A miniaturized self-calibrated pyrometer microsystem
Autor(a) principal: | |
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Data de Publicação: | 2003 |
Outros Autores: | , , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | http://hdl.handle.net/1822/4453 |
Resumo: | paper describes the design, modeling and optimization of a miniaturized self-calibrated pyrometer to detect infrared radiation (in 5-20 µm range of wavelengths) in order to measure the real temperature of objects without contact. The microsystem consists of a thermally insulated absorbing area and two thermopiles with the hot junctions in the absorbing area and the cold junctions on a heat sink (i.e. the silicon bulk). The complete microsystem is in silicon planar technology and each thermopile has a different reference temperature, biased by a Peltier microstructure near to the cold junction of the thermopile. A silicon die passivated with a silicon nitride membrane is the ground floor of all microsystem. The absorbing area, a black gold strip on the silicon nitride membrane is obtained by anisotropic etching of the bulk silicon from the back of the wafer. The pyrometer microsystem is composed by: the IR optical filter on the top, the electronic system built in CMOS technology added by Multi-Chip-Module (MCM) techniques and the pyrometer. Application of a network of pyrometers in textile industry is the final goal. |
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A miniaturized self-calibrated pyrometer microsystemMicropyrometerIR radiationThermopilePeltierpaper describes the design, modeling and optimization of a miniaturized self-calibrated pyrometer to detect infrared radiation (in 5-20 µm range of wavelengths) in order to measure the real temperature of objects without contact. The microsystem consists of a thermally insulated absorbing area and two thermopiles with the hot junctions in the absorbing area and the cold junctions on a heat sink (i.e. the silicon bulk). The complete microsystem is in silicon planar technology and each thermopile has a different reference temperature, biased by a Peltier microstructure near to the cold junction of the thermopile. A silicon die passivated with a silicon nitride membrane is the ground floor of all microsystem. The absorbing area, a black gold strip on the silicon nitride membrane is obtained by anisotropic etching of the bulk silicon from the back of the wafer. The pyrometer microsystem is composed by: the IR optical filter on the top, the electronic system built in CMOS technology added by Multi-Chip-Module (MCM) techniques and the pyrometer. Application of a network of pyrometers in textile industry is the final goal.Fundação para a Ciência e a Tecnologia (FCT)Universidade do MinhoUniversidade do MinhoGonçalves, L. M.Gomes, L. G.Ribeiro, S. F.Couto, CarlosCorreia, J. H.2003-092003-09-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/4453engEUROSENSORS, 17, Guimarães, 2003 – “Eurosensors : proceedings of the european conference on solid-state transducers”. [Guimarães]: Universidade do Minho, 2003. ISBN 972-98603-1-9. p. 568-569.972-98603-1-9info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:49:07Zoai:repositorium.sdum.uminho.pt:1822/4453Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T19:47:31.693772Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse |
dc.title.none.fl_str_mv |
A miniaturized self-calibrated pyrometer microsystem |
title |
A miniaturized self-calibrated pyrometer microsystem |
spellingShingle |
A miniaturized self-calibrated pyrometer microsystem Gonçalves, L. M. Micropyrometer IR radiation Thermopile Peltier |
title_short |
A miniaturized self-calibrated pyrometer microsystem |
title_full |
A miniaturized self-calibrated pyrometer microsystem |
title_fullStr |
A miniaturized self-calibrated pyrometer microsystem |
title_full_unstemmed |
A miniaturized self-calibrated pyrometer microsystem |
title_sort |
A miniaturized self-calibrated pyrometer microsystem |
author |
Gonçalves, L. M. |
author_facet |
Gonçalves, L. M. Gomes, L. G. Ribeiro, S. F. Couto, Carlos Correia, J. H. |
author_role |
author |
author2 |
Gomes, L. G. Ribeiro, S. F. Couto, Carlos Correia, J. H. |
author2_role |
author author author author |
dc.contributor.none.fl_str_mv |
Universidade do Minho |
dc.contributor.author.fl_str_mv |
Gonçalves, L. M. Gomes, L. G. Ribeiro, S. F. Couto, Carlos Correia, J. H. |
dc.subject.por.fl_str_mv |
Micropyrometer IR radiation Thermopile Peltier |
topic |
Micropyrometer IR radiation Thermopile Peltier |
description |
paper describes the design, modeling and optimization of a miniaturized self-calibrated pyrometer to detect infrared radiation (in 5-20 µm range of wavelengths) in order to measure the real temperature of objects without contact. The microsystem consists of a thermally insulated absorbing area and two thermopiles with the hot junctions in the absorbing area and the cold junctions on a heat sink (i.e. the silicon bulk). The complete microsystem is in silicon planar technology and each thermopile has a different reference temperature, biased by a Peltier microstructure near to the cold junction of the thermopile. A silicon die passivated with a silicon nitride membrane is the ground floor of all microsystem. The absorbing area, a black gold strip on the silicon nitride membrane is obtained by anisotropic etching of the bulk silicon from the back of the wafer. The pyrometer microsystem is composed by: the IR optical filter on the top, the electronic system built in CMOS technology added by Multi-Chip-Module (MCM) techniques and the pyrometer. Application of a network of pyrometers in textile industry is the final goal. |
publishDate |
2003 |
dc.date.none.fl_str_mv |
2003-09 2003-09-01T00:00:00Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/1822/4453 |
url |
http://hdl.handle.net/1822/4453 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
EUROSENSORS, 17, Guimarães, 2003 – “Eurosensors : proceedings of the european conference on solid-state transducers”. [Guimarães]: Universidade do Minho, 2003. ISBN 972-98603-1-9. p. 568-569. 972-98603-1-9 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.publisher.none.fl_str_mv |
Universidade do Minho |
publisher.none.fl_str_mv |
Universidade do Minho |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
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Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
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RCAAP |
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RCAAP |
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Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
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Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
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Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
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1799133049358647296 |