Development of an inductive heating system for the graphene synthesis by cold wall CVD

• Autor(a) principal: Moura, Jorge Pedro Amaral Duarte de
• Data de Publicação: 2019
• Tipo de documento: Dissertação
• Idioma: eng
• Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
• Texto Completo: http://hdl.handle.net/10773/27754
• topic: Graphene; Chemical Vapour Deposition; Cold Wall Reactor; COMSOL; Electromagnetic Induction; Optical Pyrometry

Since it was firstly isolated, graphene has become one of the most researched nano materials, due to its exciting physical and chemical properties, namely the nearly ballistic transport and high charge mobility, optical transparency and extreme mechanical behaviour, meeting a plethora of application fields. However, the industrial mass-production is still to overcome, and a multitude of growing processes evolved as an effort to reach this objective. Fast, controlled and scalable growth of single crystalline graphene in a continuous process are the basic guidelines for an ideal synthesis process, that the Chemical Vapour Deposition (CVD) technique can offer. This work settles on the exploitation of Cold Wall CVD by designing, developing and testing an electromagnetic inductively assisted CVD system. This approach proved to enable rapid and controlled heating curves, allowing for sample suspension inside the reactor tube, permitting an operation based on optical pyrometric monitoring of the temperature as a key parameter for the growth process. Using this system, high quality single layer graphene domains with well-defined hexagonal shape were obtained, as confirmed by Raman spectroscopy and scanning electron microscopy. The present work contributes with an effort towards an understanding of graphene growth mechanisms in order to accurately control the substrate temperature, a key growth parameter.