Silver-based reflective coatings for micromachined optical filters

Detalhes bibliográficos
Autor(a) principal: Correia, J. H.
Data de Publicação: 1999
Outros Autores: Bartek, M., Wolffenbuttel, R. F.
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/1822/3778
Resumo: Silver films of 40 nm thickness, evaporated on a 300 nm thick low-stress silicon nitride layer, are used as high-quality mirrors operating in the visible and near IR spectral range. Application of a silicon nitride membrane under tension, placed within a square Si frame after bulk micromachining, improves the initial mirror flatness. Two parallel mirrors, each with square aperture of up to 2x2 mm2 and an electrostatically controlled spacing, form a tunable Fabry–P´erot optical filter. Investigation of the silver-based reflective coatings, and mirror characterization, including influence of bulk micromachining, are presented
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spelling Silver-based reflective coatings for micromachined optical filtersOptical filtersSilver coatingSilver films of 40 nm thickness, evaporated on a 300 nm thick low-stress silicon nitride layer, are used as high-quality mirrors operating in the visible and near IR spectral range. Application of a silicon nitride membrane under tension, placed within a square Si frame after bulk micromachining, improves the initial mirror flatness. Two parallel mirrors, each with square aperture of up to 2x2 mm2 and an electrostatically controlled spacing, form a tunable Fabry–P´erot optical filter. Investigation of the silver-based reflective coatings, and mirror characterization, including influence of bulk micromachining, are presentedFundação para a Ciência e a Tecnologia FCTIOP PublishingUniversidade do MinhoCorreia, J. H.Bartek, M.Wolffenbuttel, R. F.1999-091999-09-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/3778eng"Journal of micromechanics and microengineering". ISSN 0960-1317. 9:2 (June 1999) 162-165.0960-1317info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:35:40Zoai:repositorium.sdum.uminho.pt:1822/3778Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T19:31:32.762853Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv Silver-based reflective coatings for micromachined optical filters
title Silver-based reflective coatings for micromachined optical filters
spellingShingle Silver-based reflective coatings for micromachined optical filters
Correia, J. H.
Optical filters
Silver coating
title_short Silver-based reflective coatings for micromachined optical filters
title_full Silver-based reflective coatings for micromachined optical filters
title_fullStr Silver-based reflective coatings for micromachined optical filters
title_full_unstemmed Silver-based reflective coatings for micromachined optical filters
title_sort Silver-based reflective coatings for micromachined optical filters
author Correia, J. H.
author_facet Correia, J. H.
Bartek, M.
Wolffenbuttel, R. F.
author_role author
author2 Bartek, M.
Wolffenbuttel, R. F.
author2_role author
author
dc.contributor.none.fl_str_mv Universidade do Minho
dc.contributor.author.fl_str_mv Correia, J. H.
Bartek, M.
Wolffenbuttel, R. F.
dc.subject.por.fl_str_mv Optical filters
Silver coating
topic Optical filters
Silver coating
description Silver films of 40 nm thickness, evaporated on a 300 nm thick low-stress silicon nitride layer, are used as high-quality mirrors operating in the visible and near IR spectral range. Application of a silicon nitride membrane under tension, placed within a square Si frame after bulk micromachining, improves the initial mirror flatness. Two parallel mirrors, each with square aperture of up to 2x2 mm2 and an electrostatically controlled spacing, form a tunable Fabry–P´erot optical filter. Investigation of the silver-based reflective coatings, and mirror characterization, including influence of bulk micromachining, are presented
publishDate 1999
dc.date.none.fl_str_mv 1999-09
1999-09-01T00:00:00Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/1822/3778
url http://hdl.handle.net/1822/3778
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv "Journal of micromechanics and microengineering". ISSN 0960-1317. 9:2 (June 1999) 162-165.
0960-1317
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv IOP Publishing
publisher.none.fl_str_mv IOP Publishing
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
repository.mail.fl_str_mv
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