Elastic properties of (Ti,Al,Si)N nanocomposite films

Detalhes bibliográficos
Autor(a) principal: Carvalho, S.
Data de Publicação: 2001
Outros Autores: Vaz, F., Rebouta, L., Schneider, D., Cavaleiro, A., Alves, E.
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/10316/4292
https://doi.org/10.1016/S0257-8972(01)01242-7
Resumo: (Ti,Al,Si)N films have been prepared by d.c. and rf reactive magnetron sputtering, with Si contents in the range 2-11 at.% and Al contents between 4 and 19 at.%. Samples prepared in rotation mode (three magnetrons) presented densities between 4.0 and 4.6 g/cm3, while samples prepared in static mode (magnetron with Ti target with small pieces of Si and Al) displayed densities mainly in the range 3.0-3.9 g/cm3. For comparison purposes, the evaluation of Young's modulus was performed by both depth-sensing indentation and surface acoustic wave (SAW) techniques. Indentation results revealed systematically higher values than those obtained by SAW. These discrepancies might be related with the relatively low density of the films. Hardness values of approximately 60 GPa were obtained with samples with a composition of approximately 28.5 at.% titanium, 12 at.% aluminium, 9.5 at.% silicon and 50 at.% nitrogen. XRD patterns showed the presence of two different crystalline phases, as in the case of (Ti,Si)N films. One is assigned to TiN phase (lattice parameter of approx. 0.429 nm) and the second, the so-called solid solution which is developed in situations of low surface mobility, revealed a lattice parameter (0.419 nm) slightly lower than that of bulk TiN.
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spelling Elastic properties of (Ti,Al,Si)N nanocomposite filmsSuperhard coatingsYoung's modulusTi-Al-Si-NElastic modulus(Ti,Al,Si)N films have been prepared by d.c. and rf reactive magnetron sputtering, with Si contents in the range 2-11 at.% and Al contents between 4 and 19 at.%. Samples prepared in rotation mode (three magnetrons) presented densities between 4.0 and 4.6 g/cm3, while samples prepared in static mode (magnetron with Ti target with small pieces of Si and Al) displayed densities mainly in the range 3.0-3.9 g/cm3. For comparison purposes, the evaluation of Young's modulus was performed by both depth-sensing indentation and surface acoustic wave (SAW) techniques. Indentation results revealed systematically higher values than those obtained by SAW. These discrepancies might be related with the relatively low density of the films. Hardness values of approximately 60 GPa were obtained with samples with a composition of approximately 28.5 at.% titanium, 12 at.% aluminium, 9.5 at.% silicon and 50 at.% nitrogen. XRD patterns showed the presence of two different crystalline phases, as in the case of (Ti,Si)N films. One is assigned to TiN phase (lattice parameter of approx. 0.429 nm) and the second, the so-called solid solution which is developed in situations of low surface mobility, revealed a lattice parameter (0.419 nm) slightly lower than that of bulk TiN.http://www.sciencedirect.com/science/article/B6TVV-43WTXCV-N/1/19b034221f9e7e8378dbcc26ff46ca102001info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleaplication/PDFhttp://hdl.handle.net/10316/4292http://hdl.handle.net/10316/4292https://doi.org/10.1016/S0257-8972(01)01242-7engSurface and Coatings Technology. 142-144:(2001) 110-116Carvalho, S.Vaz, F.Rebouta, L.Schneider, D.Cavaleiro, A.Alves, E.info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2021-08-18T09:22:53Zoai:estudogeral.uc.pt:10316/4292Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T20:58:29.401317Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv Elastic properties of (Ti,Al,Si)N nanocomposite films
title Elastic properties of (Ti,Al,Si)N nanocomposite films
spellingShingle Elastic properties of (Ti,Al,Si)N nanocomposite films
Carvalho, S.
Superhard coatings
Young's modulus
Ti-Al-Si-N
Elastic modulus
title_short Elastic properties of (Ti,Al,Si)N nanocomposite films
title_full Elastic properties of (Ti,Al,Si)N nanocomposite films
title_fullStr Elastic properties of (Ti,Al,Si)N nanocomposite films
title_full_unstemmed Elastic properties of (Ti,Al,Si)N nanocomposite films
title_sort Elastic properties of (Ti,Al,Si)N nanocomposite films
author Carvalho, S.
author_facet Carvalho, S.
Vaz, F.
Rebouta, L.
Schneider, D.
Cavaleiro, A.
Alves, E.
author_role author
author2 Vaz, F.
Rebouta, L.
Schneider, D.
Cavaleiro, A.
Alves, E.
author2_role author
author
author
author
author
dc.contributor.author.fl_str_mv Carvalho, S.
Vaz, F.
Rebouta, L.
Schneider, D.
Cavaleiro, A.
Alves, E.
dc.subject.por.fl_str_mv Superhard coatings
Young's modulus
Ti-Al-Si-N
Elastic modulus
topic Superhard coatings
Young's modulus
Ti-Al-Si-N
Elastic modulus
description (Ti,Al,Si)N films have been prepared by d.c. and rf reactive magnetron sputtering, with Si contents in the range 2-11 at.% and Al contents between 4 and 19 at.%. Samples prepared in rotation mode (three magnetrons) presented densities between 4.0 and 4.6 g/cm3, while samples prepared in static mode (magnetron with Ti target with small pieces of Si and Al) displayed densities mainly in the range 3.0-3.9 g/cm3. For comparison purposes, the evaluation of Young's modulus was performed by both depth-sensing indentation and surface acoustic wave (SAW) techniques. Indentation results revealed systematically higher values than those obtained by SAW. These discrepancies might be related with the relatively low density of the films. Hardness values of approximately 60 GPa were obtained with samples with a composition of approximately 28.5 at.% titanium, 12 at.% aluminium, 9.5 at.% silicon and 50 at.% nitrogen. XRD patterns showed the presence of two different crystalline phases, as in the case of (Ti,Si)N films. One is assigned to TiN phase (lattice parameter of approx. 0.429 nm) and the second, the so-called solid solution which is developed in situations of low surface mobility, revealed a lattice parameter (0.419 nm) slightly lower than that of bulk TiN.
publishDate 2001
dc.date.none.fl_str_mv 2001
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dc.identifier.uri.fl_str_mv http://hdl.handle.net/10316/4292
http://hdl.handle.net/10316/4292
https://doi.org/10.1016/S0257-8972(01)01242-7
url http://hdl.handle.net/10316/4292
https://doi.org/10.1016/S0257-8972(01)01242-7
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv Surface and Coatings Technology. 142-144:(2001) 110-116
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eu_rights_str_mv openAccess
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