Fracture strength and fatigue endurance in Gd-doped ceria thermal actuators
Autor(a) principal: | |
---|---|
Data de Publicação: | 2020 |
Outros Autores: | , , , , , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | http://hdl.handle.net/10773/37219 |
Resumo: | We studied the stability of the mechanical properties and the fatigue endurance of Gd-doped ceria (CGO), which is a promising electromechanically active material for microelectromechanical systems (MEMS). Specifically, the fracture strength and long-term operation of plate-type circular (2 mm diameter) thermal actuators made of ≈1.15 μm thick Ce0.95Gd0.05O1.975 (CGO5) were investigated. Excitation voltage of 10 V at the frequency range between 1 and 2.1 MHz induces Joule heating effect that can generate an in-plane strain of ≈0.1 %. The operation temperature ranged from 25 °C to 80 °C and the temperature shift, caused by the AC heating, was about 80 K at 10 V. Critical fracture was found to occur at out-of-plane displacements between ∼35 and ∼42 μm, which corresponds to the average bending stress of ∼44 MPa at the center of the plate. During long-term operation, the actuators exhibit gradual decrease in the response, probably due to contact degradation. However, structural damage or mechanical fatigue was not found even after 107 cycles at a stress level of ∼30 % of the critical fracture strength. |
id |
RCAP_56c0c1973a8438aa7007d3221cd693f5 |
---|---|
oai_identifier_str |
oai:ria.ua.pt:10773/37219 |
network_acronym_str |
RCAP |
network_name_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository_id_str |
7160 |
spelling |
Fracture strength and fatigue endurance in Gd-doped ceria thermal actuatorsMEMSActuatorDoped ceriaFatigueWe studied the stability of the mechanical properties and the fatigue endurance of Gd-doped ceria (CGO), which is a promising electromechanically active material for microelectromechanical systems (MEMS). Specifically, the fracture strength and long-term operation of plate-type circular (2 mm diameter) thermal actuators made of ≈1.15 μm thick Ce0.95Gd0.05O1.975 (CGO5) were investigated. Excitation voltage of 10 V at the frequency range between 1 and 2.1 MHz induces Joule heating effect that can generate an in-plane strain of ≈0.1 %. The operation temperature ranged from 25 °C to 80 °C and the temperature shift, caused by the AC heating, was about 80 K at 10 V. Critical fracture was found to occur at out-of-plane displacements between ∼35 and ∼42 μm, which corresponds to the average bending stress of ∼44 MPa at the center of the plate. During long-term operation, the actuators exhibit gradual decrease in the response, probably due to contact degradation. However, structural damage or mechanical fatigue was not found even after 107 cycles at a stress level of ∼30 % of the critical fracture strength.Elsevier2023-04-20T11:06:36Z2020-04-01T00:00:00Z2020-04-01info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/10773/37219eng0924-424710.1016/j.sna.2020.111885Mishuk, EranUshakov, AndreiShklovsky, JennyKrylov, SlavaShacham-Diamand, YosiShur, Vladimir Ya.Kholkin, AndreiLubomirsky, Igorinfo:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2024-02-22T12:11:47Zoai:ria.ua.pt:10773/37219Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-20T03:07:50.715212Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse |
dc.title.none.fl_str_mv |
Fracture strength and fatigue endurance in Gd-doped ceria thermal actuators |
title |
Fracture strength and fatigue endurance in Gd-doped ceria thermal actuators |
spellingShingle |
Fracture strength and fatigue endurance in Gd-doped ceria thermal actuators Mishuk, Eran MEMS Actuator Doped ceria Fatigue |
title_short |
Fracture strength and fatigue endurance in Gd-doped ceria thermal actuators |
title_full |
Fracture strength and fatigue endurance in Gd-doped ceria thermal actuators |
title_fullStr |
Fracture strength and fatigue endurance in Gd-doped ceria thermal actuators |
title_full_unstemmed |
Fracture strength and fatigue endurance in Gd-doped ceria thermal actuators |
title_sort |
Fracture strength and fatigue endurance in Gd-doped ceria thermal actuators |
author |
Mishuk, Eran |
author_facet |
Mishuk, Eran Ushakov, Andrei Shklovsky, Jenny Krylov, Slava Shacham-Diamand, Yosi Shur, Vladimir Ya. Kholkin, Andrei Lubomirsky, Igor |
author_role |
author |
author2 |
Ushakov, Andrei Shklovsky, Jenny Krylov, Slava Shacham-Diamand, Yosi Shur, Vladimir Ya. Kholkin, Andrei Lubomirsky, Igor |
author2_role |
author author author author author author author |
dc.contributor.author.fl_str_mv |
Mishuk, Eran Ushakov, Andrei Shklovsky, Jenny Krylov, Slava Shacham-Diamand, Yosi Shur, Vladimir Ya. Kholkin, Andrei Lubomirsky, Igor |
dc.subject.por.fl_str_mv |
MEMS Actuator Doped ceria Fatigue |
topic |
MEMS Actuator Doped ceria Fatigue |
description |
We studied the stability of the mechanical properties and the fatigue endurance of Gd-doped ceria (CGO), which is a promising electromechanically active material for microelectromechanical systems (MEMS). Specifically, the fracture strength and long-term operation of plate-type circular (2 mm diameter) thermal actuators made of ≈1.15 μm thick Ce0.95Gd0.05O1.975 (CGO5) were investigated. Excitation voltage of 10 V at the frequency range between 1 and 2.1 MHz induces Joule heating effect that can generate an in-plane strain of ≈0.1 %. The operation temperature ranged from 25 °C to 80 °C and the temperature shift, caused by the AC heating, was about 80 K at 10 V. Critical fracture was found to occur at out-of-plane displacements between ∼35 and ∼42 μm, which corresponds to the average bending stress of ∼44 MPa at the center of the plate. During long-term operation, the actuators exhibit gradual decrease in the response, probably due to contact degradation. However, structural damage or mechanical fatigue was not found even after 107 cycles at a stress level of ∼30 % of the critical fracture strength. |
publishDate |
2020 |
dc.date.none.fl_str_mv |
2020-04-01T00:00:00Z 2020-04-01 2023-04-20T11:06:36Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/10773/37219 |
url |
http://hdl.handle.net/10773/37219 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
0924-4247 10.1016/j.sna.2020.111885 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.publisher.none.fl_str_mv |
Elsevier |
publisher.none.fl_str_mv |
Elsevier |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
instname_str |
Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
instacron_str |
RCAAP |
institution |
RCAAP |
reponame_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
collection |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository.name.fl_str_mv |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
repository.mail.fl_str_mv |
|
_version_ |
1799137732490952704 |