical properties o plasma-deposited a-C:H:Si:O:N films |
title_full |
Structural and optical properties o plasma-deposited a-C:H:Si:O:N films |
title_fullStr |
Structural and optical properties o plasma-deposited a-C:H:Si:O:N films |
title_full_unstemmed |
Structural and optical properties o plasma-deposited a-C:H:Si:O:N films |
title_sort |
Structural and optical properties o plasma-deposited a-C:H:Si:O:N films |
author |
Lopes,Juliana Feletto Silveira Costa |
author_facet |
Lopes,Juliana Feletto Silveira Costa Tardelli,Jean Rangel,Elidiane Cipriano Durrant,Steven Frederick |
author_role |
author |
author2 |
Tardelli,Jean Rangel,Elidiane Cipriano Durrant,Steven Frederick |
author2_role |
author author author |
dc.contributor.author.fl_str_mv |
Lopes,Juliana Feletto Silveira Costa Tardelli,Jean Rangel,Elidiane Cipriano Durrant,Steven Frederick |
dc.subject.por.fl_str_mv |
plasma enhanced chemical vapor deposition optical band gap urbach energy |
topic |
plasma enhanced chemical vapor deposition optical band gap urbach energy |
description |
Abstract Thin a-C:H:Si:O:N films were deposited from plasmas fed hexamethyldisiloxane, oxygen and nitrogen, and characterized as a function of the partial pressure of oxygen in the feed, Rox. Deposition rates varied from 10 to 27 nm min-1. Surface roughness was independent of Rox, being around 10 nm. The films contain C=C and C=O, and also Si-C and Si-O-Si groups. Lower [C] and [N] but greater [O] and [Si] were measured in the films as Rox was increased. Refractive indices of ~ 1.5 and optical energy gaps which fell from ~ 3.3 to ~2.3 eV were observed with increasing Rox. The Urbach energy fell with increasing optical gap, which is characteristic of amorphous materials. Such materials have potential as transparent barrier coatings. |
publishDate |
2021 |
dc.date.none.fl_str_mv |
2021-01-01 |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0104-14282021000300410 |
url |
http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0104-14282021000300410 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
10.1590/0104-1428.210043 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
text/html |
dc.publisher.none.fl_str_mv |
Associação Brasileira de Polímeros |
publisher.none.fl_str_mv |
Associação Brasileira de Polímeros |
dc.source.none.fl_str_mv |
Polímeros v.31 n.3 2021 reponame:Polímeros (São Carlos. Online) instname:Associação Brasileira de Polímeros (ABPol) instacron:ABPO |
instname_str |
Associação Brasileira de Polímeros (ABPol) |
instacron_str |
ABPO |
institution |
ABPO |
reponame_str |
Polímeros (São Carlos. Online) |
collection |
Polímeros (São Carlos. Online) |
repository.name.fl_str_mv |
Polímeros (São Carlos. Online) - Associação Brasileira de Polímeros (ABPol) |
repository.mail.fl_str_mv |
||revista@abpol.org.br |
_version_ |
1754212591352152064 |