Low temperature processing of doped indium oxide thin films for electronic applications
Autor(a) principal: | |
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Data de Publicação: | 2023 |
Tipo de documento: | Dissertação |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | http://hdl.handle.net/10362/164011 |
Resumo: | Transparent conducting oxides (TCOs) are critical components in the operation of sev-eral optoelectronic devices as well as transparent electronics. One of the most widely used, indium tin oxide (ITO), requires very expensive equipment and controlled conditions to be deposited. Solution combustion synthesis (SCS) is a simple and low-cost method being stud-ied to produce the same oxides. Thin films of indium oxide doped with hafnium produced by SCS have already shown very promising properties when annealed at 400 °C. This work will study the viability of producing these same films at even lower temperatures, enough to en-able the use of flexible substrates. TCO thin films were produced at low temperature such as 200 °C by using an infrared (IR) oven instead of the typical hotplate annealing. A 0.5 M % Hf-doped In2O3 thin film annealed at 350 °C with an IR oven achieved the best properties with a bulk resistivity of 1.3 × 10-1 Ω·cm, mobility of 1.33 cm2/Vs, carrier concentration of 3.6 × 1019 cm-3. These results were even better when compared with high annealing temperatures. As proof of concept this TCO was successfully implemented in a liquid crystal cell and electro-chromic device showing their potential for real applications. |
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Low temperature processing of doped indium oxide thin films for electronic applicationsTransparent conducting oxidesolution combustion synthesisindium oxidehafni-um dopantlow temperatureinfrared ovenDomínio/Área Científica::Engenharia e Tecnologia::NanotecnologiaTransparent conducting oxides (TCOs) are critical components in the operation of sev-eral optoelectronic devices as well as transparent electronics. One of the most widely used, indium tin oxide (ITO), requires very expensive equipment and controlled conditions to be deposited. Solution combustion synthesis (SCS) is a simple and low-cost method being stud-ied to produce the same oxides. Thin films of indium oxide doped with hafnium produced by SCS have already shown very promising properties when annealed at 400 °C. This work will study the viability of producing these same films at even lower temperatures, enough to en-able the use of flexible substrates. TCO thin films were produced at low temperature such as 200 °C by using an infrared (IR) oven instead of the typical hotplate annealing. A 0.5 M % Hf-doped In2O3 thin film annealed at 350 °C with an IR oven achieved the best properties with a bulk resistivity of 1.3 × 10-1 Ω·cm, mobility of 1.33 cm2/Vs, carrier concentration of 3.6 × 1019 cm-3. These results were even better when compared with high annealing temperatures. As proof of concept this TCO was successfully implemented in a liquid crystal cell and electro-chromic device showing their potential for real applications.Óxidos condutores transparentes (TCOs) são componentes críticos no funcionamento de diversos dispositivos optoeletrónicos bem como eletrónica transparente. Um dos mais usados, óxido de índio e estanho, requer equipamento muito caro e condições controladas para ser depositado. Síntese de solução com combustão (SCS) é um método simples e de baixo custo a ser estudado para produzir os mesmos óxidos. Filmes finos de óxido de índio dopado com háfnio produzido por SCS já mostraram propriedades muito promissoras quando recozidos a 400 °C. Este trabalho irá estudar a viabilidaded the produzir estes mesmos filmes a temperaturas ainda mais baixas, o suficiente para possibilitar o uso de substratos flexíveis. Filmes finos de TCO foram produzidos a temperaturas tais como 200 °C usando um forno de infravermelhos (IR) em vez do típico recozimento numa placa de aquecimento. Um filme fino de In2O3 dopado com 0.5 M % Hf recozido a 350 °C com um forno de infravermelhos obteve as melhores propriedades com uma resistividade em volume de 1.3 × 10-1 Ω·cm, mobilidade de 1.33 cm2/Vs, concentração de portadores de 3.6 × 1019 cm-3.Estes resultados foram ainda melhores quando comparados com altas temperaturas de recozimento. Como prova de conceito, este TCO foi implementado com sucesso numa célula de cristais líquidos e num dispositivo eletrocrómico mostrando o seu potencial para aplicações reais.Branquinho, RitaCarlos, EmanuelRUNAlves, André Frutuoso2024-02-23T13:39:57Z2023-112023-11-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/masterThesisapplication/pdfhttp://hdl.handle.net/10362/164011enginfo:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2024-03-11T05:49:39Zoai:run.unl.pt:10362/164011Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-20T03:59:56.429395Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse |
dc.title.none.fl_str_mv |
Low temperature processing of doped indium oxide thin films for electronic applications |
title |
Low temperature processing of doped indium oxide thin films for electronic applications |
spellingShingle |
Low temperature processing of doped indium oxide thin films for electronic applications Alves, André Frutuoso Transparent conducting oxide solution combustion synthesis indium oxide hafni-um dopant low temperature infrared oven Domínio/Área Científica::Engenharia e Tecnologia::Nanotecnologia |
title_short |
Low temperature processing of doped indium oxide thin films for electronic applications |
title_full |
Low temperature processing of doped indium oxide thin films for electronic applications |
title_fullStr |
Low temperature processing of doped indium oxide thin films for electronic applications |
title_full_unstemmed |
Low temperature processing of doped indium oxide thin films for electronic applications |
title_sort |
Low temperature processing of doped indium oxide thin films for electronic applications |
author |
Alves, André Frutuoso |
author_facet |
Alves, André Frutuoso |
author_role |
author |
dc.contributor.none.fl_str_mv |
Branquinho, Rita Carlos, Emanuel RUN |
dc.contributor.author.fl_str_mv |
Alves, André Frutuoso |
dc.subject.por.fl_str_mv |
Transparent conducting oxide solution combustion synthesis indium oxide hafni-um dopant low temperature infrared oven Domínio/Área Científica::Engenharia e Tecnologia::Nanotecnologia |
topic |
Transparent conducting oxide solution combustion synthesis indium oxide hafni-um dopant low temperature infrared oven Domínio/Área Científica::Engenharia e Tecnologia::Nanotecnologia |
description |
Transparent conducting oxides (TCOs) are critical components in the operation of sev-eral optoelectronic devices as well as transparent electronics. One of the most widely used, indium tin oxide (ITO), requires very expensive equipment and controlled conditions to be deposited. Solution combustion synthesis (SCS) is a simple and low-cost method being stud-ied to produce the same oxides. Thin films of indium oxide doped with hafnium produced by SCS have already shown very promising properties when annealed at 400 °C. This work will study the viability of producing these same films at even lower temperatures, enough to en-able the use of flexible substrates. TCO thin films were produced at low temperature such as 200 °C by using an infrared (IR) oven instead of the typical hotplate annealing. A 0.5 M % Hf-doped In2O3 thin film annealed at 350 °C with an IR oven achieved the best properties with a bulk resistivity of 1.3 × 10-1 Ω·cm, mobility of 1.33 cm2/Vs, carrier concentration of 3.6 × 1019 cm-3. These results were even better when compared with high annealing temperatures. As proof of concept this TCO was successfully implemented in a liquid crystal cell and electro-chromic device showing their potential for real applications. |
publishDate |
2023 |
dc.date.none.fl_str_mv |
2023-11 2023-11-01T00:00:00Z 2024-02-23T13:39:57Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/masterThesis |
format |
masterThesis |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/10362/164011 |
url |
http://hdl.handle.net/10362/164011 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
instname_str |
Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
instacron_str |
RCAAP |
institution |
RCAAP |
reponame_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
collection |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository.name.fl_str_mv |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
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1799138175854051328 |