Structural and mechanical properties of nanocrystalline Zr co-sputtered a-C(:H) amorphous films
Autor(a) principal: | |
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Data de Publicação: | 2014 |
Outros Autores: | , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | http://hdl.handle.net/10316/27750 https://doi.org/10.1016/j.apsusc.2014.11.015 |
Resumo: | The aim of this study was to investigate the effect of Zr as alloying element to carbon films, particularly in respect to film structure and mechanical properties. The films were deposited by magnetron sputtering in reactive (Ar + CH4) and non-reactive (Ar) atmosphere with different Zr contents (from 0 to 14 at.%) in order to achieve a nanocomposite based films. With an increase of Zr content a broad peak was observed in X-ray diffraction spectra suggesting the presence of nanocrystalline (nc) ZrC phase for the coatings with Zr content higher than 4 at.%. The application of Scherrer formula yielded a grain sizes with a dimension of 1.0–2.2 nm. These results were supported by X-ray photoelectron spectroscopy showing typical charge transfer at Zr-C nanograins and carbon matrix interface. The nc-ZrC phase was also observed by transmission electron microscopy. The hardness of the coatings was approximately independent of Zr content. However, the Young modulus increased linearly. The residual stress of the coatings was strongly improved by the presence of nc-ZrC phase embedded in the a-C matrix. Finally, the incorporation of H into the matrix led to denser and harder films. |
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Structural and mechanical properties of nanocrystalline Zr co-sputtered a-C(:H) amorphous filmsNanocrystalline ZrCAmorphous carbonXPSZrC/a-C(:H)The aim of this study was to investigate the effect of Zr as alloying element to carbon films, particularly in respect to film structure and mechanical properties. The films were deposited by magnetron sputtering in reactive (Ar + CH4) and non-reactive (Ar) atmosphere with different Zr contents (from 0 to 14 at.%) in order to achieve a nanocomposite based films. With an increase of Zr content a broad peak was observed in X-ray diffraction spectra suggesting the presence of nanocrystalline (nc) ZrC phase for the coatings with Zr content higher than 4 at.%. The application of Scherrer formula yielded a grain sizes with a dimension of 1.0–2.2 nm. These results were supported by X-ray photoelectron spectroscopy showing typical charge transfer at Zr-C nanograins and carbon matrix interface. The nc-ZrC phase was also observed by transmission electron microscopy. The hardness of the coatings was approximately independent of Zr content. However, the Young modulus increased linearly. The residual stress of the coatings was strongly improved by the presence of nc-ZrC phase embedded in the a-C matrix. Finally, the incorporation of H into the matrix led to denser and harder films.Elsevier2014-11info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articlehttp://hdl.handle.net/10316/27750http://hdl.handle.net/10316/27750https://doi.org/10.1016/j.apsusc.2014.11.015engESCUDEIRO, A. [et al.] - Structural and mechanical properties of nanocrystalline Zr co-sputtered a-C(:H) amorphous films. "Applied Surface Science". ISSN 0169-4332 (2014)0169-4332http://www.sciencedirect.com/science/article/pii/S0169433214024702Escudeiro, A.Figueiredo, N. M.Polcar, T.Cavaleiro, A.info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2020-05-29T09:42:32Zoai:estudogeral.uc.pt:10316/27750Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T20:50:17.282351Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse |
dc.title.none.fl_str_mv |
Structural and mechanical properties of nanocrystalline Zr co-sputtered a-C(:H) amorphous films |
title |
Structural and mechanical properties of nanocrystalline Zr co-sputtered a-C(:H) amorphous films |
spellingShingle |
Structural and mechanical properties of nanocrystalline Zr co-sputtered a-C(:H) amorphous films Escudeiro, A. Nanocrystalline ZrC Amorphous carbon XPS ZrC/a-C(:H) |
title_short |
Structural and mechanical properties of nanocrystalline Zr co-sputtered a-C(:H) amorphous films |
title_full |
Structural and mechanical properties of nanocrystalline Zr co-sputtered a-C(:H) amorphous films |
title_fullStr |
Structural and mechanical properties of nanocrystalline Zr co-sputtered a-C(:H) amorphous films |
title_full_unstemmed |
Structural and mechanical properties of nanocrystalline Zr co-sputtered a-C(:H) amorphous films |
title_sort |
Structural and mechanical properties of nanocrystalline Zr co-sputtered a-C(:H) amorphous films |
author |
Escudeiro, A. |
author_facet |
Escudeiro, A. Figueiredo, N. M. Polcar, T. Cavaleiro, A. |
author_role |
author |
author2 |
Figueiredo, N. M. Polcar, T. Cavaleiro, A. |
author2_role |
author author author |
dc.contributor.author.fl_str_mv |
Escudeiro, A. Figueiredo, N. M. Polcar, T. Cavaleiro, A. |
dc.subject.por.fl_str_mv |
Nanocrystalline ZrC Amorphous carbon XPS ZrC/a-C(:H) |
topic |
Nanocrystalline ZrC Amorphous carbon XPS ZrC/a-C(:H) |
description |
The aim of this study was to investigate the effect of Zr as alloying element to carbon films, particularly in respect to film structure and mechanical properties. The films were deposited by magnetron sputtering in reactive (Ar + CH4) and non-reactive (Ar) atmosphere with different Zr contents (from 0 to 14 at.%) in order to achieve a nanocomposite based films. With an increase of Zr content a broad peak was observed in X-ray diffraction spectra suggesting the presence of nanocrystalline (nc) ZrC phase for the coatings with Zr content higher than 4 at.%. The application of Scherrer formula yielded a grain sizes with a dimension of 1.0–2.2 nm. These results were supported by X-ray photoelectron spectroscopy showing typical charge transfer at Zr-C nanograins and carbon matrix interface. The nc-ZrC phase was also observed by transmission electron microscopy. The hardness of the coatings was approximately independent of Zr content. However, the Young modulus increased linearly. The residual stress of the coatings was strongly improved by the presence of nc-ZrC phase embedded in the a-C matrix. Finally, the incorporation of H into the matrix led to denser and harder films. |
publishDate |
2014 |
dc.date.none.fl_str_mv |
2014-11 |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/10316/27750 http://hdl.handle.net/10316/27750 https://doi.org/10.1016/j.apsusc.2014.11.015 |
url |
http://hdl.handle.net/10316/27750 https://doi.org/10.1016/j.apsusc.2014.11.015 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
ESCUDEIRO, A. [et al.] - Structural and mechanical properties of nanocrystalline Zr co-sputtered a-C(:H) amorphous films. "Applied Surface Science". ISSN 0169-4332 (2014) 0169-4332 http://www.sciencedirect.com/science/article/pii/S0169433214024702 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.publisher.none.fl_str_mv |
Elsevier |
publisher.none.fl_str_mv |
Elsevier |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
instname_str |
Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
instacron_str |
RCAAP |
institution |
RCAAP |
reponame_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
collection |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository.name.fl_str_mv |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
repository.mail.fl_str_mv |
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1799133784536252416 |