Hybrid multisite silicon neural probe with integrated flexible connector for interchangeable packaging
Autor(a) principal: | |
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Data de Publicação: | 2021 |
Outros Autores: | , , , , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | http://hdl.handle.net/1822/73642 |
Resumo: | Multisite neural probes are a fundamental tool to study brain function. Hybrid silicon/polymer neural probes combine rigid silicon and flexible polymer parts into one single device and allow, for example, the precise integration of complex probe geometries, such as multishank designs, with flexible biocompatible cabling. Despite these advantages and benefiting from highly reproducible fabrication methods on both silicon and polymer substrates, they have not been widely available. This paper presents the development, fabrication, characterization, and in vivo electrophysiological assessment of a hybrid multisite multishank silicon probe with a monolithically integrated polyimide flexible interconnect cable. The fabrication process was optimized at wafer level, and several neural probes with 64 gold electrode sites equally distributed along 8 shanks with an integrated 8 µm thick highly flexible polyimide interconnect cable were produced. The monolithic integration of the polyimide cable in the same fabrication process removed the necessity of the postfabrication bonding of the cable to the probe. This is the highest electrode site density and thinnest flexible cable ever reported for a hybrid silicon/polymer probe. Additionally, to avoid the time-consuming bonding of the probe to definitive packaging, the flexible cable was designed to terminate in a connector pad that can mate with commercial zero-insertion force (ZIF) connectors for electronics interfacing. This allows great experimental flexibility because interchangeable packaging can be used according to experimental demands. High-density distributed in vivo electrophysiological recordings were obtained from the hybrid neural probes with low intrinsic noise and high signal-to-noise ratio (SNR). |
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Hybrid multisite silicon neural probe with integrated flexible connector for interchangeable packagingneural probeneuroMEMSsilicon and polyimide microfabricationflexible interconnect cableinterchangeable packagingsensorimotor cortexin vivo electrophysiologyCiências Médicas::Ciências da SaúdeScience & TechnologyMultisite neural probes are a fundamental tool to study brain function. Hybrid silicon/polymer neural probes combine rigid silicon and flexible polymer parts into one single device and allow, for example, the precise integration of complex probe geometries, such as multishank designs, with flexible biocompatible cabling. Despite these advantages and benefiting from highly reproducible fabrication methods on both silicon and polymer substrates, they have not been widely available. This paper presents the development, fabrication, characterization, and in vivo electrophysiological assessment of a hybrid multisite multishank silicon probe with a monolithically integrated polyimide flexible interconnect cable. The fabrication process was optimized at wafer level, and several neural probes with 64 gold electrode sites equally distributed along 8 shanks with an integrated 8 µm thick highly flexible polyimide interconnect cable were produced. The monolithic integration of the polyimide cable in the same fabrication process removed the necessity of the postfabrication bonding of the cable to the probe. This is the highest electrode site density and thinnest flexible cable ever reported for a hybrid silicon/polymer probe. Additionally, to avoid the time-consuming bonding of the probe to definitive packaging, the flexible cable was designed to terminate in a connector pad that can mate with commercial zero-insertion force (ZIF) connectors for electronics interfacing. This allows great experimental flexibility because interchangeable packaging can be used according to experimental demands. High-density distributed in vivo electrophysiological recordings were obtained from the hybrid neural probes with low intrinsic noise and high signal-to-noise ratio (SNR).This work has been funded by: national funds through the Foundation for Science and Technology (FCT)—projects UIDB/50026/2020 and UIDP/50026/2020; the projects NORTE-01-0145- FEDER-000013 (“PersonalizedNOS—New avenues for the development of personalized medical interventions for neurological, oncologic and surgical disorders”) and NORTE-01-0145-FEDER-000023 (“FROnTHERA—Frontiers of technology for theranostics of cancer, metabolic and neurodegenerative diseases”), supported by Norte Portugal Regional Operational Programme (NORTE 2020), under the PORTUGAL 2020 Partnership Agreement, through the European Regional Development Fund (ERDF); ICVS Scientific Microscopy Platform, member of the national infrastructure PPBI— Portuguese Platform of Bioimaging (PPBI-POCI-01-0145-FEDER-022122); FCT project PTDC/MEDNEU/ 28073/2017 (POCI-01-0145-FEDER-028073); and The Branco Weiss fellowship—Society in Science, (ETH Zurich).Multidisciplinary Digital Publishing InstituteUniversidade do MinhoNovais, AshleyCalaza, CarlosFernandes, JoséFonseca, HelderMonteiro, PatriciaGaspar, JoãoJacinto, Luís Ricardo Monteiro2021-04-082021-04-08T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/73642engNovais, A.; Calaza, C.; Fernandes, J.; Fonseca, H.; Monteiro, P.; Gaspar, J.; Jacinto, L. Hybrid Multisite Silicon Neural Probe with Integrated Flexible Connector for Interchangeable Packaging. Sensors 2021, 21, 2605. https://doi.org/10.3390/s210826051424-82201424-822010.3390/s2108260533917654https://www.mdpi.com/1424-8220/21/8/2605info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:22:10Zoai:repositorium.sdum.uminho.pt:1822/73642Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T19:15:38.137962Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse |
