Development of highly sensitive temperature microsensors for localized measurements

Detalhes bibliográficos
Autor(a) principal: Sousa, Paulo Jorge Teixeira
Data de Publicação: 2021
Outros Autores: Pinto, Vânia Cristina Gonçalves, Magalhães, Vítor Hugo Vilela, Rodrigues, Raquel Oliveira, Sousa, Patrícia C., Minas, Graça
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/1822/73856
Resumo: This paper presents the design, fabrication and characterization of temperature microsensors based on Resistance Temperature Detectors (RTDs) with a meander-shaped geometry. Numerical simulations were performed for studying the sensitivity of the RTDs according to their windings numbers as well as for optimizing their layout. These RTDs were fabricated using well-established microfabrication and photolithographic techniques. The fabricated sensors feature high sensitivity (0.3542 mV/°C), linearity and reproducibility in a temperature range of 35 to 45 °C. Additionally, each sensor has a small size with a strong potential for their integration in microfluidic devices, as organ-on-a-chip, allowing the possibility for in-situ monitoring the physiochemical properties of the cellular microenvironment.
id RCAP_8ef9e66ba92e69316978aa4cab1f432a
oai_identifier_str oai:repositorium.sdum.uminho.pt:1822/73856
network_acronym_str RCAP
network_name_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository_id_str 7160
spelling Development of highly sensitive temperature microsensors for localized measurementsMiniaturized RTD sensorsMicrofluidic devicesMicrofabricationPlatinum thin-film depositionScience & TechnologyThis paper presents the design, fabrication and characterization of temperature microsensors based on Resistance Temperature Detectors (RTDs) with a meander-shaped geometry. Numerical simulations were performed for studying the sensitivity of the RTDs according to their windings numbers as well as for optimizing their layout. These RTDs were fabricated using well-established microfabrication and photolithographic techniques. The fabricated sensors feature high sensitivity (0.3542 mV/°C), linearity and reproducibility in a temperature range of 35 to 45 °C. Additionally, each sensor has a small size with a strong potential for their integration in microfluidic devices, as organ-on-a-chip, allowing the possibility for in-situ monitoring the physiochemical properties of the cellular microenvironment.This work is the result of the project NORTE-01-0145-FEDER-029394, RTChip4Theranostics, and was supported by Programa Operacional Regional do Norte–Norte Portugal Regional Operational Programme (NORTE 2020), under the PORTUGAL 2020 Partnership Agreement through the European Regional Development Fund (FEDER) and by Fundação para a Ciência e Tecnologia (FCT), IP, project reference PTDC/EMD-EMD/29394/2017. The authors also acknowledge the partial financial support by the projects UIDB/04436/2020 and UIDP/04436/2020.Multidisciplinary Digital Publishing InstituteUniversidade do MinhoSousa, Paulo Jorge TeixeiraPinto, Vânia Cristina GonçalvesMagalhães, Vítor Hugo VilelaRodrigues, Raquel OliveiraSousa, Patrícia C.Minas, Graça2021-04-242021-04-24T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/73856engSousa, P.J.; Pinto, V.C.; Magalhães, V.H.; Rodrigues, R.O.; Sousa, P.C.; Minas, G. Development of Highly Sensitive Temperature Microsensors for Localized Measurements. Appl. Sci. 2021, 11, 3864. https://doi.org/10.3390/app110938642076-341710.3390/app11093864https://www.mdpi.com/2076-3417/11/9/3864info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:28:23Zoai:repositorium.sdum.uminho.pt:1822/73856Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T19:23:10.760329Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv Development of highly sensitive temperature microsensors for localized measurements
title Development of highly sensitive temperature microsensors for localized measurements
spellingShingle Development of highly sensitive temperature microsensors for localized measurements
Sousa, Paulo Jorge Teixeira
Miniaturized RTD sensors
Microfluidic devices
Microfabrication
Platinum thin-film deposition
Science & Technology
title_short Development of highly sensitive temperature microsensors for localized measurements
title_full Development of highly sensitive temperature microsensors for localized measurements
title_fullStr Development of highly sensitive temperature microsensors for localized measurements
title_full_unstemmed Development of highly sensitive temperature microsensors for localized measurements
title_sort Development of highly sensitive temperature microsensors for localized measurements
author Sousa, Paulo Jorge Teixeira
author_facet Sousa, Paulo Jorge Teixeira
Pinto, Vânia Cristina Gonçalves
Magalhães, Vítor Hugo Vilela
Rodrigues, Raquel Oliveira
Sousa, Patrícia C.
Minas, Graça
author_role author
author2 Pinto, Vânia Cristina Gonçalves
Magalhães, Vítor Hugo Vilela
Rodrigues, Raquel Oliveira
Sousa, Patrícia C.
Minas, Graça
author2_role author
author
author
author
author
dc.contributor.none.fl_str_mv Universidade do Minho
dc.contributor.author.fl_str_mv Sousa, Paulo Jorge Teixeira
Pinto, Vânia Cristina Gonçalves
Magalhães, Vítor Hugo Vilela
Rodrigues, Raquel Oliveira
Sousa, Patrícia C.
Minas, Graça
dc.subject.por.fl_str_mv Miniaturized RTD sensors
Microfluidic devices
Microfabrication
Platinum thin-film deposition
Science & Technology
topic Miniaturized RTD sensors
Microfluidic devices
Microfabrication
Platinum thin-film deposition
Science & Technology
description This paper presents the design, fabrication and characterization of temperature microsensors based on Resistance Temperature Detectors (RTDs) with a meander-shaped geometry. Numerical simulations were performed for studying the sensitivity of the RTDs according to their windings numbers as well as for optimizing their layout. These RTDs were fabricated using well-established microfabrication and photolithographic techniques. The fabricated sensors feature high sensitivity (0.3542 mV/°C), linearity and reproducibility in a temperature range of 35 to 45 °C. Additionally, each sensor has a small size with a strong potential for their integration in microfluidic devices, as organ-on-a-chip, allowing the possibility for in-situ monitoring the physiochemical properties of the cellular microenvironment.
publishDate 2021
dc.date.none.fl_str_mv 2021-04-24
2021-04-24T00:00:00Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/1822/73856
url http://hdl.handle.net/1822/73856
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv Sousa, P.J.; Pinto, V.C.; Magalhães, V.H.; Rodrigues, R.O.; Sousa, P.C.; Minas, G. Development of Highly Sensitive Temperature Microsensors for Localized Measurements. Appl. Sci. 2021, 11, 3864. https://doi.org/10.3390/app11093864
2076-3417
10.3390/app11093864
https://www.mdpi.com/2076-3417/11/9/3864
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Multidisciplinary Digital Publishing Institute
publisher.none.fl_str_mv Multidisciplinary Digital Publishing Institute
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
repository.mail.fl_str_mv
_version_ 1799132705569374208

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