Design and simulation of a direct and indirect drive electrostatically actuated resonant micro-mirrors for scanner applications
Autor(a) principal: | |
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Data de Publicação: | 2018 |
Tipo de documento: | Dissertação |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | http://hdl.handle.net/10362/85990 |
Resumo: | Laser scanners have been an integral part of MEMS research for more than three decades. The demand for electrostatically actuated scanning micro-mirrors have been growing in the last decade, mainly for pico-projection and medical applications. These type of actuation wins over others, because it provides long-term stability, size advantages and fabrication schemes which are easier to render CMOS compatibility. The growing field in softwares capable of design and simulate MEMS devices, have been a crucial help for engineers, which are limited to a few of them and still cost huge amount of time. MEMS+® is a software platform that provides simulation results up to 100 times faster than conventional finite element analysis tools and allows to integrate designs in MathWorks®. In this work two types of electrostatically actuated scanning micro-mirrors were designed and simulated using both MEMS+® and MathWorks®, one is a direct drive micro-mirror and the other an indirect drive micro-mirror. In the first the torque is imparted directly from the actuation mechanism to the frame containing the mirror, and in the second the resonance mode amplifies a small motion in a larger mass to a considerably larger motion in the smaller mirror. Regarding the direct-drive micro-mirror, the presented work mainly shows the reliability of MEMS+® compared to other softwares. The indirect drive one, is a state-of-art solution for high frequency electrostatically actuated micro-mirrors, and all the simulations taken on it were aimed to verify it´s behaviour, and then proceed with the microfabrication step. The target microfabrication technology is SOIMUMPs. |
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Design and simulation of a direct and indirect drive electrostatically actuated resonant micro-mirrors for scanner applicationsScanning micro-mirrorelectrostatically actuatedMEMS+®direct driveindirect driveSOIMUMPsDomínio/Área Científica::Engenharia e Tecnologia::Engenharia dos MateriaisLaser scanners have been an integral part of MEMS research for more than three decades. The demand for electrostatically actuated scanning micro-mirrors have been growing in the last decade, mainly for pico-projection and medical applications. These type of actuation wins over others, because it provides long-term stability, size advantages and fabrication schemes which are easier to render CMOS compatibility. The growing field in softwares capable of design and simulate MEMS devices, have been a crucial help for engineers, which are limited to a few of them and still cost huge amount of time. MEMS+® is a software platform that provides simulation results up to 100 times faster than conventional finite element analysis tools and allows to integrate designs in MathWorks®. In this work two types of electrostatically actuated scanning micro-mirrors were designed and simulated using both MEMS+® and MathWorks®, one is a direct drive micro-mirror and the other an indirect drive micro-mirror. In the first the torque is imparted directly from the actuation mechanism to the frame containing the mirror, and in the second the resonance mode amplifies a small motion in a larger mass to a considerably larger motion in the smaller mirror. Regarding the direct-drive micro-mirror, the presented work mainly shows the reliability of MEMS+® compared to other softwares. The indirect drive one, is a state-of-art solution for high frequency electrostatically actuated micro-mirrors, and all the simulations taken on it were aimed to verify it´s behaviour, and then proceed with the microfabrication step. The target microfabrication technology is SOIMUMPs.Grech, IvanPereira, LuísRUNRodrigues, Marco António Cavaco2019-10-31T15:57:13Z2018-1020182018-10-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/masterThesisapplication/pdfhttp://hdl.handle.net/10362/85990enginfo:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2024-03-11T04:38:44Zoai:run.unl.pt:10362/85990Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-20T03:36:40.816495Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse |
dc.title.none.fl_str_mv |
Design and simulation of a direct and indirect drive electrostatically actuated resonant micro-mirrors for scanner applications |
title |
Design and simulation of a direct and indirect drive electrostatically actuated resonant micro-mirrors for scanner applications |
spellingShingle |
Design and simulation of a direct and indirect drive electrostatically actuated resonant micro-mirrors for scanner applications Rodrigues, Marco António Cavaco Scanning micro-mirror electrostatically actuated MEMS+® direct drive indirect drive SOIMUMPs Domínio/Área Científica::Engenharia e Tecnologia::Engenharia dos Materiais |
title_short |
Design and simulation of a direct and indirect drive electrostatically actuated resonant micro-mirrors for scanner applications |
title_full |
Design and simulation of a direct and indirect drive electrostatically actuated resonant micro-mirrors for scanner applications |
title_fullStr |
Design and simulation of a direct and indirect drive electrostatically actuated resonant micro-mirrors for scanner applications |
title_full_unstemmed |
Design and simulation of a direct and indirect drive electrostatically actuated resonant micro-mirrors for scanner applications |
title_sort |
Design and simulation of a direct and indirect drive electrostatically actuated resonant micro-mirrors for scanner applications |
author |
Rodrigues, Marco António Cavaco |
author_facet |
Rodrigues, Marco António Cavaco |
author_role |
author |
dc.contributor.none.fl_str_mv |
Grech, Ivan Pereira, Luís RUN |
dc.contributor.author.fl_str_mv |
Rodrigues, Marco António Cavaco |
dc.subject.por.fl_str_mv |
Scanning micro-mirror electrostatically actuated MEMS+® direct drive indirect drive SOIMUMPs Domínio/Área Científica::Engenharia e Tecnologia::Engenharia dos Materiais |
topic |
Scanning micro-mirror electrostatically actuated MEMS+® direct drive indirect drive SOIMUMPs Domínio/Área Científica::Engenharia e Tecnologia::Engenharia dos Materiais |
description |
Laser scanners have been an integral part of MEMS research for more than three decades. The demand for electrostatically actuated scanning micro-mirrors have been growing in the last decade, mainly for pico-projection and medical applications. These type of actuation wins over others, because it provides long-term stability, size advantages and fabrication schemes which are easier to render CMOS compatibility. The growing field in softwares capable of design and simulate MEMS devices, have been a crucial help for engineers, which are limited to a few of them and still cost huge amount of time. MEMS+® is a software platform that provides simulation results up to 100 times faster than conventional finite element analysis tools and allows to integrate designs in MathWorks®. In this work two types of electrostatically actuated scanning micro-mirrors were designed and simulated using both MEMS+® and MathWorks®, one is a direct drive micro-mirror and the other an indirect drive micro-mirror. In the first the torque is imparted directly from the actuation mechanism to the frame containing the mirror, and in the second the resonance mode amplifies a small motion in a larger mass to a considerably larger motion in the smaller mirror. Regarding the direct-drive micro-mirror, the presented work mainly shows the reliability of MEMS+® compared to other softwares. The indirect drive one, is a state-of-art solution for high frequency electrostatically actuated micro-mirrors, and all the simulations taken on it were aimed to verify it´s behaviour, and then proceed with the microfabrication step. The target microfabrication technology is SOIMUMPs. |
publishDate |
2018 |
dc.date.none.fl_str_mv |
2018-10 2018 2018-10-01T00:00:00Z 2019-10-31T15:57:13Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/masterThesis |
format |
masterThesis |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/10362/85990 |
url |
http://hdl.handle.net/10362/85990 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
instname_str |
Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
instacron_str |
RCAAP |
institution |
RCAAP |
reponame_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
collection |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository.name.fl_str_mv |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
repository.mail.fl_str_mv |
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1799137984487882752 |