Automated rf-PERTE System for Room Temperature Deposition of TCO Coatings

Detalhes bibliográficos
Autor(a) principal: Fernandes, M.
Data de Publicação: 2016
Outros Autores: Vygranenko, Y., Vieira, Maria Manuela de Almeida Carvalho, Lavareda, G., Carvalho, C. Nunes De, Amaral, A.
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: https://doi.org/10.1016/j.egypro.2016.11.323
Resumo: The authors are grateful to the Portuguese Foundation of Science and Technology through fellowship SFRH/BPD/102217/2014 for financial support of this research.
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spelling Automated rf-PERTE System for Room Temperature Deposition of TCO Coatingsdeposition techniquethin solid filmstransparent conducting oxidesEnergy(all)The authors are grateful to the Portuguese Foundation of Science and Technology through fellowship SFRH/BPD/102217/2014 for financial support of this research.In this work we present a fully automated plasma-enhanced reactive thermal evaporation system (rf-PERTE) that can be used for the deposition of transparent metal oxide films without intentional heating of the substrate. The system and developed software enables the full control over critical deposition conditions such as mass flow of oxygen, process pressure, current flowing through crucible and rf-power. These parameters are automatically adjusted during the deposition thus keeping them in a narrow process window. This way, highly transparent and conductive coating can be deposited with a high degree of reproducibility of the optical and electrical characteristics. The resistivity of 9×10-4 Ω-cm and the peak transmittance of 90% in the visible spectral range were achieved for indium oxide films deposited on glass substrates. This technique is also suitable for the deposition of transparent conducting coatings in a wide range of plastic materials for flexible solar cells. In particular, we have successfully deposited indium oxide on PEN (polyethylene naphthalate) sheets with electrical and optical properties approaching the ones for films on glass.ELSEVIER SCIENCE BVUNINOVA-Instituto de Desenvolvimento de Novas TecnologiasCTS - Centro de Tecnologia e SistemasDCM - Departamento de Ciência dos MateriaisRUNFernandes, M.Vygranenko, Y.Vieira, Maria Manuela de Almeida CarvalhoLavareda, G.Carvalho, C. Nunes DeAmaral, A.2018-07-19T22:14:56Z20162016-01-01T00:00:00Zconference objectinfo:eu-repo/semantics/publishedVersion6application/pdfhttps://doi.org/10.1016/j.egypro.2016.11.323eng1876-6102PURE: 5487807http://www.scopus.com/inward/record.url?scp=85013117894&partnerID=8YFLogxKhttps://doi.org/10.1016/j.egypro.2016.11.323info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2024-09-23T01:37:45Zoai:run.unl.pt:10362/42055Portal AgregadorONGhttps://www.rcaap.pt/oai/openairemluisa.alvim@gmail.comopendoar:71602024-09-23T01:37:45Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv Automated rf-PERTE System for Room Temperature Deposition of TCO Coatings
title Automated rf-PERTE System for Room Temperature Deposition of TCO Coatings
spellingShingle Automated rf-PERTE System for Room Temperature Deposition of TCO Coatings
Fernandes, M.
deposition technique
thin solid films
transparent conducting oxides
Energy(all)
title_short Automated rf-PERTE System for Room Temperature Deposition of TCO Coatings
title_full Automated rf-PERTE System for Room Temperature Deposition of TCO Coatings
title_fullStr Automated rf-PERTE System for Room Temperature Deposition of TCO Coatings
title_full_unstemmed Automated rf-PERTE System for Room Temperature Deposition of TCO Coatings
title_sort Automated rf-PERTE System for Room Temperature Deposition of TCO Coatings
author Fernandes, M.
author_facet Fernandes, M.
Vygranenko, Y.
Vieira, Maria Manuela de Almeida Carvalho
Lavareda, G.
Carvalho, C. Nunes De
Amaral, A.
author_role author
author2 Vygranenko, Y.
Vieira, Maria Manuela de Almeida Carvalho
Lavareda, G.
Carvalho, C. Nunes De
Amaral, A.
author2_role author
author
author
author
author
dc.contributor.none.fl_str_mv UNINOVA-Instituto de Desenvolvimento de Novas Tecnologias
CTS - Centro de Tecnologia e Sistemas
DCM - Departamento de Ciência dos Materiais
RUN
dc.contributor.author.fl_str_mv Fernandes, M.
Vygranenko, Y.
Vieira, Maria Manuela de Almeida Carvalho
Lavareda, G.
Carvalho, C. Nunes De
Amaral, A.
dc.subject.por.fl_str_mv deposition technique
thin solid films
transparent conducting oxides
Energy(all)
topic deposition technique
thin solid films
transparent conducting oxides
Energy(all)
description The authors are grateful to the Portuguese Foundation of Science and Technology through fellowship SFRH/BPD/102217/2014 for financial support of this research.
publishDate 2016
dc.date.none.fl_str_mv 2016
2016-01-01T00:00:00Z
2018-07-19T22:14:56Z
dc.type.driver.fl_str_mv conference object
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
status_str publishedVersion
dc.identifier.uri.fl_str_mv https://doi.org/10.1016/j.egypro.2016.11.323
url https://doi.org/10.1016/j.egypro.2016.11.323
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 1876-6102
PURE: 5487807
http://www.scopus.com/inward/record.url?scp=85013117894&partnerID=8YFLogxK
https://doi.org/10.1016/j.egypro.2016.11.323
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv 6
application/pdf
dc.publisher.none.fl_str_mv ELSEVIER SCIENCE BV
publisher.none.fl_str_mv ELSEVIER SCIENCE BV
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
repository.mail.fl_str_mv mluisa.alvim@gmail.com
_version_ 1817545649078403072

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