Characterization of magnetron sputtered sub-stoichiometric CrAlSiNx and CrAlSiOyNx coatings
Autor(a) principal: | |
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Data de Publicação: | 2017 |
Outros Autores: | , , , , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | http://hdl.handle.net/1822/48540 |
Resumo: | The influence of varying nitrogen and oxygen partial pressures on microstructure, mechanical and optical properties of magnetron sputtered CrAlSiNx and CrAlSiOyNx coatings has been studied. The partial pressure of nitrogen reactive gaswas varied from0.037 Pa to 0.15 Pa for CrAlSiNx films, and the N2/O2 (85%:15%) partial pressure was varied from 0.046 Pa to 0.21 Pa for CrAlSiOyNx layers. Transmittance and reflectance of samples were measured and were modeled to obtain the spectral optical constants, n and k. Chemical state, composition, morphology and microstructure of films were analyzed by XPS, RBS, XRD, Raman Spectroscopy and SEM. Films' hardness was evaluated using nanoindentation method. XRD results revealed that the two samples CrAlSiNx with PN =0.15 Pa and CrAlSiOyNx with PNO = 0.21 Pa are polycrystalline with cubic (fcc-B1) structure. On contrary, all other films prepared with lower reactive gases partial pressures are amorphous. The chemical composition changed with the variation of reactive gases partial pressure, although the Cr: Al: Si composition ratio remained approximately constant, 1.25:1.5:1. All samples showed low hardness, mainly due to lower content of reactive gases and higher content of Si. However, the sample CrAlSiNx with PN = 0.15 Pa has the highest value of 11.1 GPa. Optical constants are seen to be very sensitive to reactive gases partial pressure. The refractive index and extinction coefficient were lower for coatings with higher reactive gases partial pressure. These coatings are good candidates for designing selective solar absorber stacks for different applications. |
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Characterization of magnetron sputtered sub-stoichiometric CrAlSiNx and CrAlSiOyNx coatingsCrAlSiNxOptical propertiesCrAlSiOyNxChemical structureHardnessCrAlSiO N y xCiências Naturais::Ciências FísicasScience & TechnologyThe influence of varying nitrogen and oxygen partial pressures on microstructure, mechanical and optical properties of magnetron sputtered CrAlSiNx and CrAlSiOyNx coatings has been studied. The partial pressure of nitrogen reactive gaswas varied from0.037 Pa to 0.15 Pa for CrAlSiNx films, and the N2/O2 (85%:15%) partial pressure was varied from 0.046 Pa to 0.21 Pa for CrAlSiOyNx layers. Transmittance and reflectance of samples were measured and were modeled to obtain the spectral optical constants, n and k. Chemical state, composition, morphology and microstructure of films were analyzed by XPS, RBS, XRD, Raman Spectroscopy and SEM. Films' hardness was evaluated using nanoindentation method. XRD results revealed that the two samples CrAlSiNx with PN =0.15 Pa and CrAlSiOyNx with PNO = 0.21 Pa are polycrystalline with cubic (fcc-B1) structure. On contrary, all other films prepared with lower reactive gases partial pressures are amorphous. The chemical composition changed with the variation of reactive gases partial pressure, although the Cr: Al: Si composition ratio remained approximately constant, 1.25:1.5:1. All samples showed low hardness, mainly due to lower content of reactive gases and higher content of Si. However, the sample CrAlSiNx with PN = 0.15 Pa has the highest value of 11.1 GPa. Optical constants are seen to be very sensitive to reactive gases partial pressure. The refractive index and extinction coefficient were lower for coatings with higher reactive gases partial pressure. These coatings are good candidates for designing selective solar absorber stacks for different applications.The authors acknowledge the support of FCT in the framework of the Strategic Funding UID/FIS/04650/2013 and the financial support of FCT, FOCI and PORL operational programs through the project POCI-01-0145-FEDER-016907 (PTDC/C11/1-ENE/2882/2014), co-financed by European community fund FEDER.info:eu-repo/semantics/publishedVersionElsevier B.V.Universidade do MinhoAl-Rjoub, A.Costa, P.Rebouta, L.Cerqueira, M. F.Alpuim, P.Barradas, N. P.Alves, E.2017-08-152017-08-15T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/48540engSurface & Coatings Technology 328 (2017) 134–1410257-897210.1016/j.surfcoat.2017.08.038http://www.sciencedirect.com/science/article/pii/S0257897217308368info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:33:02Zoai:repositorium.sdum.uminho.pt:1822/48540Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T19:28:29.302547Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse |
