Spatial atomic layer deposition of LiPON thin films
Autor(a) principal: | |
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Data de Publicação: | 2018 |
Tipo de documento: | Dissertação |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | http://hdl.handle.net/10362/53593 |
Resumo: | In the last few years, with the advance of electrical vehicles and number of devices needing safe batteries especially in the medical field, a more efficient way to store energy is necessary. Despite the fact that conventional lithium batteries present high conductivity values, they do not exhibit enough charging/discharging speed and also include dangerous components to health. To overcome those challenges, thin film solid state batteries are considered a promising candidate. However, this all-solid-state battery concept exhibits too low energy density, pushing the technology towards 3D structures and developing 3D all-solid-state lithium-ion batteries (ASSBs). This thesis describes the development of a pinhole-free solid-state lithium-ion electrolyte through spatial, to pave the way for cost effective and scalable 3D ASSBs. The produced films are thoroughly characterized to find the relation between deposition parameters and film quality in terms of thickness, reproducibility, uniformity, composition and conductivity. The obtained LiPON, being deposited with the fast spatial ALD process, offers ionic conductivity of 1.55 (± 0.14) x 10-7 S/cm and electronic conductivity of 1.86 x 10-13 S/cm, being a promising solid electrolyte layer for next generation lithium-ion batteries. |
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Spatial atomic layer deposition of LiPON thin filmsSolid state batteryThin film technologyLithiumspatial atomic layer depositionElectrolyteDomínio/Área Científica::Engenharia e Tecnologia::Engenharia dos MateriaisIn the last few years, with the advance of electrical vehicles and number of devices needing safe batteries especially in the medical field, a more efficient way to store energy is necessary. Despite the fact that conventional lithium batteries present high conductivity values, they do not exhibit enough charging/discharging speed and also include dangerous components to health. To overcome those challenges, thin film solid state batteries are considered a promising candidate. However, this all-solid-state battery concept exhibits too low energy density, pushing the technology towards 3D structures and developing 3D all-solid-state lithium-ion batteries (ASSBs). This thesis describes the development of a pinhole-free solid-state lithium-ion electrolyte through spatial, to pave the way for cost effective and scalable 3D ASSBs. The produced films are thoroughly characterized to find the relation between deposition parameters and film quality in terms of thickness, reproducibility, uniformity, composition and conductivity. The obtained LiPON, being deposited with the fast spatial ALD process, offers ionic conductivity of 1.55 (± 0.14) x 10-7 S/cm and electronic conductivity of 1.86 x 10-13 S/cm, being a promising solid electrolyte layer for next generation lithium-ion batteries.Haverkate, LucasPinto, JoanaRUNZorro, Fátima Alexandra Morais2021-01-31T01:30:23Z2018-11-1520182018-11-15T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/masterThesisapplication/pdfhttp://hdl.handle.net/10362/53593enginfo:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2024-03-11T04:26:23Zoai:run.unl.pt:10362/53593Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-20T03:32:38.482813Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse |
dc.title.none.fl_str_mv |
Spatial atomic layer deposition of LiPON thin films |
title |
Spatial atomic layer deposition of LiPON thin films |
spellingShingle |
Spatial atomic layer deposition of LiPON thin films Zorro, Fátima Alexandra Morais Solid state battery Thin film technology Lithium spatial atomic layer deposition Electrolyte Domínio/Área Científica::Engenharia e Tecnologia::Engenharia dos Materiais |
title_short |
Spatial atomic layer deposition of LiPON thin films |
title_full |
Spatial atomic layer deposition of LiPON thin films |
title_fullStr |
Spatial atomic layer deposition of LiPON thin films |
title_full_unstemmed |
Spatial atomic layer deposition of LiPON thin films |
title_sort |
Spatial atomic layer deposition of LiPON thin films |
author |
Zorro, Fátima Alexandra Morais |
author_facet |
Zorro, Fátima Alexandra Morais |
author_role |
author |
dc.contributor.none.fl_str_mv |
Haverkate, Lucas Pinto, Joana RUN |
dc.contributor.author.fl_str_mv |
Zorro, Fátima Alexandra Morais |
dc.subject.por.fl_str_mv |
Solid state battery Thin film technology Lithium spatial atomic layer deposition Electrolyte Domínio/Área Científica::Engenharia e Tecnologia::Engenharia dos Materiais |
topic |
Solid state battery Thin film technology Lithium spatial atomic layer deposition Electrolyte Domínio/Área Científica::Engenharia e Tecnologia::Engenharia dos Materiais |
description |
In the last few years, with the advance of electrical vehicles and number of devices needing safe batteries especially in the medical field, a more efficient way to store energy is necessary. Despite the fact that conventional lithium batteries present high conductivity values, they do not exhibit enough charging/discharging speed and also include dangerous components to health. To overcome those challenges, thin film solid state batteries are considered a promising candidate. However, this all-solid-state battery concept exhibits too low energy density, pushing the technology towards 3D structures and developing 3D all-solid-state lithium-ion batteries (ASSBs). This thesis describes the development of a pinhole-free solid-state lithium-ion electrolyte through spatial, to pave the way for cost effective and scalable 3D ASSBs. The produced films are thoroughly characterized to find the relation between deposition parameters and film quality in terms of thickness, reproducibility, uniformity, composition and conductivity. The obtained LiPON, being deposited with the fast spatial ALD process, offers ionic conductivity of 1.55 (± 0.14) x 10-7 S/cm and electronic conductivity of 1.86 x 10-13 S/cm, being a promising solid electrolyte layer for next generation lithium-ion batteries. |
publishDate |
2018 |
dc.date.none.fl_str_mv |
2018-11-15 2018 2018-11-15T00:00:00Z 2021-01-31T01:30:23Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/masterThesis |
format |
masterThesis |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/10362/53593 |
url |
http://hdl.handle.net/10362/53593 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
instname_str |
Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
instacron_str |
RCAAP |
institution |
RCAAP |
reponame_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
collection |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository.name.fl_str_mv |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
repository.mail.fl_str_mv |
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1799137947686010880 |