dc.title.none.fl_str_mv |
Hybrid multisite silicon neural probe with integrated flexible connector for interchangeable packaging |
title |
Hybrid multisite silicon neural probe with integrated flexible connector for interchangeable packaging |
spellingShingle |
Hybrid multisite silicon neural probe with integrated flexible connector for interchangeable packaging Novais, Ashley neural probe neuroMEMS silicon and polyimide microfabrication flexible interconnect cable interchangeable packaging sensorimotor cortex in vivo electrophysiology Ciências Médicas::Ciências da Saúde Science & Technology |
title_short |
Hybrid multisite silicon neural probe with integrated flexible connector for interchangeable packaging |
title_full |
Hybrid multisite silicon neural probe with integrated flexible connector for interchangeable packaging |
title_fullStr |
Hybrid multisite silicon neural probe with integrated flexible connector for interchangeable packaging |
title_full_unstemmed |
Hybrid multisite silicon neural probe with integrated flexible connector for interchangeable packaging |
title_sort |
Hybrid multisite silicon neural probe with integrated flexible connector for interchangeable packaging |
author |
Novais, Ashley |
author_facet |
Novais, Ashley Calaza, Carlos Fernandes, José Fonseca, Helder Monteiro, Patricia Gaspar, João Jacinto, Luís Ricardo Monteiro |
author_role |
author |
author2 |
Calaza, Carlos Fernandes, José Fonseca, Helder Monteiro, Patricia Gaspar, João Jacinto, Luís Ricardo Monteiro |
author2_role |
author author author author author author |
dc.contributor.none.fl_str_mv |
Universidade do Minho |
dc.contributor.author.fl_str_mv |
Novais, Ashley Calaza, Carlos Fernandes, José Fonseca, Helder Monteiro, Patricia Gaspar, João Jacinto, Luís Ricardo Monteiro |
dc.subject.por.fl_str_mv |
neural probe neuroMEMS silicon and polyimide microfabrication flexible interconnect cable interchangeable packaging sensorimotor cortex in vivo electrophysiology Ciências Médicas::Ciências da Saúde Science & Technology |
topic |
neural probe neuroMEMS silicon and polyimide microfabrication flexible interconnect cable interchangeable packaging sensorimotor cortex in vivo electrophysiology Ciências Médicas::Ciências da Saúde Science & Technology |
description |
Multisite neural probes are a fundamental tool to study brain function. Hybrid silicon/polymer neural probes combine rigid silicon and flexible polymer parts into one single device and allow, for example, the precise integration of complex probe geometries, such as multishank designs, with flexible biocompatible cabling. Despite these advantages and benefiting from highly reproducible fabrication methods on both silicon and polymer substrates, they have not been widely available. This paper presents the development, fabrication, characterization, and in vivo electrophysiological assessment of a hybrid multisite multishank silicon probe with a monolithically integrated polyimide flexible interconnect cable. The fabrication process was optimized at wafer level, and several neural probes with 64 gold electrode sites equally distributed along 8 shanks with an integrated 8 µm thick highly flexible polyimide interconnect cable were produced. The monolithic integration of the polyimide cable in the same fabrication process removed the necessity of the postfabrication bonding of the cable to the probe. This is the highest electrode site density and thinnest flexible cable ever reported for a hybrid silicon/polymer probe. Additionally, to avoid the time-consuming bonding of the probe to definitive packaging, the flexible cable was designed to terminate in a connector pad that can mate with commercial zero-insertion force (ZIF) connectors for electronics interfacing. This allows great experimental flexibility because interchangeable packaging can be used according to experimental demands. High-density distributed in vivo electrophysiological recordings were obtained from the hybrid neural probes with low intrinsic noise and high signal-to-noise ratio (SNR). |
publishDate |
2021 |
dc.date.none.fl_str_mv |
2021-04-08 2021-04-08T00:00:00Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/1822/73642 |
url |
http://hdl.handle.net/1822/73642 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
Novais, A.; Calaza, C.; Fernandes, J.; Fonseca, H.; Monteiro, P.; Gaspar, J.; Jacinto, L. Hybrid Multisite Silicon Neural Probe with Integrated Flexible Connector for Interchangeable Packaging. Sensors 2021, 21, 2605. https://doi.org/10.3390/s21082605 1424-8220 1424-8220 10.3390/s21082605 33917654 https://www.mdpi.com/1424-8220/21/8/2605 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.publisher.none.fl_str_mv |
Multidisciplinary Digital Publishing Institute |
publisher.none.fl_str_mv |
Multidisciplinary Digital Publishing Institute |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
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Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
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RCAAP |
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RCAAP |
reponame_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
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Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
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Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
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