dc.title.none.fl_str_mv |
Characterization of magnetron sputtered sub-stoichiometric CrAlSiNx and CrAlSiOyNx coatings |
title |
Characterization of magnetron sputtered sub-stoichiometric CrAlSiNx and CrAlSiOyNx coatings |
spellingShingle |
Characterization of magnetron sputtered sub-stoichiometric CrAlSiNx and CrAlSiOyNx coatings Al-Rjoub, A. CrAlSiNx Optical properties CrAlSiOyNx Chemical structure Hardness CrAlSiO N y x Ciências Naturais::Ciências Físicas Science & Technology |
title_short |
Characterization of magnetron sputtered sub-stoichiometric CrAlSiNx and CrAlSiOyNx coatings |
title_full |
Characterization of magnetron sputtered sub-stoichiometric CrAlSiNx and CrAlSiOyNx coatings |
title_fullStr |
Characterization of magnetron sputtered sub-stoichiometric CrAlSiNx and CrAlSiOyNx coatings |
title_full_unstemmed |
Characterization of magnetron sputtered sub-stoichiometric CrAlSiNx and CrAlSiOyNx coatings |
title_sort |
Characterization of magnetron sputtered sub-stoichiometric CrAlSiNx and CrAlSiOyNx coatings |
author |
Al-Rjoub, A. |
author_facet |
Al-Rjoub, A. Costa, P. Rebouta, L. Cerqueira, M. F. Alpuim, P. Barradas, N. P. Alves, E. |
author_role |
author |
author2 |
Costa, P. Rebouta, L. Cerqueira, M. F. Alpuim, P. Barradas, N. P. Alves, E. |
author2_role |
author author author author author author |
dc.contributor.none.fl_str_mv |
Universidade do Minho |
dc.contributor.author.fl_str_mv |
Al-Rjoub, A. Costa, P. Rebouta, L. Cerqueira, M. F. Alpuim, P. Barradas, N. P. Alves, E. |
dc.subject.por.fl_str_mv |
CrAlSiNx Optical properties CrAlSiOyNx Chemical structure Hardness CrAlSiO N y x Ciências Naturais::Ciências Físicas Science & Technology |
topic |
CrAlSiNx Optical properties CrAlSiOyNx Chemical structure Hardness CrAlSiO N y x Ciências Naturais::Ciências Físicas Science & Technology |
description |
The influence of varying nitrogen and oxygen partial pressures on microstructure, mechanical and optical properties of magnetron sputtered CrAlSiNx and CrAlSiOyNx coatings has been studied. The partial pressure of nitrogen reactive gaswas varied from0.037 Pa to 0.15 Pa for CrAlSiNx films, and the N2/O2 (85%:15%) partial pressure was varied from 0.046 Pa to 0.21 Pa for CrAlSiOyNx layers. Transmittance and reflectance of samples were measured and were modeled to obtain the spectral optical constants, n and k. Chemical state, composition, morphology and microstructure of films were analyzed by XPS, RBS, XRD, Raman Spectroscopy and SEM. Films' hardness was evaluated using nanoindentation method. XRD results revealed that the two samples CrAlSiNx with PN =0.15 Pa and CrAlSiOyNx with PNO = 0.21 Pa are polycrystalline with cubic (fcc-B1) structure. On contrary, all other films prepared with lower reactive gases partial pressures are amorphous. The chemical composition changed with the variation of reactive gases partial pressure, although the Cr: Al: Si composition ratio remained approximately constant, 1.25:1.5:1. All samples showed low hardness, mainly due to lower content of reactive gases and higher content of Si. However, the sample CrAlSiNx with PN = 0.15 Pa has the highest value of 11.1 GPa. Optical constants are seen to be very sensitive to reactive gases partial pressure. The refractive index and extinction coefficient were lower for coatings with higher reactive gases partial pressure. These coatings are good candidates for designing selective solar absorber stacks for different applications. |
publishDate |
2017 |
dc.date.none.fl_str_mv |
2017-08-15 2017-08-15T00:00:00Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/1822/48540 |
url |
http://hdl.handle.net/1822/48540 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
Surface & Coatings Technology 328 (2017) 134–141 0257-8972 10.1016/j.surfcoat.2017.08.038 http://www.sciencedirect.com/science/article/pii/S0257897217308368 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.publisher.none.fl_str_mv |
Elsevier B.V. |
publisher.none.fl_str_mv |
Elsevier B.V. |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
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Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
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RCAAP |
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RCAAP |
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Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
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Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
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Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
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