Nb-doped Ti2O3 films deposited through grid-assisted magnetron sputtering on glass substrate: electrical and optical analysis
Autor(a) principal: | |
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Data de Publicação: | 2019 |
Outros Autores: | , , , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | http://hdl.handle.net/1822/61329 |
Resumo: | Niobium doped dititanium trioxide (Ti2O3:Nb) films were deposited on glass substrates, through grid-assisted magnetron sputtering. The Ti2O3:Nb films were characterized by X-ray diffraction (XRD), electrical conductivity and optical properties. Film deposition was carried out in two different substrate bias modes: DC and unipolar pulsed. Results show that the negative-pulsed mode improves conductivity and crystallinity. The XRD results show peaks corresponding crystallographic planes of Ti2O3. No niobium oxide NbxOy peaks were observed, which indicates that niobium oxide if formed, is amorphous, and/or substituted Nb atoms remain in a solid solution within the Ti2O3 structure. It was observed that "as-deposited" Ti2O3:Nb films (without post annealing) are transparent and electrical conductive, with transmittance that reaches 60% in the visible light wavelength despite the considerable thickness of the film and a miminum resistivity of 2x10-2 Ω.cm which indicates that there is potential for application as Transparent Conductive Oxide (TCO). |
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Nb-doped Ti2O3 films deposited through grid-assisted magnetron sputtering on glass substrate: electrical and optical analysisDititanium trioxide Ti2O3Niobium dopingelectrical conductivitysubstrate biasgrid-assisted sputteringDititanium trioxide Ti O 2 3Ciências Naturais::Ciências FísicasScience & TechnologyNiobium doped dititanium trioxide (Ti2O3:Nb) films were deposited on glass substrates, through grid-assisted magnetron sputtering. The Ti2O3:Nb films were characterized by X-ray diffraction (XRD), electrical conductivity and optical properties. Film deposition was carried out in two different substrate bias modes: DC and unipolar pulsed. Results show that the negative-pulsed mode improves conductivity and crystallinity. The XRD results show peaks corresponding crystallographic planes of Ti2O3. No niobium oxide NbxOy peaks were observed, which indicates that niobium oxide if formed, is amorphous, and/or substituted Nb atoms remain in a solid solution within the Ti2O3 structure. It was observed that "as-deposited" Ti2O3:Nb films (without post annealing) are transparent and electrical conductive, with transmittance that reaches 60% in the visible light wavelength despite the considerable thickness of the film and a miminum resistivity of 2x10-2 Ω.cm which indicates that there is potential for application as Transparent Conductive Oxide (TCO).This study was supported by the Government of the State of Santa Catarina through the FUMDES and FAPESC programs.Universidade Federal de São Carlos (UFSCar)Universidade do MinhoStryhalski, JoelDuarte, Diego AlexandreRebouta, L.Sagás, Julio CésarTavares, C. J.Fontana, Luis Cesar2019-01-242019-01-24T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/61329eng1516-14391980-537310.1590/1980-5373-mr-2018-0524http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392019000200218&tlng=eninfo:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:17:44Zoai:repositorium.sdum.uminho.pt:1822/61329Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T19:10:24.325294Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse |
dc.title.none.fl_str_mv |
Nb-doped Ti2O3 films deposited through grid-assisted magnetron sputtering on glass substrate: electrical and optical analysis |
title |
Nb-doped Ti2O3 films deposited through grid-assisted magnetron sputtering on glass substrate: electrical and optical analysis |
spellingShingle |
Nb-doped Ti2O3 films deposited through grid-assisted magnetron sputtering on glass substrate: electrical and optical analysis Stryhalski, Joel Dititanium trioxide Ti2O3 Niobium doping electrical conductivity substrate bias grid-assisted sputtering Dititanium trioxide Ti O 2 3 Ciências Naturais::Ciências Físicas Science & Technology |
title_short |
Nb-doped Ti2O3 films deposited through grid-assisted magnetron sputtering on glass substrate: electrical and optical analysis |
title_full |
Nb-doped Ti2O3 films deposited through grid-assisted magnetron sputtering on glass substrate: electrical and optical analysis |
title_fullStr |
Nb-doped Ti2O3 films deposited through grid-assisted magnetron sputtering on glass substrate: electrical and optical analysis |
title_full_unstemmed |
Nb-doped Ti2O3 films deposited through grid-assisted magnetron sputtering on glass substrate: electrical and optical analysis |
title_sort |
Nb-doped Ti2O3 films deposited through grid-assisted magnetron sputtering on glass substrate: electrical and optical analysis |
author |
Stryhalski, Joel |
author_facet |
Stryhalski, Joel Duarte, Diego Alexandre Rebouta, L. Sagás, Julio César Tavares, C. J. Fontana, Luis Cesar |
author_role |
author |
author2 |
Duarte, Diego Alexandre Rebouta, L. Sagás, Julio César Tavares, C. J. Fontana, Luis Cesar |
author2_role |
author author author author author |
dc.contributor.none.fl_str_mv |
Universidade do Minho |
dc.contributor.author.fl_str_mv |
Stryhalski, Joel Duarte, Diego Alexandre Rebouta, L. Sagás, Julio César Tavares, C. J. Fontana, Luis Cesar |
dc.subject.por.fl_str_mv |
Dititanium trioxide Ti2O3 Niobium doping electrical conductivity substrate bias grid-assisted sputtering Dititanium trioxide Ti O 2 3 Ciências Naturais::Ciências Físicas Science & Technology |
topic |
Dititanium trioxide Ti2O3 Niobium doping electrical conductivity substrate bias grid-assisted sputtering Dititanium trioxide Ti O 2 3 Ciências Naturais::Ciências Físicas Science & Technology |
description |
Niobium doped dititanium trioxide (Ti2O3:Nb) films were deposited on glass substrates, through grid-assisted magnetron sputtering. The Ti2O3:Nb films were characterized by X-ray diffraction (XRD), electrical conductivity and optical properties. Film deposition was carried out in two different substrate bias modes: DC and unipolar pulsed. Results show that the negative-pulsed mode improves conductivity and crystallinity. The XRD results show peaks corresponding crystallographic planes of Ti2O3. No niobium oxide NbxOy peaks were observed, which indicates that niobium oxide if formed, is amorphous, and/or substituted Nb atoms remain in a solid solution within the Ti2O3 structure. It was observed that "as-deposited" Ti2O3:Nb films (without post annealing) are transparent and electrical conductive, with transmittance that reaches 60% in the visible light wavelength despite the considerable thickness of the film and a miminum resistivity of 2x10-2 Ω.cm which indicates that there is potential for application as Transparent Conductive Oxide (TCO). |
publishDate |
2019 |
dc.date.none.fl_str_mv |
2019-01-24 2019-01-24T00:00:00Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/1822/61329 |
url |
http://hdl.handle.net/1822/61329 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
1516-1439 1980-5373 10.1590/1980-5373-mr-2018-0524 http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392019000200218&tlng=en |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.publisher.none.fl_str_mv |
Universidade Federal de São Carlos (UFSCar) |
publisher.none.fl_str_mv |
Universidade Federal de São Carlos (UFSCar) |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
instname_str |
Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
instacron_str |
RCAAP |
institution |
RCAAP |
reponame_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
collection |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository.name.fl_str_mv |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
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1799132533392146432 |